JP3434097B2 - Fine movement mechanism - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a fine movement mechanism used in an exposure apparatus for an integrated circuit, an interferometer, or the like.

[0002]

2. Description of the Related Art Conventionally, in an interferometer or the like, a fine movement mechanism has been used which moves a functional element such as a lens by a small amount in a linear direction without causing an inclination.

As such a fine movement mechanism, a fine movement mechanism as shown in FIGS. 10 to 13 is used. Figure 10
Is a plan view, FIG. 11 is a sectional view taken along line AA in FIG. 10, and FIG. 12 is a sectional view taken along line BB in FIG. FIG. 13 is a cross-sectional view taken along the line AA when a lens system for emitting light and a lens system for fine movement are arranged in this fine movement mechanism.

In FIGS. 10 to 12, reference numeral 60 denotes a cylindrical fixing member, which comprises a cylindrical supporting frame 63 and an annular fixing base 62 provided on the bottom of the supporting frame 63.
The fixed base 62 is provided with a hole 61 in the center thereof, and an annular support edge 64 is provided on the lower side of the inner peripheral portion of the support frame 63 so as to project.

Further, in FIGS. 10 to 12, reference numeral 65 is a moving member, and the moving member 65 is the fixed member 6.
0 is formed by a cylindrical frame 66 having an inner diameter substantially the same as the inner diameter of the hole 61 formed in the fixed base 62, and an annular support edge 67 projecting from the outer periphery of the frame 66. .

Further, the fixed member 60 and the moving member 65 are connected by a pair of upper and lower annular leaf springs 68 and 69, whereby the moving member 65 is the same as the fixed member 60 in the fixed member 60. It is possible to move vertically on the axis. That is, the leaf springs 68 and 69 have their outer peripheral edges embedded and fixed in the inner peripheral wall of the fixing member 60, and their inner peripheral edges embedded and fixed in the outer peripheral wall of the moving member 65. It is interposed between and.

Reference numeral 70 shown in FIGS. 11 and 12 is an annular lever member, and the lever member 70 is interposed between the fixed member 60 and the moving member 65 and supports the lever member 70 and the fixed member 60. The lever member 70 is fixed between the edges 64 by attaching fulcrum springs 71 and 72 as fulcrum connecting portions (acting as fulcrums) so as to face each other.
It is connected to 0.

A piezo element (acting as a force point) 7 is provided between the support edge 67 of the moving member 65 and the lever member 70.
3 is attached, and at the position facing the piezo element 73 with respect to the moving member 65, the moving member 6
Fulcrum member 7 fixedly attached to the supporting edge 67 of 5
The lever member 7 is provided with a tip 74a of 4 (acting as an action point).
The lever member 70 is connected to the moving member 65 via the piezo element 73 and the fulcrum member 74 by arranging the lever member 70 in contact with the upper surface in FIG.

In the conventional fine movement mechanism having the above structure, as shown in FIG. 13, after a lens system 78 including a lens 79 and a frame 80 to be finely moved is set on the moving member 65, it is ejected from the lens system 75. The desired light beam that has passed through the hole 61 formed in the fixed base 62 of the fixed member 60 is applied to another lens system 78 attached to the moving member 65, and a drive signal is sent to the piezo element 73 via a control circuit. The moving member 65 is finely moved by driving while inputting, and the focus position of the lens system 78 is adjusted and used.

By driving the piezo element 73, the displacement amount of the moving member 65 is interposed between the fixed member 60 and the moving member 65 held by the plate springs 68 and 69. The moving member 65 is halved through the lever member 70 and is held by the annular leaf springs 68 and 69 through the fulcrum member 74, and is displaced coaxially with the fixed member 60 without being inclined with respect to the axial direction. .

[0011]

However, in the above-mentioned conventional technique, as shown in FIG. 13, another lens system 7 is used.
5 is attached to the fixed base 62 of the fixing member 60, and the lens system 78 to be finely moved is attached to the moving member 65.
For this reason, there is a problem in that the space between the lens system 75 and the lens system 78 is greatly opened, and the space for the fine movement mechanism cannot be saved.

In the above-mentioned prior art, the lens system 75
Can be placed inside the cylindrical frame 66 of the moving member, but in this case, a frame for fixing the lens system 75 to the fixed base 62 is required, and this frame is used as the cylindrical frame 66.
However, there is a problem in that the fine movement mechanism becomes very complicated, and the cost of the fine movement mechanism cannot be reduced.

The present invention provides a fine movement mechanism which solves such a problem of the conventional fine movement mechanism and which can be made smaller in size and lower in cost than the conventional fine movement mechanism.

[0014]

According to a first aspect of the present invention, there is provided a fine movement mechanism including a fixing member having a functional element inside, and a fixing member arranged outside the fixing member. A movable member that is supported so as to be movable in a predetermined direction and has a functional element for fine movement, and a fine movement element that is interposed between the fixed member and the movable member and that is displaced in the axial direction of the movable member on one surface thereof. A fulcrum member opposed to the fine movement element, and the position of the fine movement element on the other surface.
And an annular lever member provided with a pair of fulcrum connecting portions at positions facing each other at a distance, the fine movement element as a force point, the fulcrum connecting portion as a fulcrum, the fulcrum member as an action point, and It is characterized in that the movable member is finely moved together with the functional element for finely moving the movable member via the lever member.

According to a second aspect of the present invention, there is provided a fine movement mechanism in which a first optical system is provided in a cylindrical fixing member provided on an inner peripheral portion of the cylindrical member so as to be axially movable by screw connection, and arranged outside the fixing member. Between the stationary member and the moving member, which is movably supported in the axial direction by the fixing member and has a second optical system for finely moving the light attached thereto, and the fixing member and the moving member. A fine movement element which is interposed and which is displaced in the axial direction of the moving member, and a fulcrum member opposed to the fine movement element are provided, and the position of the fine movement element and the position of the fine movement element are provided on the other surface.
And a ring-shaped lever member provided with a pair of fulcrum connecting portions at positions facing each other at a distance of 0 degree, the fine movement element as a force point, the fulcrum connecting portion as a fulcrum, and the fulcrum member as an action point, The moving member is finely moved together with the second optical system via the lever member, and the optical adjustment is possible by axial movement of the first optical system with respect to the cylindrical fixing member. Is.

According to a third aspect of the present invention, there is provided a fine movement mechanism in which the first optical system is axially movable in the inner peripheral portion and is detachably mounted, and a cylindrical fixing member, and the fixing member. A second member that is disposed on the outer side and is movably supported in the axial direction by the fixing member via an elastic member, and that finely moves the light.
A cylindrical moving member having an optical system attached thereto, and is interposed between the fixed member and the moving member, and one surface thereof is provided with a fine movement element which is displaced in the axial direction of the movement member and the fine movement element is opposed to the fine movement element. And a ring-shaped lever member provided with a pair of fulcrum connecting portions at a position facing the position of the fine movement element at a position 90 degrees apart from the position of the fine movement element. By using the fulcrum connection portion as a fulcrum, the fulcrum member as an action point, the moving member is finely moved together with the second optical system via the lever member, and the first optical system is attached to or detached from the fixed member. It is characterized in that the first optical system can be replaced.

According to the fine movement mechanism of the first aspect of the present invention, the functional element is arranged inside the fixed member, the fine movement element serves as a force point, the fulcrum connection portion serves as a fulcrum, and the fulcrum member serves as an action point. , Since it is configured to finely move together with the functional element for finely moving the moving member via the lever member,
Compared with the conventional example, the number of parts is reduced, the distance between the functional elements can be shortened, the structure is simplified, and the size and cost can be reduced.

According to the fine movement mechanism of the second aspect of the invention, the number of parts is reduced as in the fine movement mechanism of the first aspect of the invention, and the distance between the first and second optical systems is reduced. It can be shortened, the structure can be simplified, the size and cost can be reduced, and the optical adjustment can be performed by moving the first optical system with respect to the cylindrical fixing member in the axial direction. Etc. becomes easy.

According to the fine movement mechanism of the third aspect of the invention, the number of parts is reduced as in the fine movement mechanism of the second aspect of the invention, and the distance between the first and second optical systems is reduced. It can be shortened, the structure can be simplified, downsizing and cost reduction can be achieved, and the first optical system can be replaced. Therefore, this fine movement mechanism can be used for the existing first optical system. It becomes possible to perform mounting optical adjustment.

[0020]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described in detail below.

[First Embodiment] FIGS. 1 to 3 show a fine movement mechanism according to a first embodiment of the present invention. FIG. 1 shows the first embodiment.
2 is a plan view of the fine movement mechanism of FIG. 2, FIG. 2 is a sectional view taken along line CC in FIG. 1, and FIG. 3 is a sectional view taken along line DD of FIG.

In FIGS. 1 to 3, reference numeral 21 denotes a fixing member, and the fixing member 21 has an annular support edge 23 on the upper portion of the outer periphery of a cylindrical support frame 52 having a hole 22 formed in the center thereof.
And a hole 22 is formed in the inner peripheral portion of the support frame 52.
A first lens system 24, which is a functional element that emits light that is incident on a lens system 36 that is a second optical system that is a functional element that moves slightly, is arranged.

A moving member 25 is arranged on the outer periphery of the fixed member 21. The moving member 25 has a substantially cylindrical frame body 26 having a hole 28 into which a mounting portion of a lens system 36 as a second optical system for fine movement can be inserted, and a hole 28 on the inner periphery of the frame body 26. It is constituted by an annular support edge 27 protruding on the side.

The moving member 25 is held outside the fixed member 21 by a pair of annular leaf springs 29 and 30 so as to be vertically movable on the same axis. The pair of leaf springs 29, 30 have their outer peripheral edges moved by the moving member 25.
The structure is such that the inner peripheral edge is embedded and fixed in the inner peripheral wall portion, and the inner peripheral edge is embedded and fixed in the outer peripheral wall portion of the fixing member 21, whereby the state is interposed between the fixing member 21 and the moving member 25.

In FIGS. 2 and 3, reference numeral 31 denotes an annular lever member, and the lever member 31 includes the fixed member 21 and the moving member 2.
5, and a fulcrum spring 32 as a fulcrum connecting portion (acting as a fulcrum) in a disposition facing the fixed member 21 between the lever member 31 and the support edge 27 of the moving member 25. By attaching 33, the lever member 31 is connected to the moving member 25 via the fulcrum springs 32 and 33.

A piezo element (acting as a force point) 3 is provided between the support edge 23 of the fixing member 21 and the lever member 31.
4 is attached, and at the opposite position with respect to the piezo element 34 and the fixing member 21, the supporting edge 23 of the fixing member 21 is provided.
35a of the fulcrum member 35 fixedly attached to the end
By placing the lever member 31 (which acts as the point of action) in contact with the lever member 31, the lever member 31 can be disposed.
4, it is connected to the fixing member 21 via the fulcrum member 35.

The lens system 36 for fine movement is a lens 38.
And a frame 37 for fixing the lens 38 to the moving member 25.
It consists of and.

In the above-described fine movement mechanism, after the lens system 36 to be finely moved is set on the moving member 25, the light 41 incident on the lens system 24 becomes light 42, which passes through the hole 22 of the fixing member 21 and makes a fine movement. The desired light 43 is made incident on the desired lens system 36, and a desired light 43 is emitted from this lens system 36, and the piezoelectric device 34 is driven by inputting a drive signal through a control circuit (not shown). The moving member 25 is slightly moved by the displacement, and the lens system 3
Adjust the focus position of 6.

By driving the piezo element 34, the displacement amount of the piezo element 34 is fixed to that of the fixed member 21.
Moving member 2 held by leaf springs 29, 30 from 1
5 is halved via a lever member 31 interposed between the leaf springs 5 and 5, and an annular leaf spring 2 via a fulcrum member 35.
The moving member 25 held by 9, 30 is displaced coaxially with the fixed member 21 without tilting with respect to the axial direction.

According to the first embodiment, since the lens system 24 for emitting light is fixedly arranged directly in the hole 22 of the fixing member 21, the number of parts constituting the fine movement mechanism is smaller than that of the conventional example. Therefore, it is possible to provide the fine movement mechanism which has a simplified structure, saves space, and reduces cost.

Further, as shown in FIGS. 2 and 3, if the fine movement mechanism described above is housed in a cover 40 having a hole 39 in which the outer diameter of the lens system 36 is inserted, the moving member 25 cannot be accommodated. You can easily prevent your hands and objects from touching, and the fine movement mechanism will be protected.

[Second Embodiment] Next, a second embodiment of the present invention will be described with reference to FIGS. 4 is a plan view of the fine movement mechanism according to the second embodiment, FIG. 5 is a sectional view taken along line EE in FIG. 4, and FIG. 6 is a sectional view taken along line FF in FIG. .

In the second embodiment, the portion corresponding to the hole 22 of the fixing member 21 in the first embodiment is a female screw 44, and the lens frame 4 for holding the lens system 24 for emitting light.
5 is characterized in that a male screw 46 provided on the outer circumference of 5 is screwed into the female screw 44. The other configurations are similar to those of the first embodiment.

In the fine movement mechanism of the second embodiment, in the lens system 24 for emitting light, the lens frame 45 is connected to the fixing member 21 by the screwing structure of the male screw 46 and the female screw 44, so that the fine movement is performed. After attaching the mechanism to, for example, an interferometer, the lens frame 45 is moved in the same axial direction as the fixing member 21 by rotating the male screw 46 with respect to the female screw 44 so that the light emitted from the lens system 24 becomes a desired light. By doing so, optical adjustment such as focus position adjustment can be easily performed.

According to the second embodiment, since the lens system 24 can be moved in the axial direction of the fixing member 21, the lens system 24 is moved from the lens system 24 after the fine movement mechanism of the second embodiment is attached to an interferometer or the like. Optical adjustment such as focus position adjustment of the lens system 24 can be easily performed from the outside only by rotating the lens frame 45 so that the emitted light becomes a desired light.

[Third Embodiment] Next, a third embodiment of the present invention will be described with reference to FIGS. 7 is a plan view of the fine movement mechanism of the third embodiment, FIG. 8 is a sectional view taken along the line GG in FIG. 7, and FIG. 9 is a sectional view taken along the line HH in FIG. .

In the third embodiment, the lens system 24 for emitting the light in the first embodiment is held inside, and a cylindrical lens frame 48 having a circular outer periphery 49,
A hole 5 slidably fitted to the outer circumference 49 of the lens frame 48
1. The fixing member 50 having the same structure as that of the fixing member 21 described above, in which a screw 53 that makes contact with the outer periphery 49 of the lens frame 48 is provided on the flange 50a provided at the upper end of the outer periphery.
It is characterized by having and. Other configurations are the same as those of the first embodiment
The configuration is the same.

In the fine movement mechanism of the third embodiment, when it is desired to remove the lens frame 48 to which the lens system 24 is attached from the fixing member 50 (when it is desired to separate the fine movement mechanism and the lens frame 48 to which the lens system 24 is attached). The screw 53 of the fixing member 50 is loosened to fix the outer periphery 49 of the lens frame 48 and the fixing member 5.
It suffices to pull out the lens frame 48 in the axial direction while sliding it in the hole 51 of 0.

According to the third embodiment, the fine movement mechanism can be removed from the lens frame 48 while the lens frame 48 is still attached to the interferometer, and after the fine movement mechanism is attached again, the lens system 24 There is no need to redo the optical adjustment.

If the hole 51 of the fixing member 50 is manufactured so as to match the outer circumference 49 of the existing lens frame 48, the fine movement mechanism can be easily added to the lens system 24 which does not have the fine movement mechanism. Furthermore, if a plurality of fine movement mechanisms having the same hole 51 are manufactured, the fine movement mechanism can be replaced by using the screw 53 of the fixing member 50, and maintenance and inspection can be facilitated.

In the above-described first to third embodiments, the case where the optical system as the functional element is arranged inside the fixing member has been described, but the functional element is not limited to the optical system, and the laser is not limited. Various light source elements such as diodes and LEDs may be used. The optical system may be a transmissive optical system represented by a lens or a reflective optical system such as a mirror or a prism.

[0042]

According to the first aspect of the present invention, the number of parts is reduced as compared with the conventional example, and the distance between the both functional elements can be shortened, the structure is simplified, the size is reduced, and the cost is reduced. It is possible to provide a fine movement mechanism that can be realized.

According to the invention described in claim 2, in addition to the effect of the invention described in claim 1, there is provided a fine movement mechanism capable of optical adjustment by axial movement of the first optical system with respect to the fixing member. You can

According to the third aspect of the invention, in addition to the effect of the second aspect of the invention, the fine movement mechanism can be attached to the existing first optical system to perform optical adjustment. Can be provided.

[Brief description of drawings]

FIG. 1 is a plan view showing a fine movement mechanism according to a first embodiment.

FIG. 2 is a side sectional view taken along the line CC in FIG.

FIG. 3 is a sectional side view taken along the line DD of FIG.

FIG. 4 is a plan view of a fine movement mechanism according to the second embodiment.

5 is a side sectional view taken along line EE in FIG.

FIG. 6 is a side sectional view taken along line FF of FIG.

FIG. 7 is a plan view of a fine movement mechanism according to the third embodiment.

8 is a sectional view taken along the line GG in FIG.

FIG. 9 is a side sectional view taken along line HH of FIG.

FIG. 10 is a plan view of a conventional fine movement mechanism.

11 is a cross-sectional view taken along the line AA of the fine movement mechanism shown in FIG.

12 is a side cross-sectional view taken along the line BB of the fine movement mechanism shown in FIG.

13 is a cross-sectional view taken along the line AA when a lens system for emitting light and a lens system for fine movement are arranged in the fine movement mechanism shown in FIG.

[Explanation of symbols]

21 Fixing member 22 holes 23 Supporting edge 24 lens system 25 Moving member 26 frame 27 Support edge 29 leaf spring 30 leaf spring 31 Lever member 32 fulcrum spring 33 fulcrum spring 34 Piezo element 36 lens system 37 frames 38 lenses 52 Support frame

─────────────────────────────────────────────────── --- Continuation of the front page (56) References JP-A 63-139290 (JP, A) JP-A 6-123831 (JP, A) JP-A 62-256333 (JP, A) JP-A 59- 201237 (JP, A) Actual development Sho 61-171016 (JP, U) Actual development Hei 5-4115 (JP, U) (58) Fields investigated (Int.Cl. ⁷ , DB name) G02B 7/04 G12B 5 / 00 H01L 41/09

Claims (3)

(57) [Claims] 1. A fixing member having a functional element inside, and a finely moving functional element arranged outside the fixing member and movably supported in the axial direction by an elastic member by the fixing member. A movable member, a fixed member interposed between the fixed member and the movable member, and provided on one surface with a fine movement element that is displaced in the axial direction of the movement member and a fulcrum member that is opposed to the fine movement element. The surface has an annular lever member provided with a pair of fulcrum connecting portions at a position facing the position of the fine moving element and a position separated by 90 degrees, and the fine moving element is a force point, and the fulcrum connecting portion is a fulcrum. ,
A fine movement mechanism, wherein the fulcrum member is used as a point of action to finely move together with a functional element that finely moves the moving member via the lever member. 2. A cylindrical fixing member provided with a first optical system on an inner peripheral portion thereof so as to be axially movable by screw connection, and a cylindrical fixing member disposed outside the fixing member, with an elastic member interposed by the fixing member. A cylindrical moving member that is movably supported in the axial direction and that has a second optical system that slightly moves the light, and is interposed between the fixed member and the moving member, and one surface of the moving member is A fine movement element that is displaced in the axial direction of the moving member and a fulcrum member that opposes the fine movement element are provided, and a pair of fulcrum connection portions are arranged on the other surface so as to face the position of the fine movement element and a position separated by 90 degrees. And an annular lever member provided with, the fine movement element as a force point, the fulcrum connection portion as a fulcrum,
Using the fulcrum member as a point of action, the moving member can be finely moved together with the second optical system via the lever member, and optical adjustment can be performed by axial movement of the first optical system with respect to the cylindrical fixing member. And, a fine movement mechanism characterized by. 3. A cylindrical fixing member provided with the first optical system so as to be movable in the inner peripheral portion in the axial direction and detachably, and arranged outside the fixing member, and elastic by the fixing member. A cylindrical moving member, which is movably supported in the axial direction via a member and has a second optical system for finely moving light, and is interposed between the fixed member and the moving member, and one surface Is provided with a fine movement element that is displaced in the axial direction of the moving member and a fulcrum member that faces the fine movement element. On the other surface, there is a pair of arrangements that face the position of the fine movement element and a position that is separated by 90 degrees. And an annular lever member provided with a fulcrum connection portion, the fine movement element as a force point, the fulcrum connection portion as a fulcrum,
With the fulcrum member as an action point, the moving member is finely moved together with the second optical system via the lever member, and the first optical system can be replaced by attaching / detaching the first optical system to / from the fixing member. And, a fine movement mechanism characterized by.