JPS63135758U - - Google Patents

Info

Publication number
JPS63135758U
JPS63135758U JP2862087U JP2862087U JPS63135758U JP S63135758 U JPS63135758 U JP S63135758U JP 2862087 U JP2862087 U JP 2862087U JP 2862087 U JP2862087 U JP 2862087U JP S63135758 U JPS63135758 U JP S63135758U
Authority
JP
Japan
Prior art keywords
high frequency
casing
inductively coupled
coupled plasma
frequency inductively
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2862087U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0521250Y2 (fi
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2862087U priority Critical patent/JPH0521250Y2/ja
Publication of JPS63135758U publication Critical patent/JPS63135758U/ja
Application granted granted Critical
Publication of JPH0521250Y2 publication Critical patent/JPH0521250Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Electron Tubes For Measurement (AREA)
JP2862087U 1987-02-27 1987-02-27 Expired - Lifetime JPH0521250Y2 (fi)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2862087U JPH0521250Y2 (fi) 1987-02-27 1987-02-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2862087U JPH0521250Y2 (fi) 1987-02-27 1987-02-27

Publications (2)

Publication Number Publication Date
JPS63135758U true JPS63135758U (fi) 1988-09-06
JPH0521250Y2 JPH0521250Y2 (fi) 1993-05-31

Family

ID=30831754

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2862087U Expired - Lifetime JPH0521250Y2 (fi) 1987-02-27 1987-02-27

Country Status (1)

Country Link
JP (1) JPH0521250Y2 (fi)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63191900A (ja) * 1986-11-14 1988-08-09 ザ、プロクター、エンド、ギャンブル、カンパニー イオン対複合体コンディショニング剤およびそれを含有する組成物

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63191900A (ja) * 1986-11-14 1988-08-09 ザ、プロクター、エンド、ギャンブル、カンパニー イオン対複合体コンディショニング剤およびそれを含有する組成物

Also Published As

Publication number Publication date
JPH0521250Y2 (fi) 1993-05-31

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