JPS63135799U - - Google Patents

Info

Publication number
JPS63135799U
JPS63135799U JP2862187U JP2862187U JPS63135799U JP S63135799 U JPS63135799 U JP S63135799U JP 2862187 U JP2862187 U JP 2862187U JP 2862187 U JP2862187 U JP 2862187U JP S63135799 U JPS63135799 U JP S63135799U
Authority
JP
Japan
Prior art keywords
high frequency
variable capacitor
power
line
detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2862187U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2862187U priority Critical patent/JPS63135799U/ja
Publication of JPS63135799U publication Critical patent/JPS63135799U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Tubes For Measurement (AREA)
JP2862187U 1987-02-27 1987-02-27 Pending JPS63135799U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2862187U JPS63135799U (enExample) 1987-02-27 1987-02-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2862187U JPS63135799U (enExample) 1987-02-27 1987-02-27

Publications (1)

Publication Number Publication Date
JPS63135799U true JPS63135799U (enExample) 1988-09-06

Family

ID=30831756

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2862187U Pending JPS63135799U (enExample) 1987-02-27 1987-02-27

Country Status (1)

Country Link
JP (1) JPS63135799U (enExample)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5973900A (ja) * 1982-10-18 1984-04-26 株式会社日立国際電気 プラズマ発生器用インピ−ダンス自動整合装置
JPS60205241A (ja) * 1984-03-02 1985-10-16 ザ・パーキン―エルマー・コーポレイション プラズマ放出源
JPS6225500B2 (enExample) * 1981-07-31 1987-06-03 Ishizuka Kk

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6225500B2 (enExample) * 1981-07-31 1987-06-03 Ishizuka Kk
JPS5973900A (ja) * 1982-10-18 1984-04-26 株式会社日立国際電気 プラズマ発生器用インピ−ダンス自動整合装置
JPS60205241A (ja) * 1984-03-02 1985-10-16 ザ・パーキン―エルマー・コーポレイション プラズマ放出源

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