JPS63137452U - - Google Patents

Info

Publication number
JPS63137452U
JPS63137452U JP3081087U JP3081087U JPS63137452U JP S63137452 U JPS63137452 U JP S63137452U JP 3081087 U JP3081087 U JP 3081087U JP 3081087 U JP3081087 U JP 3081087U JP S63137452 U JPS63137452 U JP S63137452U
Authority
JP
Japan
Prior art keywords
base
emitter
supply pipe
channel
supplying gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3081087U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0353403Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3081087U priority Critical patent/JPH0353403Y2/ja
Publication of JPS63137452U publication Critical patent/JPS63137452U/ja
Application granted granted Critical
Publication of JPH0353403Y2 publication Critical patent/JPH0353403Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP3081087U 1987-03-03 1987-03-03 Expired JPH0353403Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3081087U JPH0353403Y2 (enrdf_load_stackoverflow) 1987-03-03 1987-03-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3081087U JPH0353403Y2 (enrdf_load_stackoverflow) 1987-03-03 1987-03-03

Publications (2)

Publication Number Publication Date
JPS63137452U true JPS63137452U (enrdf_load_stackoverflow) 1988-09-09
JPH0353403Y2 JPH0353403Y2 (enrdf_load_stackoverflow) 1991-11-21

Family

ID=30835965

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3081087U Expired JPH0353403Y2 (enrdf_load_stackoverflow) 1987-03-03 1987-03-03

Country Status (1)

Country Link
JP (1) JPH0353403Y2 (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009016354A (ja) * 2007-07-06 2009-01-22 Ict Integrated Circuit Testing Ges Fuer Halbleiterprueftechnik Mbh モジュラガスイオン源
WO2009147894A1 (ja) * 2008-06-05 2009-12-10 株式会社日立ハイテクノロジーズ イオンビーム装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009016354A (ja) * 2007-07-06 2009-01-22 Ict Integrated Circuit Testing Ges Fuer Halbleiterprueftechnik Mbh モジュラガスイオン源
WO2009147894A1 (ja) * 2008-06-05 2009-12-10 株式会社日立ハイテクノロジーズ イオンビーム装置
JP5097823B2 (ja) * 2008-06-05 2012-12-12 株式会社日立ハイテクノロジーズ イオンビーム装置

Also Published As

Publication number Publication date
JPH0353403Y2 (enrdf_load_stackoverflow) 1991-11-21

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