JPS63133370U - - Google Patents
Info
- Publication number
- JPS63133370U JPS63133370U JP2614687U JP2614687U JPS63133370U JP S63133370 U JPS63133370 U JP S63133370U JP 2614687 U JP2614687 U JP 2614687U JP 2614687 U JP2614687 U JP 2614687U JP S63133370 U JPS63133370 U JP S63133370U
- Authority
- JP
- Japan
- Prior art keywords
- plate
- rotary base
- rotary
- rotation center
- coating device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011248 coating agent Substances 0.000 claims description 3
- 238000000576 coating method Methods 0.000 claims description 3
- 239000012530 fluid Substances 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 238000004528 spin coating Methods 0.000 description 3
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2614687U JPS63133370U (fr) | 1987-02-24 | 1987-02-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2614687U JPS63133370U (fr) | 1987-02-24 | 1987-02-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63133370U true JPS63133370U (fr) | 1988-08-31 |
Family
ID=30826953
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2614687U Pending JPS63133370U (fr) | 1987-02-24 | 1987-02-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63133370U (fr) |
-
1987
- 1987-02-24 JP JP2614687U patent/JPS63133370U/ja active Pending