JPS6313123A - Magnetic disk and its production - Google Patents
Magnetic disk and its productionInfo
- Publication number
- JPS6313123A JPS6313123A JP15641886A JP15641886A JPS6313123A JP S6313123 A JPS6313123 A JP S6313123A JP 15641886 A JP15641886 A JP 15641886A JP 15641886 A JP15641886 A JP 15641886A JP S6313123 A JPS6313123 A JP S6313123A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- magnetic disk
- metal
- protective film
- corrosion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 7
- 239000002184 metal Substances 0.000 claims abstract description 26
- 229910052751 metal Inorganic materials 0.000 claims abstract description 26
- 238000000034 method Methods 0.000 claims abstract description 13
- 239000011248 coating agent Substances 0.000 claims abstract description 7
- 238000000576 coating method Methods 0.000 claims abstract description 7
- 229920002120 photoresistant polymer Polymers 0.000 claims abstract description 7
- 230000007797 corrosion Effects 0.000 abstract description 22
- 238000005260 corrosion Methods 0.000 abstract description 22
- 230000001681 protective effect Effects 0.000 abstract description 19
- 239000010953 base metal Substances 0.000 abstract description 17
- 229910000838 Al alloy Inorganic materials 0.000 abstract description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract description 4
- 229910052799 carbon Inorganic materials 0.000 abstract description 4
- 238000007772 electroless plating Methods 0.000 abstract description 4
- 239000000758 substrate Substances 0.000 abstract description 4
- 229910045601 alloy Inorganic materials 0.000 abstract description 2
- 239000000956 alloy Substances 0.000 abstract description 2
- 229910052725 zinc Inorganic materials 0.000 abstract description 2
- 229910018104 Ni-P Inorganic materials 0.000 abstract 2
- 229910018536 Ni—P Inorganic materials 0.000 abstract 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 abstract 2
- 229910017518 Cu Zn Inorganic materials 0.000 abstract 1
- 229910017752 Cu-Zn Inorganic materials 0.000 abstract 1
- 229910017943 Cu—Zn Inorganic materials 0.000 abstract 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract 1
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- TVZPLCNGKSPOJA-UHFFFAOYSA-N copper zinc Chemical compound [Cu].[Zn] TVZPLCNGKSPOJA-UHFFFAOYSA-N 0.000 abstract 1
- 229910052593 corundum Inorganic materials 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 235000012239 silicon dioxide Nutrition 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
- 229910001845 yogo sapphire Inorganic materials 0.000 abstract 1
- 239000010408 film Substances 0.000 description 24
- 230000000052 comparative effect Effects 0.000 description 7
- 239000000463 material Substances 0.000 description 5
- 150000002739 metals Chemical class 0.000 description 5
- 239000010409 thin film Substances 0.000 description 5
- 238000000926 separation method Methods 0.000 description 3
- 230000003197 catalytic effect Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000001755 magnetron sputter deposition Methods 0.000 description 2
- 229910020630 Co Ni Inorganic materials 0.000 description 1
- 229910002440 Co–Ni Inorganic materials 0.000 description 1
- 229910002593 Fe-Ti Inorganic materials 0.000 description 1
- 229910001096 P alloy Inorganic materials 0.000 description 1
- 239000004721 Polyphenylene oxide Substances 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005536 corrosion prevention Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 230000001050 lubricating effect Effects 0.000 description 1
- 239000010687 lubricating oil Substances 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 125000005010 perfluoroalkyl group Chemical group 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229920000570 polyether Polymers 0.000 description 1
- 238000001552 radio frequency sputter deposition Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 238000004506 ultrasonic cleaning Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Manufacturing Of Magnetic Record Carriers (AREA)
- Magnetic Record Carriers (AREA)
Abstract
Description
【発明の詳細な説明】 （産業上の利用分野） 本発明は高信頼性を有する磁気ディスク装置に関する。[Detailed description of the invention] (Industrial application field) The present invention relates to a magnetic disk device with high reliability.
（従来の技術）
一般に金属磁性薄膜を用いる磁気ディスクは、装置の起
動、停止時に生じる磁気ヘッドとの摩擦接触に耐えるた
めの高い機械性耐久性と、磁性薄膜の腐食を防ぐための
良好な耐候性を有することが要求されている。このため
に磁気ディスク上には保護膜が設けられており、保護膜
としてはＳｉｎｇ。(Prior art) Generally, magnetic disks using metal magnetic thin films have high mechanical durability to withstand the frictional contact with the magnetic head that occurs when starting and stopping the device, and good weather resistance to prevent corrosion of the magnetic thin film. It is required to have gender. For this purpose, a protective film is provided on the magnetic disk, and the protective film is Sing.
ＡＩ、Ｏ，等の酸化膜（特公昭５８−１８５０２９ ）
、 ＳｉＮ等の窒化膜（米国特許４２７７５４０）、
カーボン等の固体潤滑膜（特公昭６０−２３４０６ 、
特開昭５０−１３７７０１ ）が一般に用いられている
。Oxide film of AI, O, etc. (Special Publication No. 58-185029)
, nitride film such as SiN (US Pat. No. 4,277,540),
Solid lubricating film such as carbon (Special Publication No. 60-23406,
JP-A-50-137701) is generally used.
（発明が解決しようとする問題点）
磁気ディスクの記録密度の向上のためには磁性媒体と磁
気ヘッド間の分離長低減が不可欠の要件であることから
、保護膜の薄膜化、磁気ヘッドの浮上量の低減が現在緊
急に達成すべき重要な課題となっている１例えば線密度
５０ＫＢＰＩ以上の高記録密度を得るためには、磁気ヘ
ッド／磁性媒体間の分離長を０．２μｍ以下にする必要
があるとされている。現在の空気軸受方式による磁気ヘ
ッドの浮上量は、原理的には気体分子の平均自由行程に
よって、実用的にはヘッドクラッシュ、ヘッドヒツト等
に起因する機械的耐久性及び信頼性の確保に関連して制
限をうけ、現在の技術水準で浮上量を０１５μｍ以下と
することは困難である。したがってｓ ０．２ｐｍ以下
の分離長を得るためには保穫膜の膜厚を５０ｎｍ以下に
抑える必要がある。ところが、膜厚５０ｎｍ以下の薄膜
は均一かつ連続的に被覆することが困１ｓ々うえに、微
細孔やマイクロクラックなどの欠陥密度が増大するため
に、そのような欠陥を介して磁性媒体が局部的に腐食さ
れビットエラーの増加につながるという磁気ディスクの
保護膜として致命的な欠点を抱えている。(Problems to be Solved by the Invention) In order to improve the recording density of magnetic disks, it is essential to reduce the separation length between the magnetic medium and the magnetic head. Reducing the magnetic head capacity is currently an important issue that must be achieved urgently.1 For example, in order to obtain a high recording density of 50 KBPI or higher, the separation length between the magnetic head and the magnetic medium must be 0.2 μm or less. It is said that there is. The flying height of magnetic heads using current air bearing systems is determined by the mean free path of gas molecules in principle, but in practical terms is related to ensuring mechanical durability and reliability due to head crashes, head hits, etc. Due to the limitations, it is difficult to reduce the flying height to 0.15 μm or less with the current state of the art. Therefore, in order to obtain a separation length of s 0.2 pm or less, it is necessary to suppress the thickness of the protective film to 50 nm or less. However, it is difficult to coat a thin film with a thickness of 50 nm or less uniformly and continuously, and the density of defects such as micropores and microcracks increases, so the magnetic medium may be locally damaged through such defects. It has a fatal flaw as a protective film for magnetic disks, as it is corroded and leads to an increase in bit errors.
（問題点を解決するための手段）
そこで、本発明の磁気ディスクは金属磁性薄膜を用いる
磁気ディスク上の非記録再生部分の一部あるいはすべて
に磁性媒体金属よりも卑な金属を被覆することを特徴と
する磁気ディスクであり、本発明はそのような構造の磁
気ディスクでは非記録再生部分の卑な金属が選択的な腐
食を受けることによって、膜厚５０ｎｍ以下の保護膜で
あっても記録再生部分の金属磁性媒体の腐食を防止する
ことができる磁気ディスクを提供するものである。(Means for Solving the Problems) Therefore, in the magnetic disk of the present invention, a part or all of the non-recording/reproducing portion on the magnetic disk using a metal magnetic thin film is coated with a metal less base than the magnetic medium metal. In a magnetic disk having such a structure, the base metal in the non-recording/reading part undergoes selective corrosion, so that recording/reading is possible even with a protective film of 50 nm or less in thickness. The present invention provides a magnetic disk that can prevent corrosion of the metal magnetic medium in its parts.
（作用）
本発明は、一般に異種金属接触腐食または電池作用腐食
とよばれる原理に基づいている０例えば、２種の金属を
互いに接触させて腐食性雰囲気にさらすと、腐食電位の
低い卑々金属はアノードとなって比較的速い腐食を生じ
石のに対して、カソードとなった責な金属はその金属が
単独でいる場合よ）も腐食速度は著しく、ときには無視
できるほどに低下する。異種金属が接触した時にいずれ
の金属がアノードとなって腐食を受けるかは、問題とし
ている腐食環境中での金属の腐食電位によって判断され
るが、おおよその傾向はその金属を構成している主成分
元素のイオン化ポテンシャルに基づいて推定することが
できる。このような異種金属接触腐食の原理に基づいた
防蝕技術はこれまでは主に橋梁など水中構造物の防蝕に
利用されている。例えば、水中の橋脚部分には橋脚を構
成する鉄鋼材料よりも卑な金属（一般に犠牲アノードと
よばれ、 Ｚｎなどが用いられる。）が設置されておシ
、橋脚を腐食から保護している０本発明は以上述べてき
た原理を磁気ディスクの防蝕に利用し、金属磁性媒体上
に被覆したそれよ）も卑な金属膜が高温高湿の腐食環境
下で選択的に腐食されることによって金属磁性媒体の防
蝕を図ったものである。(Function) The present invention is based on a principle generally called catalytic corrosion of dissimilar metals or battery corrosion. Whereas stones act as anodes and cause relatively fast corrosion, metals that act as cathodes (when the metal is alone) also exhibit a significant, sometimes negligible, reduction in corrosion rate. When dissimilar metals come into contact, which metal becomes the anode and undergoes corrosion is determined by the corrosion potential of the metal in the corrosive environment in question, but the general tendency is to It can be estimated based on the ionization potential of the component elements. Corrosion prevention technology based on the principle of catalytic corrosion of dissimilar metals has so far been mainly used for corrosion protection of underwater structures such as bridges. For example, submerged bridge piers are equipped with metals (generally called sacrificial anodes, such as Zn) that are less noble than the steel materials that make up the piers, protecting the piers from corrosion. The present invention utilizes the above-mentioned principle for corrosion protection of magnetic disks, and the base metal film coated on the metal magnetic medium is selectively corroded in a high-temperature, high-humidity corrosive environment. This is intended to prevent corrosion of magnetic media.
（実施例）
以下、この発明の実施例を詳細に説明する。第１図は本
発明の磁気ディスクの断面図である。磁性媒体を含む下
地体の作製条件は以下のようである８機械加工と熱矯正
によって十分小さなうねりを有した表面に仕上げられた
外径１３０ｍ５内径４０ｆｆのディスク状アルミニウム
合金基板１上にＮ１−Ｐ合金を厚さ５０ｐｍに無電解め
っきし、とのＮｊ−Ｐ膜２に研磨とボリシング加工を施
すことによって表面粗さを５０ｎｍ以下に鏡面仕上した
。その上にＣｏ−Ｎ１−Ｐ金属磁性媒体３を厚さ８０ｎ
ｍ無電解めっきにより被覆した。なお、以後に示す実施
例はすべてこの磁性媒体を含むアルミニウム合金基板を
下地体として用いた。なお、第１図において４は卑金属
層、５は保護膜である。(Example) Hereinafter, an example of the present invention will be described in detail. FIG. 1 is a sectional view of the magnetic disk of the present invention. The conditions for manufacturing the base body containing the magnetic medium are as follows. The alloy was electrolessly plated to a thickness of 50 pm, and the Nj-P film 2 was polished and borated to a mirror finish with a surface roughness of 50 nm or less. On top of that, a Co-N1-P metal magnetic medium 3 is placed with a thickness of 80 nm.
It was coated by electroless plating. In addition, in all the examples shown below, an aluminum alloy substrate containing this magnetic medium was used as a base body. In FIG. 1, 4 is a base metal layer and 5 is a protective film.
第２図、第３図及び第４図は磁気ディスクの正面図であ
シ、斜線を施した部分に卑な金属を被覆した。すなわち
、第２図の磁気ディスクでは外径側１２０〜１３９關、
内径側４０〜５５ｊｌ’ｌの領域に卑な金属が被覆され
ておシ、第３図では外径側のみに１第４図では内径側の
みに被覆されている。それぞれの被覆様式を順にパター
ン１，２，３とよぶこととする。なお、この磁気ディス
クの記録再生領域は外径１１５ｍ、内径６０１’ｌであ
る。FIGS. 2, 3, and 4 are front views of magnetic disks, in which the shaded areas are coated with a base metal. That is, in the magnetic disk shown in FIG. 2, the outer diameter side 120 to 139,
The region 40 to 55jl'l on the inner diameter side is coated with a base metal, and in FIG. 3 it is coated only on the outer diameter side, and in FIG. 4 it is coated only on the inner diameter side. The respective covering styles will be referred to as patterns 1, 2, and 3 in order. The recording and reproducing area of this magnetic disk has an outer diameter of 115 m and an inner diameter of 601'l.
次に１本発明の磁気ディスクの作製方法を試料ｌの磁気
ディスクの作製方法に基づいて説明する。Next, a method for manufacturing a magnetic disk of the present invention will be described based on a method for manufacturing a magnetic disk of Sample I.
試料ｌの磁気ディスクは、前記下地体全面にフォトレジ
ストをスピンコードした後に光学露光、現在処理によっ
て卑金属を被覆する部分（試料１の被覆パターン：１）
の７オトレジストを除去する。The magnetic disk of sample 1 is coated with a base metal by spin-coding photoresist on the entire surface of the base, optical exposure, and current processing (coating pattern of sample 1: 1).
7 Remove the photoresist.
その後、ＲＦスパッタ法により純Ｆｅを厚さ５０ｎｍ被
覆し、ついで磁気ディスクを７オトレジスト用溶剤中に
浸せきし、超音波洗浄装置内で洗浄することによって７
オトレジスト上の純Ｆｅを７オトレジストごと磁気ディ
スクから除去する。なお、その他の試料においてもこの
フォトレジスト法によりて磁気ディスクの一部分に卑金
属を被覆した。Thereafter, pure Fe was coated to a thickness of 50 nm by RF sputtering, and then the magnetic disk was immersed in a solvent for 700m resist and washed in an ultrasonic cleaning device.
Pure Fe on the photoresist is removed from the magnetic disk every seven photoresists. In addition, in other samples as well, a portion of the magnetic disk was coated with base metal by this photoresist method.
試料１では部分的に純Ｆｅが被覆された磁気ディスク上
にさらに８ｉ０．を高周波マグネトロンスパッタ法によ
り厚さ５０ｎｍ被覆して磁気ディスクとした。試料１〜
試料１６の作製条件は被覆した卑金属と保護膜の項に分
類して第１表に一括して示した。In sample 1, 8i0. was coated with a thickness of 50 nm by high frequency magnetron sputtering to form a magnetic disk. Sample 1~
The manufacturing conditions for Sample 16 are summarized in Table 1, categorized into coated base metal and protective film.
第１表
成膜方法でＲＦは高周波マグネトロンスパッタ法、ＳＣ
はスピンコード法、蒸着は電子ビーム蒸着法、めっきは
無電解めっきの略である。被１した卑金属は純Ｆｅ 、
Ｚｎ 、 Ｆｅ−５ｗｔ ％ＡＩ 、 Ｏｕ−３ｗｔ
＊Ｚｎ 、Ｏｕ−５ｗｔ＊８ｎ 、Ａｌ−８ｗｔ＊Ｍｇ
である、また、保護膜としては３ｉ０．．８ｉ０．
カーボン及びＡ Ｉ 、 ０゜を被覆した。Table 1 Film formation method: RF is high frequency magnetron sputtering method, SC
stands for spin code method, evaporation stands for electron beam evaporation, and plating stands for electroless plating. The coated base metal is pure Fe,
Zn, Fe-5wt%AI, Ou-3wt
*Zn, Ou-5wt*8n, Al-8wt*Mg
Also, as a protective film, 3i0. ．． 8i0.
Coated with carbon and A I, 0°.
本発明による磁気ディスクと比較するために作製した比
較試料１〜４の詳細を第２表に示す、比較試料は卑金属
を被覆せずに前述した４ｆ！ｉＩ類の保護膜材料を磁性
媒体上に直接被覆したものである。Details of Comparative Samples 1 to 4 prepared for comparison with the magnetic disk according to the present invention are shown in Table 2.The comparative samples are the 4f! A type iI protective film material is directly coated on a magnetic medium.
・第 ２ 表
これら１８種類の本発明の磁気ディスクと４種類の比較
試料を温度８５℃相対湿度９０ｇ６の腐食環境に５００
時間放置し、腐食試験前後のピットエラー数を測定する
ことによって磁気ディスクの耐食性を比較した。第３表
に腐食試験前後のピットエラー数を一括して示す０本発
明による磁気ディスクの耐食性は従来の卑金属を被覆し
ない磁気ディスクのそれに比較して著しく改善されてい
ることがわかる。・Table 2 These 18 types of magnetic disks of the present invention and 4 types of comparative samples were exposed to a corrosive environment at a temperature of 85°C and a relative humidity of 90g6 for 500 minutes.
The corrosion resistance of the magnetic disks was compared by leaving them for some time and measuring the number of pit errors before and after the corrosion test. Table 3 shows the number of pit errors before and after the corrosion test. It can be seen that the corrosion resistance of the magnetic disk according to the present invention is significantly improved compared to that of the conventional magnetic disk not coated with base metal.
また、作製した磁気ディスク上に液体潤滑剤として直鎖
パーフロロアルキルポリエーテルを５ｎｍスピンコード
法により被覆した磁気ディスクについてａＳＳ （コン
タクト・スタート・ストップ）試験を行い、機械的耐久
性を比較した。０８Ｂ試験は、アルチック製スライダー
からなる磁気ヘッドを使用し、磁気ヘッドの押付は荷重
１５ｙ、ヘッド浮上量的０．１５ｐｍの条件下で行った
。卑金属を被覆しない比較試料の機械的耐久性の目安と
なるａＳＳ回数は、比較試料１（８ｉ０．系保護膜）で
１５万回以上、ＳｉＯ系保系膜護膜較試料２で１２万回
以上、カーボン保護膜比較試料３で５万回以上、Ａ１．
ＯＩ系保護膜の比較試料５では８万回以上であった。本
発明の磁気ディスクでは保護膜材料が同一であれば、そ
れらの値と同様のＣ８Ｓ耐久試験回数を示し、磁気ヘッ
ドが走行しない非記録再生領蛾上への卑金属の被覆が磁
気ディスクの機械的耐久性に悪影今を与えないことがわ
かる。In addition, an aSS (contact start/stop) test was conducted on the magnetic disks prepared by coating linear perfluoroalkyl polyether as a liquid lubricant with a thickness of 5 nm using a spin cord method to compare mechanical durability. In the 08B test, a magnetic head made of a slider manufactured by Altiq was used, and the magnetic head was pressed under conditions of a load of 15y and a head flying height of 0.15 pm. The aSS number of times, which is a guideline for the mechanical durability of comparative samples that are not coated with base metals, is 150,000 times or more for comparative sample 1 (8i0.-based protective film) and 120,000 times or more for SiO-based protective film comparative sample 2. , 50,000 times or more for carbon protective film comparison sample 3, A1.
Comparative sample 5, an OI-based protective film, was used more than 80,000 times. If the magnetic disk of the present invention has the same protective film material, it will show the same number of C8S durability tests as those values, and the base metal coating on the non-recording/reproducing area where the magnetic head does not run will improve the mechanical strength of the magnetic disk. It can be seen that it does not have any negative impact on durability.
なお、実施例では無電解めっき法によって作製したＣｏ
−Ｎ１−Ｐ合金を磁性媒体として用いたが、その他には
蒸着法やスパッタ法などの金属磁性媒体を作製する方法
も用いることができる。また。In addition, in the examples, Co
Although the -N1-P alloy was used as the magnetic medium, other methods for producing metal magnetic media such as vapor deposition and sputtering may also be used. Also.
媒体材料に関してもＯｏ −Ｎ ｉ−Ｐ以外に、Ｃｏ−
Ｐ。Regarding media materials, in addition to Oo-N i-P, Co-
P.
Ｃｏ−Ｎｉ 、（ｊｏ−Ｐｔ 、ｃｏ−Ｎｉ −Ｍｎ−
Ｐ、Ｃｏ−Ｎ１−Ｚｎ−Ｐ。Co-Ni, (jo-Pt, co-Ni-Mn-
P, Co-N1-Zn-P.
Ｃｏ −Ｏｒ 、 Ｃｏ−Ｆｅ−Ｔｂ等のＣｏ基材料や
Ｆｅ−Ｔｉ のような各１１ｉｉＦｅ系磁性媒体など
すべての金属磁性薄膜に応用することができる。It can be applied to all metal magnetic thin films such as Co-based materials such as Co-Or and Co-Fe-Tb and 11ii Fe-based magnetic media such as Fe-Ti.
第 ３ 表
（発明の効果）
以上のように、°本発明すなわち磁気ディスクの非記録
再生領域上に金属磁性媒体よりも腐食電位が卑な金属を
被覆することにより磁気ディスクの機械的耐久性を損う
ことなく、その耐食性を著しく改善し、膜厚５０ｎｍ以
下の保護膜でも実用上十分な耐食性を保証することが初
めて可能となった。Table 3 (Effects of the Invention) As described above, the present invention improves the mechanical durability of the magnetic disk by coating the non-recording/reproducing area of the magnetic disk with a metal whose corrosion potential is less noble than that of the metal magnetic medium. For the first time, it has become possible to significantly improve the corrosion resistance without any damage, and to guarantee practically sufficient corrosion resistance even with a protective film having a thickness of 50 nm or less.
−１走、膜厚を低減することにより次世代の高記録密度
磁気ディスクを提供できる。-1 By reducing the film thickness, a next-generation high recording density magnetic disk can be provided.
第１図は本発明の一実施例である磁気ディスクの断面構
造を示す図で、第１図においてｌはアルミニウム合金基
板、２は中間層、３は金属磁性媒体層、４は卑金属層、
５は保護膜である。第２図から第４図は磁気ディスク上
の卑金属の被覆状態を示す図である。
第１図
１、アルミニウム合金基板
２、Ｎ１−Ｐ中間層
３、Ｃｏ−Ｎ１−Ｐ磁性媒体層
４、卑金属層
５、保護膜
第２図
第′３図FIG. 1 is a diagram showing the cross-sectional structure of a magnetic disk according to an embodiment of the present invention. In FIG. 1, l is an aluminum alloy substrate, 2 is an intermediate layer, 3 is a metal magnetic medium layer, 4 is a base metal layer,
5 is a protective film. FIGS. 2 to 4 are diagrams showing the state of base metal coating on the magnetic disk. Fig. 1 1, Aluminum alloy substrate 2, N1-P intermediate layer 3, Co-N1-P magnetic medium layer 4, base metal layer 5, protective film Fig. 2 Fig. '3
Claims (3)
すべてに磁性媒体より卑な金属を被覆することを特徴と
した磁気ディスク。(1) A magnetic disk characterized in that part or all of the non-recording/reproducing area on the metal magnetic medium is coated with a metal less base than the magnetic medium.
一部もしくはすべてに磁性媒体より卑な金属を被覆する
プロセスを有することを特徴とした磁気ディスクの製造
方法。(2) A method for manufacturing a magnetic disk, comprising a process of coating part or all of the non-recording/reproducing area on a metal magnetic medium including the base body with a metal less base than the magnetic medium.
される特許請求の範囲第２項記載の磁気ディスクの製造
方法。(3) The method for manufacturing a magnetic disk according to claim 2, wherein the metal less noble than the magnetic medium is formed by a photoresist method.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15641886A JPS6313123A (en) | 1986-07-02 | 1986-07-02 | Magnetic disk and its production |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15641886A JPS6313123A (en) | 1986-07-02 | 1986-07-02 | Magnetic disk and its production |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6313123A true JPS6313123A (en) | 1988-01-20 |
Family
ID=15627321
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15641886A Pending JPS6313123A (en) | 1986-07-02 | 1986-07-02 | Magnetic disk and its production |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6313123A (en) |
-
1986
- 1986-07-02 JP JP15641886A patent/JPS6313123A/en active Pending
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