JPS63137941U - - Google Patents

Info

Publication number
JPS63137941U
JPS63137941U JP3039487U JP3039487U JPS63137941U JP S63137941 U JPS63137941 U JP S63137941U JP 3039487 U JP3039487 U JP 3039487U JP 3039487 U JP3039487 U JP 3039487U JP S63137941 U JPS63137941 U JP S63137941U
Authority
JP
Japan
Prior art keywords
wiring layer
layer
wiring
groove
sectional
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3039487U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3039487U priority Critical patent/JPS63137941U/ja
Publication of JPS63137941U publication Critical patent/JPS63137941U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP3039487U 1987-03-04 1987-03-04 Pending JPS63137941U (US20100056889A1-20100304-C00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3039487U JPS63137941U (US20100056889A1-20100304-C00004.png) 1987-03-04 1987-03-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3039487U JPS63137941U (US20100056889A1-20100304-C00004.png) 1987-03-04 1987-03-04

Publications (1)

Publication Number Publication Date
JPS63137941U true JPS63137941U (US20100056889A1-20100304-C00004.png) 1988-09-12

Family

ID=30835159

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3039487U Pending JPS63137941U (US20100056889A1-20100304-C00004.png) 1987-03-04 1987-03-04

Country Status (1)

Country Link
JP (1) JPS63137941U (US20100056889A1-20100304-C00004.png)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0391243A (ja) * 1989-09-01 1991-04-16 Matsushita Electron Corp 半導体装置の製造方法
JPH0621235A (ja) * 1992-07-01 1994-01-28 Nec Corp 半導体装置
JP2007142087A (ja) * 2005-11-17 2007-06-07 Nec Electronics Corp 半導体装置
JP2009520367A (ja) * 2005-12-16 2009-05-21 フリースケール セミコンダクター インコーポレイテッド 埋没接点を有するトランジスタとその形成方法
JP2010192646A (ja) * 2009-02-18 2010-09-02 Toshiba Corp 半導体装置及びその製造方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6235645A (ja) * 1985-08-09 1987-02-16 Hitachi Ltd 半導体装置とその製造法
JPS62118543A (ja) * 1985-11-18 1987-05-29 Nec Corp 半導体集積回路装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6235645A (ja) * 1985-08-09 1987-02-16 Hitachi Ltd 半導体装置とその製造法
JPS62118543A (ja) * 1985-11-18 1987-05-29 Nec Corp 半導体集積回路装置

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0391243A (ja) * 1989-09-01 1991-04-16 Matsushita Electron Corp 半導体装置の製造方法
JPH0621235A (ja) * 1992-07-01 1994-01-28 Nec Corp 半導体装置
JP2007142087A (ja) * 2005-11-17 2007-06-07 Nec Electronics Corp 半導体装置
JP2009520367A (ja) * 2005-12-16 2009-05-21 フリースケール セミコンダクター インコーポレイテッド 埋没接点を有するトランジスタとその形成方法
JP2010192646A (ja) * 2009-02-18 2010-09-02 Toshiba Corp 半導体装置及びその製造方法

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