JPS63131766U - - Google Patents
Info
- Publication number
- JPS63131766U JPS63131766U JP2444287U JP2444287U JPS63131766U JP S63131766 U JPS63131766 U JP S63131766U JP 2444287 U JP2444287 U JP 2444287U JP 2444287 U JP2444287 U JP 2444287U JP S63131766 U JPS63131766 U JP S63131766U
- Authority
- JP
- Japan
- Prior art keywords
- vapor phase
- phase growth
- growth apparatus
- obstacle
- mixed gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001947 vapour-phase growth Methods 0.000 claims 6
- 239000007789 gas Substances 0.000 claims 5
- 238000009434 installation Methods 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 239000010453 quartz Substances 0.000 claims 1
- 239000002994 raw material Substances 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 239000013078 crystal Substances 0.000 description 2
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2444287U JPS63131766U (enExample) | 1987-02-20 | 1987-02-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2444287U JPS63131766U (enExample) | 1987-02-20 | 1987-02-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63131766U true JPS63131766U (enExample) | 1988-08-29 |
Family
ID=30823674
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2444287U Pending JPS63131766U (enExample) | 1987-02-20 | 1987-02-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63131766U (enExample) |
-
1987
- 1987-02-20 JP JP2444287U patent/JPS63131766U/ja active Pending
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