JPS63132299U - - Google Patents

Info

Publication number

JPS63132299U

JPS63132299U JP2443787U JP2443787U JPS63132299U JP S63132299 U JPS63132299 U JP S63132299U JP 2443787 U JP2443787 U JP 2443787U JP 2443787 U JP2443787 U JP 2443787U JP S63132299 U JPS63132299 U JP S63132299U

Authority

JP

Japan

Prior art keywords

jig

receiving member

base

heat

transportation

Prior art date

1987-02-20

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 4
• 229910052710 silicon Inorganic materials 0.000 claims description 4
• 239000010703 silicon Substances 0.000 claims description 4
• HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims 2
• 229910010271 silicon carbide Inorganic materials 0.000 claims 2
• 239000000463 material Substances 0.000 claims 1
• 239000010453 quartz Substances 0.000 claims 1
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
• 235000012431 wafers Nutrition 0.000 description 3