JPS63139290A - Fine adjustment mechanism - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a fine movement mechanism used in an exposure apparatus for integrated circuits, an interferometer, or the like.

[Prior Art] Conventionally, in an exposure apparatus or an interferometer 1 for an integrated circuit, a fine beam is moved in a linear direction by a minute amount without causing any inclination. ha structure is used.

The fine movement mechanism is shown in FIG. 4a.

As shown in Fig. b, three piezo elements 2 are disposed on a six fixed base 1, and each piezo element 2 holds an annular moving frame 3, or a fine movement mechanism, or a support frame erected on a support stand 4 as shown in Fig. 5. A fine movement mechanism is known in which two actuating devices 6 each having a piezo element housed inside a cylindrical strain tube are disposed in the actuating device 5, and a moving frame 7 is held in the actuating device 5.

The latter fine movement mechanism is disclosed in Japanese Unexamined Patent Publication No. 147682/1982, and each actuation is controlled by inputting an electric signal 8 from a control circuit to a piezo element of each actuating device 6 via an amplifier 9. activating the device 6;
The interferometer element 11 fixed to the movable frame 7 by a locking portion can be moved slightly.

The former fine movement mechanism is also used by fixing a desired subject to the fine Ih frame 3 and operating each piezo element 2 via a control circuit to slightly move the subject.

[Problems to be Solved by the Invention] However, in the case of the fine movement mechanism shown in FIG. Although it is necessary, it is difficult to match the characteristics of each piezo element 2, so the moving frame 3 tends to tilt, and it has the disadvantage that it is difficult to always expect accurate micro-movement. It was something.

Therefore, in the fine movement mechanism shown in FIG. 5, the occurrence of the tilt of the moving frame 3 due to the difference in the characteristics of each piezo element 2 in the fine movement mechanism shown in FIG. This can be avoided by making it possible to match the characteristics of the internal piezo elements, but the configuration of the actuating device ff1S itself becomes complicated and adjustment is required to operate each actuating device 6 in synchronization. However, it has drawbacks such as being complicated to work with and being insufficient in the vertical direction.

Therefore, the present invention was developed in view of the drawbacks of the conventional fine movement mechanism, and is capable of performing accurate fine movement without being influenced by the characteristics of the piezo element, and has a simple structure. The purpose is to provide a fine movement mechanism that does not require complicated adjustment work and is superior to products.

[Means for Solving the Problem] The fine movement mechanism of the unreleased IJJ movably holds a movable member with respect to a fixed member via an elastic member, and interposes a lever member between the fixed member and the movable member, By providing a plurality of fulcrum connecting parts between the lever member and the fixed member to connect the lever member to the fixed member, and arranging a fine movement element between the lever members and a fulcrum member corresponding to the fine movement element. It is composed of

[Operation] The fine movement mechanism of the present invention finely moves a movable member movably held by a fixed member via an elastic member using a fine movement element via a fulcrum member of a lever member interposed between the fixed member and the movable member. It is something to do.

[Example] Examples of the fine movement mechanism of the present invention will be described below with reference to the drawings.

(First embodiment) Figures 1a, b, and c show a first embodiment of the unreleased Ill fine movement mechanism, and Figure 1a is a plan view, and Figure 1 or the A-A side in Figure 1a. The side view, FIG. 1C, is a partially broken BB--B sectional view in FIG. 1A.

In the figure, reference numeral 20 denotes a fixing member, and this fixing member 20 has a cylindrical support frame 23 erected on the outer periphery of a circular fixation base 22 with a through hole 21 in the center. An annular support edge 24 is formed protruding from the inner peripheral portion.

Reference numeral 25 denotes a movable member, and the movable member 25 includes a cylindrical frame 26 having an inner diameter approximately the same as the inner diameter of the through hole 21 formed in the fixed base 22 of the fixed member 20;
It is formed by protruding an annular support edge 27 from the upper side of the outer periphery.

Further, the movable member 25 has upper and lower annular leaf springs 28 disposed within the fixed member 20 so as to be movable vertically on the same axis.
．． It is held by 29.

The upper and lower leaf springs 28 and 29 have their outer peripheral edges buried and fixed in the inner peripheral wall of the fixed member 20, and their inner peripheral edges are buried and fixed in the outer peripheral wall of the movable member 26, so that the fixed member 20 and the movable member are fixed. It is interposed between 25 and 25 years. In addition to the above-mentioned structure, the method of fixing the inner and outer edges of the square plate springs 28 and 29, the fixed member 20, and the inner and outer walls of the movable member is not shown in the drawings. Fitting recesses are provided on the inner and outer edges of the leaf springs 28 and 29 at corresponding positions on the inner and outer walls, and threaded portions are provided in the fitting recesses, and the inner and outer peripheral edges of the leaf springs 28 and 29 fitted in the fitting recesses are provided. Examples include a method of fixing by screwing and fixing a screw member to the threaded portion, and the present invention is not limited to the above embodiments.

30 is an annular lever member, and this lever member 30 is interposed between the fixed member 20 and the movable member 25, and is opposed between the lever member 30 and the support edge 24 of the oil temperature fixing member 20, and is a fulcrum connection part. The lever member 30 is connected to the fixed member 20 by attaching a fulcrum spring 31,32 as a
In addition, a piezo element 33 is added between the support edge 27 of the moving member 25 and the lever member 30, and this piezo element 3
3, the distal end 34a of the fulcrum member 34, whose end is fixedly attached to the support edge 27 of the moving member 25, is disposed in a position opposite to the lever member 30 while the lever member 30a is brought into contact with the lever member 30. 30 is connected to the moving member 25.

Reference numeral 35 denotes a wiring hole for the piezo element 33, which is formed in the support frame 23 of the fixing member 20.

Regarding the structure of the fulcrum connecting portion between the lever member 30 and the fixing member 20, as is clear from the enlarged sectional view of FIG. In addition to the case where the upper and lower ends of the lever member 30 and the lever member 30 are embedded and fixed in the supporting edges 24 of the lever member 30 and the fixing member 20, respectively, as shown in the enlarged sectional view of FIG. 1e, the fixing member 20 and the lever member 30 are In forming the fulcrum connection piece 38., circular perforations 36 and 37 are provided on both left and right sides at positions corresponding to the fulcrum connection part to provide elasticity and to form the fulcrum connection piece 38.
39, or as shown in the enlarged sectional view of FIG.
and the supporting edge 24 of the fixing member 20, and the steel ball 40
The engaging recesses 41 and 42 are provided, and both engaging recesses 41 and 42 are provided.
Examples include a case where a steel ball 40 is interposed between the fulcrum springs 31 and 32 to form a fulcrum connection between the fixing member 20 and the lever member 30 instead of the fulcrum connection using the fulcrum springs 31 and 32. .

Further, the tip 34a of the fulcrum member 34 is formed into a spherical shape as shown in FIG. 1C, thereby reducing contact resistance against inclination of the lever member 30.

As for the method of using the fine movement mechanism having the above configuration, as shown in FIG. After the storage is set on the upper side, a required light beam is emitted onto the lens 43 through the through hole 21 formed in the fixed base 22 of the fixed member 20, and the piezo element 33 is driven while being inputted with a drive signal via the control circuit. By doing so, the movable member 25 is moved slightly and the focal position of the lens 43 is adjusted during use.

Furthermore, by driving the piezo element 33, the amount of displacement thereof is halved via the lever member 30 interposed between the fixed member 20 and the movable member 25 held thereon via leaf springs 28 and 29. At the same time, the movable member 25 held by the annular leaf springs 28 and 29 via the fulcrum member 34 is displaced coaxially with the fixed member 20 without tilting.

(Second Embodiment) Fig. 2 shows a second embodiment of the uninvented forcing mechanism, in which Fig. 2a is a plan view, Fig. 2 is a sectional view taken along the line CC in Fig. 2a, Figure 2C is a partially broken D in Figure 2a.
-D side sectional view.

However, the fine movement mechanism in this embodiment is as follows.

In the configuration of the fine movement mechanism of the first embodiment, the fixing member 2
0, the movable member 25 is movably held by the upper and lower leaf springs 28 and 29, but is instead held by the upper leaf spring 28 only.

Therefore, by omitting the arrangement of the lower leaf spring 29,
The installation space can be eliminated.

This has the advantage that the configuration of the a-motion mechanism can be made smaller and simpler.

The other functions and effects are the same as those of the fine movement mechanism of the first embodiment, and the same components as those of the first embodiment are given the same numbers, and the detailed structure thereof will be omitted.

(Third example) FIG. 3 shows a third embodiment of the unreleased IJI fine movement mechanism.

Figure 3 a is a plan view, Figure 3 is E-E in Figure 3 a.
Side sectional view, FIG. 3C is a partially broken side sectional view taken along line FF in FIG. 3a.

Therefore, in addition to the structure of the fine movement mechanism of the first embodiment, the fine movement mechanism of this embodiment has the structure of the support frame 26 of the fixed member 20.
An annular support edge 46 is protruded from the upper side of the inner circumferential wall of the moving member 25, and a pressure spring 47 as a pressure elastic member is elastically mounted between the support edge 46 and the support edge 27, 46 of the moving member 25. In the fine movement mechanism of the first and second embodiments, the moving member 25 is driven by the piezo element 33.
The displacement of the piezo element 33 is obtained by the reaction force due to the elasticity of the upper and lower sides or the upper plate springs 28 and 29 via the lever member 30 and the fulcrum member 34. The moving member 2 is moved through the lever member 30 and the fulcrum member 34 while applying the elasticity of the pressure spring 47.
Since the upper and lower side plate springs 28 and 29 can be considered only for the function of holding the movable member 25 in its width, the linearity of the same structure can be widened. able to demonstrate.

The other functions and effects are the same as those of the fine movement mechanism of the first embodiment, and the same components as those of the first embodiment are given the same reference numerals and their explanations will be omitted.

Further, regarding the pressure spring 47, the fixing member 20
In addition to the configuration in which one annular spring is elastically loaded in the annular direction between the support edges 27 and 47 of the fine movement member 25, it is also possible to configure a configuration in which a plurality of springs are elastically loaded in the annular direction. It is.

[Effect of the invention] The uninvented movement mechanism can be configured without using a plurality of fine movement elements, so that accurate displacement can be achieved without being influenced by the characteristics of each movement element, such as by aligning the characteristics of each fine movement element. This has the advantage that the amount can be stably obtained without inclination, and the performance of fine movement control can be improved by the displacement operation via the lever member and the fulcrum member.

[Brief explanation of the drawing]

Figures 1a, b, and c show a first embodiment of the micro-motion am of the present invention, where 1rAa is a plan view, Figure 1 is a sectional view taken along the line A-A in Figure 1a, and Figure 1C is a cross-sectional view taken along line A-A in Figure 1a. A partially cutaway side sectional view taken along the line B-B in Fig. 1a, and Fig. 2 shows the second
2A is a plan view, FIG. 2A is a side view taken along C--C in FIG. 2A, and FIG. 2C is a partially cutaway D-D in FIG. 2A. Side sectional view, Figure 3 is undeveloped I
Fig. 3a is a plan view showing a third embodiment of the JJ fine movement mechanism;
Figure 3 is a sectional view taken along E-E in Figure 3a, Figure 3C
3 is a partially broken side sectional view taken along the line FF in FIG. 3a, and FIGS. 4a, 4b, and 5 are explanatory views of the prior art. 20...Fixed member 21...Through hole 22...Fixed base 23...Support frame 24.27.46...Support edge 25...Movable member 26...Frame body 28.29. ... Leaf spring 30 ... Lever member 31, 32 ... Fulcrum spring 33 ... Piezo element 34 ... Fulcrum member 43 ... Lens 44 ... Holding frame 45 ... Holding ring 47 ...・Pressure spring patent applicant Olympus Optical Industry Co., Ltd. Figure 1 (c)
) 404z Figure 2 (a) Figure 2 (b) Figure 3 Figure 4 (a) (b) Procedure number 1. -F Tsume 2 (spontaneous) 1985 I J'329 I+ 1, “19 Showa 61 Patent Application No. 287268 2, issued I
Name of Fine Movement Mechanism 3, Person making the correction Relationship with the matter Patent applicant address 2-43-2 Hatagaya, Shibuya-ku, Tokyo Name (037) Representative of Olympus Optical Industry Co., Ltd.
Satoshi Shimoyama Dept. 4, Agent 7, Contents of the amendment (1) "Insufficient in the vertical direction" stated in page 3, line 17 to line 18 of the same page of the specification has been changed to "inadequate in the vertical direction" ``The rigidity in the direction is insufficient.'' % formula % ■, Indication of the case 1985 Patent Application No. 287268 2, Name of the invention Fine movement mechanism 3, Person making the amendment Relationship with the case Patent application Address 2-43-2 Hatagaya, Shibuya-ku, Tokyo Name (037) Olympus Optical Industry Co., Ltd. Representative Shimoyamashikibe 4, Agent Sent on February 24, 1986 6, Subject to amendment (1) Column 711, ``Brief explanation of page 1 of the specification'', 711゛°゛＼ 7. Contents of amendment (1) ``Cross-sectional view,'' described on page 12, line 18 of the specification.
"No." is corrected to "A cross-sectional view, and FIGS.

Claims (1)

[Claims] (1) A movable member is movably held with respect to a fixed member via an elastic member, a lever member is interposed between the fixed member and the movable member, and a plurality of fulcrums are connected between the lever member and the fixed member. 1. A fine movement mechanism, characterized in that the lever member is connected to a fixed member by connecting the lever member to the fixing member, and a fine movement element and a fulcrum member are arranged in correspondence with the fine movement element between the lever members.