JPS631328U - - Google Patents
Info
- Publication number
- JPS631328U JPS631328U JP9459086U JP9459086U JPS631328U JP S631328 U JPS631328 U JP S631328U JP 9459086 U JP9459086 U JP 9459086U JP 9459086 U JP9459086 U JP 9459086U JP S631328 U JPS631328 U JP S631328U
- Authority
- JP
- Japan
- Prior art keywords
- cleaned
- ultrasonic
- support mechanism
- cleaning machine
- ultrasonic waves
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 2
- 238000004506 ultrasonic cleaning Methods 0.000 claims 2
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9459086U JPS631328U (ro) | 1986-06-23 | 1986-06-23 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9459086U JPS631328U (ro) | 1986-06-23 | 1986-06-23 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS631328U true JPS631328U (ro) | 1988-01-07 |
Family
ID=30958202
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9459086U Pending JPS631328U (ro) | 1986-06-23 | 1986-06-23 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS631328U (ro) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5433676A (en) * | 1977-08-22 | 1979-03-12 | Hitachi Ltd | Wafer processing unit |
JPS59142885A (ja) * | 1983-02-07 | 1984-08-16 | 株式会社日立製作所 | 超音波処理方法およびその装置 |
-
1986
- 1986-06-23 JP JP9459086U patent/JPS631328U/ja active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5433676A (en) * | 1977-08-22 | 1979-03-12 | Hitachi Ltd | Wafer processing unit |
JPS59142885A (ja) * | 1983-02-07 | 1984-08-16 | 株式会社日立製作所 | 超音波処理方法およびその装置 |