JPS63140661U - - Google Patents
Info
- Publication number
- JPS63140661U JPS63140661U JP3371987U JP3371987U JPS63140661U JP S63140661 U JPS63140661 U JP S63140661U JP 3371987 U JP3371987 U JP 3371987U JP 3371987 U JP3371987 U JP 3371987U JP S63140661 U JPS63140661 U JP S63140661U
- Authority
- JP
- Japan
- Prior art keywords
- laminated
- strain gauge
- ceramic actuator
- face
- integrated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000919 ceramic Substances 0.000 claims description 4
- 238000006073 displacement reaction Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3371987U JPS63140661U (ko) | 1987-03-06 | 1987-03-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3371987U JPS63140661U (ko) | 1987-03-06 | 1987-03-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63140661U true JPS63140661U (ko) | 1988-09-16 |
Family
ID=30841590
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3371987U Pending JPS63140661U (ko) | 1987-03-06 | 1987-03-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63140661U (ko) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63283180A (ja) * | 1987-05-15 | 1988-11-21 | Yokogawa Electric Corp | 変位センサを有する圧電アクチュエ−タ |
| JP2003309983A (ja) * | 2002-04-15 | 2003-10-31 | Kyocera Corp | 案内装置 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57172202A (en) * | 1981-04-17 | 1982-10-23 | Hitachi Ltd | Displacement generator |
| JPS6364580A (ja) * | 1986-09-02 | 1988-03-23 | Hitachi Constr Mach Co Ltd | 圧電アクチユエ−タ |
| JPS6366980A (ja) * | 1986-09-09 | 1988-03-25 | Nippon Denso Co Ltd | 積層型圧電体 |
-
1987
- 1987-03-06 JP JP3371987U patent/JPS63140661U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57172202A (en) * | 1981-04-17 | 1982-10-23 | Hitachi Ltd | Displacement generator |
| JPS6364580A (ja) * | 1986-09-02 | 1988-03-23 | Hitachi Constr Mach Co Ltd | 圧電アクチユエ−タ |
| JPS6366980A (ja) * | 1986-09-09 | 1988-03-25 | Nippon Denso Co Ltd | 積層型圧電体 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63283180A (ja) * | 1987-05-15 | 1988-11-21 | Yokogawa Electric Corp | 変位センサを有する圧電アクチュエ−タ |
| JP2003309983A (ja) * | 2002-04-15 | 2003-10-31 | Kyocera Corp | 案内装置 |