JPS63131451A - 材料検査装置 - Google Patents

材料検査装置

Info

Publication number
JPS63131451A
JPS63131451A JP61276340A JP27634086A JPS63131451A JP S63131451 A JPS63131451 A JP S63131451A JP 61276340 A JP61276340 A JP 61276340A JP 27634086 A JP27634086 A JP 27634086A JP S63131451 A JPS63131451 A JP S63131451A
Authority
JP
Japan
Prior art keywords
scanning
pattern
defect
pitches
detected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61276340A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0467740B2 (OSRAM
Inventor
Yoichi Suzuki
鈴木　羊一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP61276340A priority Critical patent/JPS63131451A/ja
Publication of JPS63131451A publication Critical patent/JPS63131451A/ja
Publication of JPH0467740B2 publication Critical patent/JPH0467740B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP61276340A 1986-11-19 1986-11-19 材料検査装置 Granted JPS63131451A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61276340A JPS63131451A (ja) 1986-11-19 1986-11-19 材料検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61276340A JPS63131451A (ja) 1986-11-19 1986-11-19 材料検査装置

Publications (2)

Publication Number Publication Date
JPS63131451A true JPS63131451A (ja) 1988-06-03
JPH0467740B2 JPH0467740B2 (OSRAM) 1992-10-29

Family

ID=17568072

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61276340A Granted JPS63131451A (ja) 1986-11-19 1986-11-19 材料検査装置

Country Status (1)

Country Link
JP (1) JPS63131451A (OSRAM)

Also Published As

Publication number Publication date
JPH0467740B2 (OSRAM) 1992-10-29

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