JPS63142823U - - Google Patents

Info

Publication number
JPS63142823U
JPS63142823U JP3578587U JP3578587U JPS63142823U JP S63142823 U JPS63142823 U JP S63142823U JP 3578587 U JP3578587 U JP 3578587U JP 3578587 U JP3578587 U JP 3578587U JP S63142823 U JPS63142823 U JP S63142823U
Authority
JP
Japan
Prior art keywords
shielding plate
view port
heating means
rotation means
view
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3578587U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3578587U priority Critical patent/JPS63142823U/ja
Publication of JPS63142823U publication Critical patent/JPS63142823U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP3578587U 1987-03-11 1987-03-11 Pending JPS63142823U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3578587U JPS63142823U (enrdf_load_stackoverflow) 1987-03-11 1987-03-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3578587U JPS63142823U (enrdf_load_stackoverflow) 1987-03-11 1987-03-11

Publications (1)

Publication Number Publication Date
JPS63142823U true JPS63142823U (enrdf_load_stackoverflow) 1988-09-20

Family

ID=30845590

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3578587U Pending JPS63142823U (enrdf_load_stackoverflow) 1987-03-11 1987-03-11

Country Status (1)

Country Link
JP (1) JPS63142823U (enrdf_load_stackoverflow)

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