JPS63132299U - - Google Patents
Info
- Publication number
- JPS63132299U JPS63132299U JP2443787U JP2443787U JPS63132299U JP S63132299 U JPS63132299 U JP S63132299U JP 2443787 U JP2443787 U JP 2443787U JP 2443787 U JP2443787 U JP 2443787U JP S63132299 U JPS63132299 U JP S63132299U
- Authority
- JP
- Japan
- Prior art keywords
- jig
- receiving member
- base
- heat
- transportation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 4
- 229910052710 silicon Inorganic materials 0.000 claims description 4
- 239000010703 silicon Substances 0.000 claims description 4
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims 2
- 229910010271 silicon carbide Inorganic materials 0.000 claims 2
- 239000000463 material Substances 0.000 claims 1
- 239000010453 quartz Substances 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 description 3
Landscapes
- Tunnel Furnaces (AREA)
- Furnace Charging Or Discharging (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2443787U JPS63132299U (US07321065-20080122-C00020.png) | 1987-02-20 | 1987-02-20 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2443787U JPS63132299U (US07321065-20080122-C00020.png) | 1987-02-20 | 1987-02-20 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63132299U true JPS63132299U (US07321065-20080122-C00020.png) | 1988-08-30 |
Family
ID=30823664
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2443787U Pending JPS63132299U (US07321065-20080122-C00020.png) | 1987-02-20 | 1987-02-20 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63132299U (US07321065-20080122-C00020.png) |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5978529A (ja) * | 1982-10-28 | 1984-05-07 | Toshiba Ceramics Co Ltd | 半導体製造用炭化珪素質材料 |
JPS59200431A (ja) * | 1983-04-28 | 1984-11-13 | Toshiba Ceramics Co Ltd | ウエハ−ボ−ト搬送用具 |
JPS59200432A (ja) * | 1983-04-28 | 1984-11-13 | Toshiba Ceramics Co Ltd | ウエハ−ボ−ト用の搬送用具 |
JPS624336A (ja) * | 1985-07-01 | 1987-01-10 | Toshiba Ceramics Co Ltd | ウエ−ハボ−ト搬送用具 |
-
1987
- 1987-02-20 JP JP2443787U patent/JPS63132299U/ja active Pending
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5978529A (ja) * | 1982-10-28 | 1984-05-07 | Toshiba Ceramics Co Ltd | 半導体製造用炭化珪素質材料 |
JPS59200431A (ja) * | 1983-04-28 | 1984-11-13 | Toshiba Ceramics Co Ltd | ウエハ−ボ−ト搬送用具 |
JPS59200432A (ja) * | 1983-04-28 | 1984-11-13 | Toshiba Ceramics Co Ltd | ウエハ−ボ−ト用の搬送用具 |
JPS624336A (ja) * | 1985-07-01 | 1987-01-10 | Toshiba Ceramics Co Ltd | ウエ−ハボ−ト搬送用具 |