JPS63140661U - - Google Patents
Info
- Publication number
- JPS63140661U JPS63140661U JP3371987U JP3371987U JPS63140661U JP S63140661 U JPS63140661 U JP S63140661U JP 3371987 U JP3371987 U JP 3371987U JP 3371987 U JP3371987 U JP 3371987U JP S63140661 U JPS63140661 U JP S63140661U
- Authority
- JP
- Japan
- Prior art keywords
- laminated
- strain gauge
- ceramic actuator
- face
- integrated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000919 ceramic Substances 0.000 claims description 4
- 238000006073 displacement reaction Methods 0.000 description 2
Description
第１図はこの考案による積層型圧電アクチユエ
ータの斜視説明図である。第２図は歪ゲージを有
する圧電アクチユエータの変位量と抵抗変化量と
の関係を示すグラフである。第３図は従来の積層
型圧電アクチユエータの斜視説明図である。第４
図は圧電アクチユエータの印加電圧と変位量との
関係を示すグラフである。
１……圧電磁器板、２……内部電極、３……絶
縁層、４……外部電極、５……外部端子、６……
積層端面、７……歪ゲージ。
FIG. 1 is a perspective explanatory view of a laminated piezoelectric actuator according to this invention. FIG. 2 is a graph showing the relationship between the displacement amount and the resistance change amount of a piezoelectric actuator having a strain gauge. FIG. 3 is a perspective explanatory view of a conventional laminated piezoelectric actuator. Fourth
The figure is a graph showing the relationship between applied voltage and displacement amount of a piezoelectric actuator. DESCRIPTION OF SYMBOLS 1... Piezoelectric ceramic plate, 2... Internal electrode, 3... Insulating layer, 4... External electrode, 5... External terminal, 6...
Laminated end face, 7...Strain gauge.
Claims (1)
化した磁器アクチユエータの積層端面に、少なく
とも１つの歪ゲージを固着したことを特徴とする
積層型磁器アクチユエータ。 A laminated ceramic actuator characterized in that at least one strain gauge is fixed to the laminated end face of the laminated ceramic actuator which is laminated and integrated by disposing internal electrodes between a plurality of ceramic plates.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3371987U JPS63140661U (en) | 1987-03-06 | 1987-03-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3371987U JPS63140661U (en) | 1987-03-06 | 1987-03-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63140661U true JPS63140661U (en) | 1988-09-16 |
Family
ID=30841590
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3371987U Pending JPS63140661U (en) | 1987-03-06 | 1987-03-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63140661U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63283180A (en) * | 1987-05-15 | 1988-11-21 | Yokogawa Electric Corp | Piezoelectric actuator with displacement sensor |
| JP2003309983A (en) * | 2002-04-15 | 2003-10-31 | Kyocera Corp | Guide apparatus |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57172202A (en) * | 1981-04-17 | 1982-10-23 | Hitachi Ltd | Displacement generator |
| JPS6364580A (en) * | 1986-09-02 | 1988-03-23 | Hitachi Constr Mach Co Ltd | Piezoelectric actuator |
| JPS6366980A (en) * | 1986-09-09 | 1988-03-25 | Nippon Denso Co Ltd | Laminated piezoelectric element |
-
1987
- 1987-03-06 JP JP3371987U patent/JPS63140661U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57172202A (en) * | 1981-04-17 | 1982-10-23 | Hitachi Ltd | Displacement generator |
| JPS6364580A (en) * | 1986-09-02 | 1988-03-23 | Hitachi Constr Mach Co Ltd | Piezoelectric actuator |
| JPS6366980A (en) * | 1986-09-09 | 1988-03-25 | Nippon Denso Co Ltd | Laminated piezoelectric element |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63283180A (en) * | 1987-05-15 | 1988-11-21 | Yokogawa Electric Corp | Piezoelectric actuator with displacement sensor |
| JP2003309983A (en) * | 2002-04-15 | 2003-10-31 | Kyocera Corp | Guide apparatus |