JPH0425871U - - Google Patents
Info
- Publication number
- JPH0425871U JPH0425871U JP6597490U JP6597490U JPH0425871U JP H0425871 U JPH0425871 U JP H0425871U JP 6597490 U JP6597490 U JP 6597490U JP 6597490 U JP6597490 U JP 6597490U JP H0425871 U JPH0425871 U JP H0425871U
- Authority
- JP
- Japan
- Prior art keywords
- reactor
- line
- exhaust line
- vapor phase
- growth apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001947 vapour-phase growth Methods 0.000 claims description 5
- 239000002994 raw material Substances 0.000 claims 2
- 239000000463 material Substances 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 125000002524 organometallic group Chemical group 0.000 claims 1
- 238000000927 vapour-phase epitaxy Methods 0.000 claims 1
- 239000000498 cooling water Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6597490U JPH0425871U (enExample) | 1990-06-25 | 1990-06-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6597490U JPH0425871U (enExample) | 1990-06-25 | 1990-06-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0425871U true JPH0425871U (enExample) | 1992-03-02 |
Family
ID=31598290
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6597490U Pending JPH0425871U (enExample) | 1990-06-25 | 1990-06-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0425871U (enExample) |
-
1990
- 1990-06-25 JP JP6597490U patent/JPH0425871U/ja active Pending
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