JPS63137168A - マイクロ波プラズマ処理装置 - Google Patents

マイクロ波プラズマ処理装置

Info

Publication number
JPS63137168A
JPS63137168A JP28306486A JP28306486A JPS63137168A JP S63137168 A JPS63137168 A JP S63137168A JP 28306486 A JP28306486 A JP 28306486A JP 28306486 A JP28306486 A JP 28306486A JP S63137168 A JPS63137168 A JP S63137168A
Authority
JP
Japan
Prior art keywords
microwave
plasma processing
processing apparatus
material gas
plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP28306486A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0521988B2 (enrdf_load_stackoverflow
Inventor
Kazuo Suzuki
和夫 鈴木
Atsushi Chiba
淳 千葉
Tadashi Sonobe
園部　正
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Service Engineering Co Ltd
Hitachi Ltd
Original Assignee
Hitachi Service Engineering Co Ltd
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Service Engineering Co Ltd, Hitachi Ltd filed Critical Hitachi Service Engineering Co Ltd
Priority to JP28306486A priority Critical patent/JPS63137168A/ja
Publication of JPS63137168A publication Critical patent/JPS63137168A/ja
Publication of JPH0521988B2 publication Critical patent/JPH0521988B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP28306486A 1986-11-29 1986-11-29 マイクロ波プラズマ処理装置 Granted JPS63137168A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP28306486A JPS63137168A (ja) 1986-11-29 1986-11-29 マイクロ波プラズマ処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28306486A JPS63137168A (ja) 1986-11-29 1986-11-29 マイクロ波プラズマ処理装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP13394890A Division JPH0317273A (ja) 1990-05-25 1990-05-25 マイクロ波プラズマ処理装置

Publications (2)

Publication Number Publication Date
JPS63137168A true JPS63137168A (ja) 1988-06-09
JPH0521988B2 JPH0521988B2 (enrdf_load_stackoverflow) 1993-03-26

Family

ID=17660735

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28306486A Granted JPS63137168A (ja) 1986-11-29 1986-11-29 マイクロ波プラズマ処理装置

Country Status (1)

Country Link
JP (1) JPS63137168A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01290760A (ja) * 1988-05-19 1989-11-22 Nippon Telegr & Teleph Corp <Ntt> 薄膜形成装置
JPH0379421U (enrdf_load_stackoverflow) * 1989-12-01 1991-08-13

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01290760A (ja) * 1988-05-19 1989-11-22 Nippon Telegr & Teleph Corp <Ntt> 薄膜形成装置
JPH0379421U (enrdf_load_stackoverflow) * 1989-12-01 1991-08-13

Also Published As

Publication number Publication date
JPH0521988B2 (enrdf_load_stackoverflow) 1993-03-26

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