JPS63128722U - - Google Patents
Info
- Publication number
- JPS63128722U JPS63128722U JP2085187U JP2085187U JPS63128722U JP S63128722 U JPS63128722 U JP S63128722U JP 2085187 U JP2085187 U JP 2085187U JP 2085187 U JP2085187 U JP 2085187U JP S63128722 U JPS63128722 U JP S63128722U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- jig
- surrounding space
- heat treatment
- reaction gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 5
- 238000010438 heat treatment Methods 0.000 claims description 4
- 239000012495 reaction gas Substances 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 claims 9
- 238000003780 insertion Methods 0.000 claims 1
- 230000037431 insertion Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2085187U JPS63128722U (US06589383-20030708-C00041.png) | 1987-02-17 | 1987-02-17 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2085187U JPS63128722U (US06589383-20030708-C00041.png) | 1987-02-17 | 1987-02-17 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63128722U true JPS63128722U (US06589383-20030708-C00041.png) | 1988-08-23 |
Family
ID=30816745
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2085187U Pending JPS63128722U (US06589383-20030708-C00041.png) | 1987-02-17 | 1987-02-17 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63128722U (US06589383-20030708-C00041.png) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02161745A (ja) * | 1988-12-14 | 1990-06-21 | Nec Corp | 半導体ウェーハ用キャリア |
JPH02177425A (ja) * | 1988-12-28 | 1990-07-10 | Shinetsu Sekiei Kk | ウエーハ熱処理装置 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS607122A (ja) * | 1983-06-01 | 1985-01-14 | アムテック・システムズ・インコーポレーテッド | 炉中での複数の半導体ウェハを処理する方法および装置 |
-
1987
- 1987-02-17 JP JP2085187U patent/JPS63128722U/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS607122A (ja) * | 1983-06-01 | 1985-01-14 | アムテック・システムズ・インコーポレーテッド | 炉中での複数の半導体ウェハを処理する方法および装置 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02161745A (ja) * | 1988-12-14 | 1990-06-21 | Nec Corp | 半導体ウェーハ用キャリア |
JPH02177425A (ja) * | 1988-12-28 | 1990-07-10 | Shinetsu Sekiei Kk | ウエーハ熱処理装置 |