JPS63139757U - - Google Patents

Info

Publication number
JPS63139757U
JPS63139757U JP3154787U JP3154787U JPS63139757U JP S63139757 U JPS63139757 U JP S63139757U JP 3154787 U JP3154787 U JP 3154787U JP 3154787 U JP3154787 U JP 3154787U JP S63139757 U JPS63139757 U JP S63139757U
Authority
JP
Japan
Prior art keywords
electrodes
charged particle
particle beam
cylindrical member
beam device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3154787U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0521824Y2 (no
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3154787U priority Critical patent/JPH0521824Y2/ja
Publication of JPS63139757U publication Critical patent/JPS63139757U/ja
Application granted granted Critical
Publication of JPH0521824Y2 publication Critical patent/JPH0521824Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP3154787U 1987-03-04 1987-03-04 Expired - Lifetime JPH0521824Y2 (no)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3154787U JPH0521824Y2 (no) 1987-03-04 1987-03-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3154787U JPH0521824Y2 (no) 1987-03-04 1987-03-04

Publications (2)

Publication Number Publication Date
JPS63139757U true JPS63139757U (no) 1988-09-14
JPH0521824Y2 JPH0521824Y2 (no) 1993-06-04

Family

ID=30837386

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3154787U Expired - Lifetime JPH0521824Y2 (no) 1987-03-04 1987-03-04

Country Status (1)

Country Link
JP (1) JPH0521824Y2 (no)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010146833A1 (ja) * 2009-06-16 2010-12-23 株式会社日立ハイテクノロジーズ 荷電粒子線装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010146833A1 (ja) * 2009-06-16 2010-12-23 株式会社日立ハイテクノロジーズ 荷電粒子線装置
US8426835B2 (en) 2009-06-16 2013-04-23 Hitachi High-Technologies Corporation Charged particle radiation device
JP5406293B2 (ja) * 2009-06-16 2014-02-05 株式会社日立ハイテクノロジーズ 荷電粒子線装置

Also Published As

Publication number Publication date
JPH0521824Y2 (no) 1993-06-04

Similar Documents

Publication Publication Date Title
KR870010602A (ko) 음극선관장치
JPS63139757U (no)
JPS6354241U (no)
JPH0310460U (no)
JPH01100359U (no)
JPS5641658A (en) X-ray tube
JPS61139561U (no)
JPS6251649U (no)
KR900000946A (ko) 자기장을 이용하는 crt의 전자총 장착 조립체를 스폿-노킹하는 방법
JPS6345734Y2 (no)
JPS63109435U (no)
JPS6194365U (no)
JPS6161750U (no)
JPS6055047U (ja) 高周波電子管用電子銃構体
JPH04312743A (ja) 負電荷発生装置
JPS58110949U (ja) イオン銃
JPH0443899U (no)
JPS6284947U (no)
JPH0371541U (no)
JPH01142147U (no)
JPH0166737U (no)
JPS5976525U (ja) オゾン発生器
JPS6380560U (no)
JPS6356549U (no)
JPH01166490U (no)