JPS63123038A - Image forming material - Google Patents
Image forming materialInfo
- Publication number
- JPS63123038A JPS63123038A JP26929186A JP26929186A JPS63123038A JP S63123038 A JPS63123038 A JP S63123038A JP 26929186 A JP26929186 A JP 26929186A JP 26929186 A JP26929186 A JP 26929186A JP S63123038 A JPS63123038 A JP S63123038A
- Authority
- JP
- Japan
- Prior art keywords
- image
- resin layer
- photosensitive resin
- formula
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 title claims description 43
- 229920005989 resin Polymers 0.000 claims abstract description 42
- 239000011347 resin Substances 0.000 claims abstract description 42
- 239000003999 initiator Substances 0.000 claims abstract description 11
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 claims abstract description 11
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 claims abstract description 10
- 229910052739 hydrogen Inorganic materials 0.000 claims abstract description 10
- 229920001577 copolymer Polymers 0.000 claims abstract description 8
- 229910052801 chlorine Inorganic materials 0.000 claims abstract description 4
- 150000001875 compounds Chemical class 0.000 claims description 27
- 239000000126 substance Substances 0.000 claims description 23
- 239000001257 hydrogen Substances 0.000 claims description 9
- DTCCVIYSGXONHU-CJHDCQNGSA-N (z)-2-(2-phenylethenyl)but-2-enedioic acid Chemical compound OC(=O)\C=C(C(O)=O)\C=CC1=CC=CC=C1 DTCCVIYSGXONHU-CJHDCQNGSA-N 0.000 claims description 5
- 239000000460 chlorine Substances 0.000 claims description 3
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 claims description 2
- 125000001449 isopropyl group Chemical group [H]C([H])([H])C([H])(*)C([H])([H])[H] 0.000 claims description 2
- 150000002431 hydrogen Chemical class 0.000 claims 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims 1
- 239000003795 chemical substances by application Substances 0.000 claims 1
- 230000000977 initiatory effect Effects 0.000 claims 1
- 239000000758 substrate Substances 0.000 abstract description 21
- 238000005530 etching Methods 0.000 abstract description 19
- 229920000642 polymer Polymers 0.000 abstract description 4
- AAAQKTZKLRYKHR-UHFFFAOYSA-N triphenylmethane Chemical compound C1=CC=CC=C1C(C=1C=CC=CC=1)C1=CC=CC=C1 AAAQKTZKLRYKHR-UHFFFAOYSA-N 0.000 abstract description 2
- 230000008961 swelling Effects 0.000 abstract 1
- -1 copolyamides Polymers 0.000 description 23
- 239000000243 solution Substances 0.000 description 18
- 238000000034 method Methods 0.000 description 17
- 239000000203 mixture Substances 0.000 description 15
- 239000007864 aqueous solution Substances 0.000 description 14
- 230000015572 biosynthetic process Effects 0.000 description 10
- 238000007747 plating Methods 0.000 description 10
- 239000007983 Tris buffer Substances 0.000 description 9
- 239000002585 base Substances 0.000 description 9
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 9
- 239000004020 conductor Substances 0.000 description 8
- QIGBRXMKCJKVMJ-UHFFFAOYSA-N Hydroquinone Chemical compound OC1=CC=C(O)C=C1 QIGBRXMKCJKVMJ-UHFFFAOYSA-N 0.000 description 7
- 150000002148 esters Chemical class 0.000 description 7
- 230000003746 surface roughness Effects 0.000 description 7
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 6
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 6
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 6
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 6
- CDBYLPFSWZWCQE-UHFFFAOYSA-L sodium carbonate Substances [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 5
- YRHRIQCWCFGUEQ-UHFFFAOYSA-N thioxanthen-9-one Chemical class C1=CC=C2C(=O)C3=CC=CC=C3SC2=C1 YRHRIQCWCFGUEQ-UHFFFAOYSA-N 0.000 description 5
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 4
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 4
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 4
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 4
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 4
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 4
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 4
- 239000004743 Polypropylene Substances 0.000 description 4
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 4
- FQPSGWSUVKBHSU-UHFFFAOYSA-N methacrylamide Chemical class CC(=C)C(N)=O FQPSGWSUVKBHSU-UHFFFAOYSA-N 0.000 description 4
- 229910017604 nitric acid Inorganic materials 0.000 description 4
- 150000002978 peroxides Chemical class 0.000 description 4
- 229920000139 polyethylene terephthalate Polymers 0.000 description 4
- 239000005020 polyethylene terephthalate Substances 0.000 description 4
- 229920001155 polypropylene Polymers 0.000 description 4
- 150000003440 styrenes Chemical class 0.000 description 4
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 4
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
- 125000003903 2-propenyl group Chemical group [H]C([*])([H])C([H])=C([H])[H] 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 3
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 description 3
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 150000001252 acrylic acid derivatives Chemical class 0.000 description 3
- 239000000654 additive Substances 0.000 description 3
- 239000003513 alkali Substances 0.000 description 3
- 239000003086 colorant Substances 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 239000003112 inhibitor Substances 0.000 description 3
- 239000000049 pigment Substances 0.000 description 3
- 229920000728 polyester Polymers 0.000 description 3
- 230000001681 protective effect Effects 0.000 description 3
- 150000005846 sugar alcohols Polymers 0.000 description 3
- 238000012719 thermal polymerization Methods 0.000 description 3
- 238000005406 washing Methods 0.000 description 3
- ARXKVVRQIIOZGF-UHFFFAOYSA-N 1,2,4-butanetriol Chemical compound OCCC(O)CO ARXKVVRQIIOZGF-UHFFFAOYSA-N 0.000 description 2
- LCHAFMWSFCONOO-UHFFFAOYSA-N 2,4-dimethylthioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC(C)=CC(C)=C3SC2=C1 LCHAFMWSFCONOO-UHFFFAOYSA-N 0.000 description 2
- NJWGQARXZDRHCD-UHFFFAOYSA-N 2-methylanthraquinone Chemical compound C1=CC=C2C(=O)C3=CC(C)=CC=C3C(=O)C2=C1 NJWGQARXZDRHCD-UHFFFAOYSA-N 0.000 description 2
- JWAZRIHNYRIHIV-UHFFFAOYSA-N 2-naphthol Chemical compound C1=CC=CC2=CC(O)=CC=C21 JWAZRIHNYRIHIV-UHFFFAOYSA-N 0.000 description 2
- RBTBFTRPCNLSDE-UHFFFAOYSA-N 3,7-bis(dimethylamino)phenothiazin-5-ium Chemical compound C1=CC(N(C)C)=CC2=[S+]C3=CC(N(C)C)=CC=C3N=C21 RBTBFTRPCNLSDE-UHFFFAOYSA-N 0.000 description 2
- 239000004709 Chlorinated polyethylene Substances 0.000 description 2
- HEDRZPFGACZZDS-UHFFFAOYSA-N Chloroform Chemical compound ClC(Cl)Cl HEDRZPFGACZZDS-UHFFFAOYSA-N 0.000 description 2
- GUUVPOWQJOLRAS-UHFFFAOYSA-N Diphenyl disulfide Chemical compound C=1C=CC=CC=1SSC1=CC=CC=C1 GUUVPOWQJOLRAS-UHFFFAOYSA-N 0.000 description 2
- CWYNVVGOOAEACU-UHFFFAOYSA-N Fe2+ Chemical compound [Fe+2] CWYNVVGOOAEACU-UHFFFAOYSA-N 0.000 description 2
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 2
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 2
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 2
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 2
- 239000004698 Polyethylene Substances 0.000 description 2
- 239000002202 Polyethylene glycol Substances 0.000 description 2
- JUJWROOIHBZHMG-UHFFFAOYSA-N Pyridine Chemical compound C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 description 2
- ZJCCRDAZUWHFQH-UHFFFAOYSA-N Trimethylolpropane Chemical compound CCC(CO)(CO)CO ZJCCRDAZUWHFQH-UHFFFAOYSA-N 0.000 description 2
- QYKIQEUNHZKYBP-UHFFFAOYSA-N Vinyl ether Chemical class C=COC=C QYKIQEUNHZKYBP-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 2
- ISAOCJYIOMOJEB-UHFFFAOYSA-N benzoin Chemical compound C=1C=CC=CC=1C(O)C(=O)C1=CC=CC=C1 ISAOCJYIOMOJEB-UHFFFAOYSA-N 0.000 description 2
- WERYXYBDKMZEQL-UHFFFAOYSA-N butane-1,4-diol Chemical compound OCCCCO WERYXYBDKMZEQL-UHFFFAOYSA-N 0.000 description 2
- 150000001728 carbonyl compounds Chemical class 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000003153 chemical reaction reagent Substances 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- LDHQCZJRKDOVOX-NSCUHMNNSA-N crotonic acid Chemical class C\C=C\C(O)=O LDHQCZJRKDOVOX-NSCUHMNNSA-N 0.000 description 2
- 150000008049 diazo compounds Chemical class 0.000 description 2
- GVPWHKZIJBODOX-UHFFFAOYSA-N dibenzyl disulfide Chemical compound C=1C=CC=CC=1CSSCC1=CC=CC=C1 GVPWHKZIJBODOX-UHFFFAOYSA-N 0.000 description 2
- 239000000975 dye Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910001448 ferrous ion Inorganic materials 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 150000002366 halogen compounds Chemical class 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 229910052744 lithium Inorganic materials 0.000 description 2
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 2
- 229910052753 mercury Inorganic materials 0.000 description 2
- 125000005395 methacrylic acid group Chemical group 0.000 description 2
- 229960000907 methylthioninium chloride Drugs 0.000 description 2
- LQNUZADURLCDLV-UHFFFAOYSA-N nitrobenzene Chemical compound [O-][N+](=O)C1=CC=CC=C1 LQNUZADURLCDLV-UHFFFAOYSA-N 0.000 description 2
- 239000003960 organic solvent Substances 0.000 description 2
- 150000002898 organic sulfur compounds Chemical class 0.000 description 2
- NWVVVBRKAWDGAB-UHFFFAOYSA-N p-methoxyphenol Chemical compound COC1=CC=C(O)C=C1 NWVVVBRKAWDGAB-UHFFFAOYSA-N 0.000 description 2
- 239000002985 plastic film Substances 0.000 description 2
- 229920006255 plastic film Polymers 0.000 description 2
- 229920001084 poly(chloroprene) Polymers 0.000 description 2
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 2
- 229920000573 polyethylene Polymers 0.000 description 2
- 229920001223 polyethylene glycol Polymers 0.000 description 2
- 239000004926 polymethyl methacrylate Substances 0.000 description 2
- 229920000098 polyolefin Polymers 0.000 description 2
- BWHMMNNQKKPAPP-UHFFFAOYSA-L potassium carbonate Substances [K+].[K+].[O-]C([O-])=O BWHMMNNQKKPAPP-UHFFFAOYSA-L 0.000 description 2
- WQGWDDDVZFFDIG-UHFFFAOYSA-N pyrogallol Chemical class OC1=CC=CC(O)=C1O WQGWDDDVZFFDIG-UHFFFAOYSA-N 0.000 description 2
- 229910052708 sodium Inorganic materials 0.000 description 2
- 229910000029 sodium carbonate Inorganic materials 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 150000003918 triazines Chemical class 0.000 description 2
- LWIHDJKSTIGBAC-UHFFFAOYSA-K tripotassium phosphate Chemical compound [K+].[K+].[K+].[O-]P([O-])([O-])=O LWIHDJKSTIGBAC-UHFFFAOYSA-K 0.000 description 2
- ROVRRJSRRSGUOL-UHFFFAOYSA-N victoria blue bo Chemical compound [Cl-].C12=CC=CC=C2C(NCC)=CC=C1C(C=1C=CC(=CC=1)N(CC)CC)=C1C=CC(=[N+](CC)CC)C=C1 ROVRRJSRRSGUOL-UHFFFAOYSA-N 0.000 description 2
- 229920001567 vinyl ester resin Polymers 0.000 description 2
- JNYAEWCLZODPBN-JGWLITMVSA-N (2r,3r,4s)-2-[(1r)-1,2-dihydroxyethyl]oxolane-3,4-diol Chemical compound OC[C@@H](O)[C@H]1OC[C@H](O)[C@H]1O JNYAEWCLZODPBN-JGWLITMVSA-N 0.000 description 1
- GJZFGDYLJLCGHT-UHFFFAOYSA-N 1,2-diethylthioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=C(CC)C(CC)=CC=C3SC2=C1 GJZFGDYLJLCGHT-UHFFFAOYSA-N 0.000 description 1
- MSAHTMIQULFMRG-UHFFFAOYSA-N 1,2-diphenyl-2-propan-2-yloxyethanone Chemical compound C=1C=CC=CC=1C(OC(C)C)C(=O)C1=CC=CC=C1 MSAHTMIQULFMRG-UHFFFAOYSA-N 0.000 description 1
- WDCYWAQPCXBPJA-UHFFFAOYSA-N 1,3-dinitrobenzene Chemical compound [O-][N+](=O)C1=CC=CC([N+]([O-])=O)=C1 WDCYWAQPCXBPJA-UHFFFAOYSA-N 0.000 description 1
- 150000005208 1,4-dihydroxybenzenes Chemical class 0.000 description 1
- AROCLDYPZXMJPW-UHFFFAOYSA-N 1-(octyldisulfanyl)octane Chemical compound CCCCCCCCSSCCCCCCCC AROCLDYPZXMJPW-UHFFFAOYSA-N 0.000 description 1
- WNBXQARBPBWRFD-UHFFFAOYSA-N 1-chloro-2-(chloromethyl)naphthalene Chemical compound C1=CC=CC2=C(Cl)C(CCl)=CC=C21 WNBXQARBPBWRFD-UHFFFAOYSA-N 0.000 description 1
- NSOAQRMLVFRWIT-UHFFFAOYSA-N 1-ethenoxydecane Chemical compound CCCCCCCCCCOC=C NSOAQRMLVFRWIT-UHFFFAOYSA-N 0.000 description 1
- YAOJJEJGPZRYJF-UHFFFAOYSA-N 1-ethenoxyhexane Chemical compound CCCCCCOC=C YAOJJEJGPZRYJF-UHFFFAOYSA-N 0.000 description 1
- XXCVIFJHBFNFBO-UHFFFAOYSA-N 1-ethenoxyoctane Chemical compound CCCCCCCCOC=C XXCVIFJHBFNFBO-UHFFFAOYSA-N 0.000 description 1
- RUFPHBVGCFYCNW-UHFFFAOYSA-N 1-naphthylamine Chemical compound C1=CC=C2C(N)=CC=CC2=C1 RUFPHBVGCFYCNW-UHFFFAOYSA-N 0.000 description 1
- WJFKNYWRSNBZNX-UHFFFAOYSA-N 10H-phenothiazine Chemical class C1=CC=C2NC3=CC=CC=C3SC2=C1 WJFKNYWRSNBZNX-UHFFFAOYSA-N 0.000 description 1
- OZAIFHULBGXAKX-UHFFFAOYSA-N 2,2'-azo-bis-isobutyronitrile Substances N#CC(C)(C)N=NC(C)(C)C#N OZAIFHULBGXAKX-UHFFFAOYSA-N 0.000 description 1
- BTJPUDCSZVCXFQ-UHFFFAOYSA-N 2,4-diethylthioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC(CC)=CC(CC)=C3SC2=C1 BTJPUDCSZVCXFQ-UHFFFAOYSA-N 0.000 description 1
- GOXQRTZXKQZDDN-UHFFFAOYSA-N 2-Ethylhexyl acrylate Chemical compound CCCCC(CC)COC(=O)C=C GOXQRTZXKQZDDN-UHFFFAOYSA-N 0.000 description 1
- XNWFRZJHXBZDAG-UHFFFAOYSA-N 2-METHOXYETHANOL Chemical compound COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 description 1
- RCSBILYQLVXLJG-UHFFFAOYSA-N 2-Propenyl hexanoate Chemical compound CCCCCC(=O)OCC=C RCSBILYQLVXLJG-UHFFFAOYSA-N 0.000 description 1
- PZGMUSDNQDCNAG-UHFFFAOYSA-N 2-Propenyl octanoate Chemical compound CCCCCCCC(=O)OCC=C PZGMUSDNQDCNAG-UHFFFAOYSA-N 0.000 description 1
- TXBCBTDQIULDIA-UHFFFAOYSA-N 2-[[3-hydroxy-2,2-bis(hydroxymethyl)propoxy]methyl]-2-(hydroxymethyl)propane-1,3-diol Chemical compound OCC(CO)(CO)COCC(CO)(CO)CO TXBCBTDQIULDIA-UHFFFAOYSA-N 0.000 description 1
- DZZAHLOABNWIFA-UHFFFAOYSA-N 2-butoxy-1,2-diphenylethanone Chemical compound C=1C=CC=CC=1C(OCCCC)C(=O)C1=CC=CC=C1 DZZAHLOABNWIFA-UHFFFAOYSA-N 0.000 description 1
- POAOYUHQDCAZBD-UHFFFAOYSA-N 2-butoxyethanol Chemical compound CCCCOCCO POAOYUHQDCAZBD-UHFFFAOYSA-N 0.000 description 1
- DSKYSDCYIODJPC-UHFFFAOYSA-N 2-butyl-2-ethylpropane-1,3-diol Chemical compound CCCCC(CC)(CO)CO DSKYSDCYIODJPC-UHFFFAOYSA-N 0.000 description 1
- ZCDADJXRUCOCJE-UHFFFAOYSA-N 2-chlorothioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC(Cl)=CC=C3SC2=C1 ZCDADJXRUCOCJE-UHFFFAOYSA-N 0.000 description 1
- ZNQVEEAIQZEUHB-UHFFFAOYSA-N 2-ethoxyethanol Chemical compound CCOCCO ZNQVEEAIQZEUHB-UHFFFAOYSA-N 0.000 description 1
- WFUGQJXVXHBTEM-UHFFFAOYSA-N 2-hydroperoxy-2-(2-hydroperoxybutan-2-ylperoxy)butane Chemical compound CCC(C)(OO)OOC(C)(CC)OO WFUGQJXVXHBTEM-UHFFFAOYSA-N 0.000 description 1
- BQZJOQXSCSZQPS-UHFFFAOYSA-N 2-methoxy-1,2-diphenylethanone Chemical compound C=1C=CC=CC=1C(OC)C(=O)C1=CC=CC=C1 BQZJOQXSCSZQPS-UHFFFAOYSA-N 0.000 description 1
- YQIGLEFUZMIVHU-UHFFFAOYSA-N 2-methyl-n-propan-2-ylprop-2-enamide Chemical compound CC(C)NC(=O)C(C)=C YQIGLEFUZMIVHU-UHFFFAOYSA-N 0.000 description 1
- KTALPKYXQZGAEG-UHFFFAOYSA-N 2-propan-2-ylthioxanthen-9-one Chemical group C1=CC=C2C(=O)C3=CC(C(C)C)=CC=C3SC2=C1 KTALPKYXQZGAEG-UHFFFAOYSA-N 0.000 description 1
- YTPSFXZMJKMUJE-UHFFFAOYSA-N 2-tert-butylanthracene-9,10-dione Chemical compound C1=CC=C2C(=O)C3=CC(C(C)(C)C)=CC=C3C(=O)C2=C1 YTPSFXZMJKMUJE-UHFFFAOYSA-N 0.000 description 1
- HZGJTATYGAJRAL-UHFFFAOYSA-N 3,4,4a,5,6,7,8,8a-octahydro-2h-naphthalene-1,1-diol Chemical compound C1CCCC2C(O)(O)CCCC21 HZGJTATYGAJRAL-UHFFFAOYSA-N 0.000 description 1
- BJOWTLCTYPKRRU-UHFFFAOYSA-N 3-ethenoxyoctane Chemical compound CCCCCC(CC)OC=C BJOWTLCTYPKRRU-UHFFFAOYSA-N 0.000 description 1
- JIGUICYYOYEXFS-UHFFFAOYSA-N 3-tert-butylbenzene-1,2-diol Chemical class CC(C)(C)C1=CC=CC(O)=C1O JIGUICYYOYEXFS-UHFFFAOYSA-N 0.000 description 1
- CVTJQHIPOJCVSQ-UHFFFAOYSA-N 4-(2-aminoethyl)-n,n-diethylaniline Chemical compound CCN(CC)C1=CC=C(CCN)C=C1 CVTJQHIPOJCVSQ-UHFFFAOYSA-N 0.000 description 1
- JLBJTVDPSNHSKJ-UHFFFAOYSA-N 4-Methylstyrene Chemical compound CC1=CC=C(C=C)C=C1 JLBJTVDPSNHSKJ-UHFFFAOYSA-N 0.000 description 1
- QTBSBXVTEAMEQO-UHFFFAOYSA-M Acetate Chemical compound CC([O-])=O QTBSBXVTEAMEQO-UHFFFAOYSA-M 0.000 description 1
- HRPVXLWXLXDGHG-UHFFFAOYSA-N Acrylamide Chemical compound NC(=O)C=C HRPVXLWXLXDGHG-UHFFFAOYSA-N 0.000 description 1
- 239000004342 Benzoyl peroxide Substances 0.000 description 1
- OMPJBNCRMGITSC-UHFFFAOYSA-N Benzoylperoxide Chemical compound C=1C=CC=CC=1C(=O)OOC(=O)C1=CC=CC=C1 OMPJBNCRMGITSC-UHFFFAOYSA-N 0.000 description 1
- BVKZGUZCCUSVTD-UHFFFAOYSA-M Bicarbonate Chemical class OC([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-M 0.000 description 1
- 229930185605 Bisphenol Natural products 0.000 description 1
- DKPFZGUDAPQIHT-UHFFFAOYSA-N Butyl acetate Natural products CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 description 1
- NLZUEZXRPGMBCV-UHFFFAOYSA-N Butylhydroxytoluene Chemical compound CC1=CC(C(C)(C)C)=C(O)C(C(C)(C)C)=C1 NLZUEZXRPGMBCV-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 1
- 229910021591 Copper(I) chloride Inorganic materials 0.000 description 1
- FBPFZTCFMRRESA-FSIIMWSLSA-N D-Glucitol Natural products OC[C@H](O)[C@H](O)[C@@H](O)[C@H](O)CO FBPFZTCFMRRESA-FSIIMWSLSA-N 0.000 description 1
- FBPFZTCFMRRESA-JGWLITMVSA-N D-glucitol Chemical compound OC[C@H](O)[C@@H](O)[C@H](O)[C@H](O)CO FBPFZTCFMRRESA-JGWLITMVSA-N 0.000 description 1
- QSJXEFYPDANLFS-UHFFFAOYSA-N Diacetyl Chemical group CC(=O)C(C)=O QSJXEFYPDANLFS-UHFFFAOYSA-N 0.000 description 1
- CUDSBWGCGSUXDB-UHFFFAOYSA-N Dibutyl disulfide Chemical compound CCCCSSCCCC CUDSBWGCGSUXDB-UHFFFAOYSA-N 0.000 description 1
- ZFDIRQKJPRINOQ-HWKANZROSA-N Ethyl crotonate Chemical compound CCOC(=O)\C=C\C ZFDIRQKJPRINOQ-HWKANZROSA-N 0.000 description 1
- IAYPIBMASNFSPL-UHFFFAOYSA-N Ethylene oxide Chemical compound C1CO1 IAYPIBMASNFSPL-UHFFFAOYSA-N 0.000 description 1
- VTLYFUHAOXGGBS-UHFFFAOYSA-N Fe3+ Chemical compound [Fe+3] VTLYFUHAOXGGBS-UHFFFAOYSA-N 0.000 description 1
- MZNHUHNWGVUEAT-XBXARRHUSA-N Hexyl crotonate Chemical compound CCCCCCOC(=O)\C=C\C MZNHUHNWGVUEAT-XBXARRHUSA-N 0.000 description 1
- NTIZESTWPVYFNL-UHFFFAOYSA-N Methyl isobutyl ketone Chemical compound CC(C)CC(C)=O NTIZESTWPVYFNL-UHFFFAOYSA-N 0.000 description 1
- UIHCLUNTQKBZGK-UHFFFAOYSA-N Methyl isobutyl ketone Natural products CCC(C)C(C)=O UIHCLUNTQKBZGK-UHFFFAOYSA-N 0.000 description 1
- VVQNEPGJFQJSBK-UHFFFAOYSA-N Methyl methacrylate Chemical group COC(=O)C(C)=C VVQNEPGJFQJSBK-UHFFFAOYSA-N 0.000 description 1
- MKYBYDHXWVHEJW-UHFFFAOYSA-N N-[1-oxo-1-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)propan-2-yl]-2-[[3-(trifluoromethoxy)phenyl]methylamino]pyrimidine-5-carboxamide Chemical compound O=C(C(C)NC(=O)C=1C=NC(=NC=1)NCC1=CC(=CC=C1)OC(F)(F)F)N1CC2=C(CC1)NN=N2 MKYBYDHXWVHEJW-UHFFFAOYSA-N 0.000 description 1
- OFSAUHSCHWRZKM-UHFFFAOYSA-N Padimate A Chemical compound CC(C)CCOC(=O)C1=CC=C(N(C)C)C=C1 OFSAUHSCHWRZKM-UHFFFAOYSA-N 0.000 description 1
- 229920002319 Poly(methyl acrylate) Polymers 0.000 description 1
- 239000004372 Polyvinyl alcohol Substances 0.000 description 1
- 229920001328 Polyvinylidene chloride Polymers 0.000 description 1
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 1
- OFOBLEOULBTSOW-UHFFFAOYSA-N Propanedioic acid Natural products OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 description 1
- GOOHAUXETOMSMM-UHFFFAOYSA-N Propylene oxide Chemical compound CC1CO1 GOOHAUXETOMSMM-UHFFFAOYSA-N 0.000 description 1
- 244000028419 Styrax benzoin Species 0.000 description 1
- 235000000126 Styrax benzoin Nutrition 0.000 description 1
- 235000008411 Sumatra benzointree Nutrition 0.000 description 1
- GSEJCLTVZPLZKY-UHFFFAOYSA-N Triethanolamine Chemical compound OCCN(CCO)CCO GSEJCLTVZPLZKY-UHFFFAOYSA-N 0.000 description 1
- AZWHFTKIBIQKCA-UHFFFAOYSA-N [Sn+2]=O.[O-2].[In+3] Chemical compound [Sn+2]=O.[O-2].[In+3] AZWHFTKIBIQKCA-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 150000003926 acrylamides Chemical class 0.000 description 1
- 238000007259 addition reaction Methods 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 239000002318 adhesion promoter Substances 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229910001854 alkali hydroxide Inorganic materials 0.000 description 1
- 229910052783 alkali metal Inorganic materials 0.000 description 1
- 150000008044 alkali metal hydroxides Chemical class 0.000 description 1
- 229910000318 alkali metal phosphate Inorganic materials 0.000 description 1
- 150000001340 alkali metals Chemical class 0.000 description 1
- 125000005250 alkyl acrylate group Chemical group 0.000 description 1
- PYKYMHQGRFAEBM-UHFFFAOYSA-N anthraquinone Natural products CCC(=O)c1c(O)c2C(=O)C3C(C=CC=C3O)C(=O)c2cc1CC(=O)OC PYKYMHQGRFAEBM-UHFFFAOYSA-N 0.000 description 1
- 239000001000 anthraquinone dye Substances 0.000 description 1
- 150000004056 anthraquinones Chemical class 0.000 description 1
- 239000002518 antifoaming agent Substances 0.000 description 1
- JPIYZTWMUGTEHX-UHFFFAOYSA-N auramine O free base Chemical compound C1=CC(N(C)C)=CC=C1C(=N)C1=CC=C(N(C)C)C=C1 JPIYZTWMUGTEHX-UHFFFAOYSA-N 0.000 description 1
- 239000000987 azo dye Substances 0.000 description 1
- 125000000751 azo group Chemical group [*]N=N[*] 0.000 description 1
- MWZGUEWUOKSFNL-UHFFFAOYSA-N benzoic acid;styrene Chemical compound C=CC1=CC=CC=C1.OC(=O)C1=CC=CC=C1 MWZGUEWUOKSFNL-UHFFFAOYSA-N 0.000 description 1
- 229960002130 benzoin Drugs 0.000 description 1
- RWCCWEUUXYIKHB-UHFFFAOYSA-N benzophenone Chemical compound C=1C=CC=CC=1C(=O)C1=CC=CC=C1 RWCCWEUUXYIKHB-UHFFFAOYSA-N 0.000 description 1
- 239000012965 benzophenone Substances 0.000 description 1
- 235000019400 benzoyl peroxide Nutrition 0.000 description 1
- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 description 1
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 1
- 230000001680 brushing effect Effects 0.000 description 1
- CQEYYJKEWSMYFG-UHFFFAOYSA-N butyl acrylate Chemical compound CCCCOC(=O)C=C CQEYYJKEWSMYFG-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 125000004432 carbon atom Chemical group C* 0.000 description 1
- 239000006229 carbon black Substances 0.000 description 1
- 150000004649 carbonic acid derivatives Chemical class 0.000 description 1
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 1
- 239000003638 chemical reducing agent Substances 0.000 description 1
- 125000001309 chloro group Chemical group Cl* 0.000 description 1
- BULLHNJGPPOUOX-UHFFFAOYSA-N chloroacetone Chemical compound CC(=O)CCl BULLHNJGPPOUOX-UHFFFAOYSA-N 0.000 description 1
- 210000001520 comb Anatomy 0.000 description 1
- 238000007334 copolymerization reaction Methods 0.000 description 1
- 150000001879 copper Chemical class 0.000 description 1
- OXBLHERUFWYNTN-UHFFFAOYSA-M copper(I) chloride Chemical class [Cu]Cl OXBLHERUFWYNTN-UHFFFAOYSA-M 0.000 description 1
- OPQARKPSCNTWTJ-UHFFFAOYSA-L copper(ii) acetate Chemical compound [Cu+2].CC([O-])=O.CC([O-])=O OPQARKPSCNTWTJ-UHFFFAOYSA-L 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 229940045803 cuprous chloride Drugs 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- LSXWFXONGKSEMY-UHFFFAOYSA-N di-tert-butyl peroxide Chemical compound CC(C)(C)OOC(C)(C)C LSXWFXONGKSEMY-UHFFFAOYSA-N 0.000 description 1
- 239000012954 diazonium Substances 0.000 description 1
- 150000001989 diazonium salts Chemical class 0.000 description 1
- XSBSXJAYEPDGSF-UHFFFAOYSA-N diethyl 3,5-dimethyl-1h-pyrrole-2,4-dicarboxylate Chemical compound CCOC(=O)C=1NC(C)=C(C(=O)OCC)C=1C XSBSXJAYEPDGSF-UHFFFAOYSA-N 0.000 description 1
- 125000004177 diethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 1
- 229940105990 diglycerin Drugs 0.000 description 1
- GPLRAVKSCUXZTP-UHFFFAOYSA-N diglycerol Chemical compound OCC(O)COCC(O)CO GPLRAVKSCUXZTP-UHFFFAOYSA-N 0.000 description 1
- 235000011180 diphosphates Nutrition 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- YCUBDDIKWLELPD-UHFFFAOYSA-N ethenyl 2,2-dimethylpropanoate Chemical compound CC(C)(C)C(=O)OC=C YCUBDDIKWLELPD-UHFFFAOYSA-N 0.000 description 1
- WNMORWGTPVWAIB-UHFFFAOYSA-N ethenyl 2-methylpropanoate Chemical compound CC(C)C(=O)OC=C WNMORWGTPVWAIB-UHFFFAOYSA-N 0.000 description 1
- MEGHWIAOTJPCHQ-UHFFFAOYSA-N ethenyl butanoate Chemical compound CCCC(=O)OC=C MEGHWIAOTJPCHQ-UHFFFAOYSA-N 0.000 description 1
- LZWYWAIOTBEZFN-UHFFFAOYSA-N ethenyl hexanoate Chemical compound CCCCCC(=O)OC=C LZWYWAIOTBEZFN-UHFFFAOYSA-N 0.000 description 1
- BLZSRIYYOIZLJL-UHFFFAOYSA-N ethenyl pentanoate Chemical compound CCCCC(=O)OC=C BLZSRIYYOIZLJL-UHFFFAOYSA-N 0.000 description 1
- SUPCQIBBMFXVTL-UHFFFAOYSA-N ethyl 2-methylprop-2-enoate Chemical compound CCOC(=O)C(C)=C SUPCQIBBMFXVTL-UHFFFAOYSA-N 0.000 description 1
- 125000000816 ethylene group Polymers [H]C([H])([*:1])C([H])([H])[*:2] 0.000 description 1
- 229910001447 ferric ion Inorganic materials 0.000 description 1
- 230000002070 germicidal effect Effects 0.000 description 1
- 235000011187 glycerol Nutrition 0.000 description 1
- 235000019382 gum benzoic Nutrition 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- FUZZWVXGSFPDMH-UHFFFAOYSA-M hexanoate Chemical compound CCCCCC([O-])=O FUZZWVXGSFPDMH-UHFFFAOYSA-M 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 description 1
- 150000004679 hydroxides Chemical class 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- VZCYOOQTPOCHFL-UPHRSURJSA-N maleic acid Chemical compound OC(=O)\C=C/C(O)=O VZCYOOQTPOCHFL-UPHRSURJSA-N 0.000 description 1
- 239000011976 maleic acid Substances 0.000 description 1
- FPYJFEHAWHCUMM-UHFFFAOYSA-N maleic anhydride Chemical compound O=C1OC(=O)C=C1 FPYJFEHAWHCUMM-UHFFFAOYSA-N 0.000 description 1
- 150000002734 metacrylic acid derivatives Chemical class 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- MCVVUJPXSBQTRZ-ONEGZZNKSA-N methyl (e)-but-2-enoate Chemical compound COC(=O)\C=C\C MCVVUJPXSBQTRZ-ONEGZZNKSA-N 0.000 description 1
- 239000012046 mixed solvent Substances 0.000 description 1
- 239000006082 mold release agent Substances 0.000 description 1
- WFKDPJRCBCBQNT-UHFFFAOYSA-N n,2-dimethylprop-2-enamide Chemical compound CNC(=O)C(C)=C WFKDPJRCBCBQNT-UHFFFAOYSA-N 0.000 description 1
- VQGWOOIHSXNRPW-UHFFFAOYSA-N n-butyl-2-methylprop-2-enamide Chemical compound CCCCNC(=O)C(C)=C VQGWOOIHSXNRPW-UHFFFAOYSA-N 0.000 description 1
- YRVUCYWJQFRCOB-UHFFFAOYSA-N n-butylprop-2-enamide Chemical compound CCCCNC(=O)C=C YRVUCYWJQFRCOB-UHFFFAOYSA-N 0.000 description 1
- JKZQBSUPPNQHTK-UHFFFAOYSA-N n-ethyl-2-methylideneoctanamide Chemical compound CCCCCCC(=C)C(=O)NCC JKZQBSUPPNQHTK-UHFFFAOYSA-N 0.000 description 1
- ZIWDVJPPVMGJGR-UHFFFAOYSA-N n-ethyl-2-methylprop-2-enamide Chemical compound CCNC(=O)C(C)=C ZIWDVJPPVMGJGR-UHFFFAOYSA-N 0.000 description 1
- SWPMNMYLORDLJE-UHFFFAOYSA-N n-ethylprop-2-enamide Chemical compound CCNC(=O)C=C SWPMNMYLORDLJE-UHFFFAOYSA-N 0.000 description 1
- YPHQUSNPXDGUHL-UHFFFAOYSA-N n-methylprop-2-enamide Chemical compound CNC(=O)C=C YPHQUSNPXDGUHL-UHFFFAOYSA-N 0.000 description 1
- QNILTEGFHQSKFF-UHFFFAOYSA-N n-propan-2-ylprop-2-enamide Chemical compound CC(C)NC(=O)C=C QNILTEGFHQSKFF-UHFFFAOYSA-N 0.000 description 1
- OPECTNGATDYLSS-UHFFFAOYSA-N naphthalene-2-sulfonyl chloride Chemical compound C1=CC=CC2=CC(S(=O)(=O)Cl)=CC=C21 OPECTNGATDYLSS-UHFFFAOYSA-N 0.000 description 1
- SLCVBVWXLSEKPL-UHFFFAOYSA-N neopentyl glycol Chemical compound OCC(C)(C)CO SLCVBVWXLSEKPL-UHFFFAOYSA-N 0.000 description 1
- 229940065472 octyl acrylate Drugs 0.000 description 1
- ANISOHQJBAQUQP-UHFFFAOYSA-N octyl prop-2-enoate Chemical compound CCCCCCCCOC(=O)C=C ANISOHQJBAQUQP-UHFFFAOYSA-N 0.000 description 1
- ATGUVEKSASEFFO-UHFFFAOYSA-N p-aminodiphenylamine Chemical class C1=CC(N)=CC=C1NC1=CC=CC=C1 ATGUVEKSASEFFO-UHFFFAOYSA-N 0.000 description 1
- FZUGPQWGEGAKET-UHFFFAOYSA-N parbenate Chemical compound CCOC(=O)C1=CC=C(N(C)C)C=C1 FZUGPQWGEGAKET-UHFFFAOYSA-N 0.000 description 1
- HVAMZGADVCBITI-UHFFFAOYSA-M pent-4-enoate Chemical compound [O-]C(=O)CCC=C HVAMZGADVCBITI-UHFFFAOYSA-M 0.000 description 1
- WXZMFSXDPGVJKK-UHFFFAOYSA-N pentaerythritol Chemical compound OCC(CO)(CO)CO WXZMFSXDPGVJKK-UHFFFAOYSA-N 0.000 description 1
- ULDDEWDFUNBUCM-UHFFFAOYSA-N pentyl prop-2-enoate Chemical compound CCCCCOC(=O)C=C ULDDEWDFUNBUCM-UHFFFAOYSA-N 0.000 description 1
- IMACFCSSMIZSPP-UHFFFAOYSA-N phenacyl chloride Chemical compound ClCC(=O)C1=CC=CC=C1 IMACFCSSMIZSPP-UHFFFAOYSA-N 0.000 description 1
- 229950000688 phenothiazine Drugs 0.000 description 1
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 1
- IEQIEDJGQAUEQZ-UHFFFAOYSA-N phthalocyanine Chemical compound N1C(N=C2C3=CC=CC=C3C(N=C3C4=CC=CC=C4C(=N4)N3)=N2)=C(C=CC=C2)C2=C1N=C1C2=CC=CC=C2C4=N1 IEQIEDJGQAUEQZ-UHFFFAOYSA-N 0.000 description 1
- 239000004014 plasticizer Substances 0.000 description 1
- 229920002037 poly(vinyl butyral) polymer Polymers 0.000 description 1
- 229920001748 polybutylene Polymers 0.000 description 1
- 229920001195 polyisoprene Polymers 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 229920000193 polymethacrylate Polymers 0.000 description 1
- 150000007519 polyprotic acids Polymers 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 229920002689 polyvinyl acetate Polymers 0.000 description 1
- 239000011118 polyvinyl acetate Substances 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- 229920000915 polyvinyl chloride Polymers 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- 239000005033 polyvinylidene chloride Substances 0.000 description 1
- 229910052700 potassium Inorganic materials 0.000 description 1
- 239000011591 potassium Substances 0.000 description 1
- 235000011181 potassium carbonates Nutrition 0.000 description 1
- 229910000160 potassium phosphate Inorganic materials 0.000 description 1
- 235000011009 potassium phosphates Nutrition 0.000 description 1
- ZQMAPKVSTSACQB-UHFFFAOYSA-N prop-2-enyl dodecanoate Chemical compound CCCCCCCCCCCC(=O)OCC=C ZQMAPKVSTSACQB-UHFFFAOYSA-N 0.000 description 1
- HAFZJTKIBGEQKT-UHFFFAOYSA-N prop-2-enyl hexadecanoate Chemical compound CCCCCCCCCCCCCCCC(=O)OCC=C HAFZJTKIBGEQKT-UHFFFAOYSA-N 0.000 description 1
- AABBHSMFGKYLKE-SNAWJCMRSA-N propan-2-yl (e)-but-2-enoate Chemical compound C\C=C\C(=O)OC(C)C AABBHSMFGKYLKE-SNAWJCMRSA-N 0.000 description 1
- BOQSSGDQNWEFSX-UHFFFAOYSA-N propan-2-yl 2-methylprop-2-enoate Chemical compound CC(C)OC(=O)C(C)=C BOQSSGDQNWEFSX-UHFFFAOYSA-N 0.000 description 1
- ULWHHBHJGPPBCO-UHFFFAOYSA-N propane-1,1-diol Chemical compound CCC(O)O ULWHHBHJGPPBCO-UHFFFAOYSA-N 0.000 description 1
- NHARPDSAXCBDDR-UHFFFAOYSA-N propyl 2-methylprop-2-enoate Chemical compound CCCOC(=O)C(C)=C NHARPDSAXCBDDR-UHFFFAOYSA-N 0.000 description 1
- PNXMTCDJUBJHQJ-UHFFFAOYSA-N propyl prop-2-enoate Chemical compound CCCOC(=O)C=C PNXMTCDJUBJHQJ-UHFFFAOYSA-N 0.000 description 1
- 125000004805 propylene group Polymers [H]C([H])([H])C([H])([*:1])C([H])([H])[*:2] 0.000 description 1
- UMJSCPRVCHMLSP-UHFFFAOYSA-N pyridine Natural products COC1=CC=CN=C1 UMJSCPRVCHMLSP-UHFFFAOYSA-N 0.000 description 1
- 229940079877 pyrogallol Drugs 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- PYWVYCXTNDRMGF-UHFFFAOYSA-N rhodamine B Chemical compound [Cl-].C=12C=CC(=[N+](CC)CC)C=C2OC2=CC(N(CC)CC)=CC=C2C=1C1=CC=CC=C1C(O)=O PYWVYCXTNDRMGF-UHFFFAOYSA-N 0.000 description 1
- 239000005060 rubber Substances 0.000 description 1
- KTOYYOQOGAZUHV-UHFFFAOYSA-N s-acetylsulfanyl ethanethioate Chemical compound CC(=O)SSC(C)=O KTOYYOQOGAZUHV-UHFFFAOYSA-N 0.000 description 1
- YYWLHHUMIIIZDH-UHFFFAOYSA-N s-benzoylsulfanyl benzenecarbothioate Chemical compound C=1C=CC=CC=1C(=O)SSC(=O)C1=CC=CC=C1 YYWLHHUMIIIZDH-UHFFFAOYSA-N 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 238000007790 scraping Methods 0.000 description 1
- 229920002050 silicone resin Polymers 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- 235000011182 sodium carbonates Nutrition 0.000 description 1
- FQENQNTWSFEDLI-UHFFFAOYSA-J sodium diphosphate Chemical compound [Na+].[Na+].[Na+].[Na+].[O-]P([O-])(=O)OP([O-])([O-])=O FQENQNTWSFEDLI-UHFFFAOYSA-J 0.000 description 1
- 239000001488 sodium phosphate Substances 0.000 description 1
- 229910000162 sodium phosphate Inorganic materials 0.000 description 1
- 229940048086 sodium pyrophosphate Drugs 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000600 sorbitol Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 229920003048 styrene butadiene rubber Polymers 0.000 description 1
- 125000001424 substituent group Chemical group 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- RYCLIXPGLDDLTM-UHFFFAOYSA-J tetrapotassium;phosphonato phosphate Chemical compound [K+].[K+].[K+].[K+].[O-]P([O-])(=O)OP([O-])([O-])=O RYCLIXPGLDDLTM-UHFFFAOYSA-J 0.000 description 1
- 235000019818 tetrasodium diphosphate Nutrition 0.000 description 1
- 239000001577 tetrasodium phosphonato phosphate Substances 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- 150000004992 toluidines Chemical class 0.000 description 1
- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 description 1
- ZFDIRQKJPRINOQ-UHFFFAOYSA-N transbutenic acid ethyl ester Natural products CCOC(=O)C=CC ZFDIRQKJPRINOQ-UHFFFAOYSA-N 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- RYFMWSXOAZQYPI-UHFFFAOYSA-K trisodium phosphate Chemical compound [Na+].[Na+].[Na+].[O-]P([O-])([O-])=O RYFMWSXOAZQYPI-UHFFFAOYSA-K 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/022—Quinonediazides
- G03F7/0226—Quinonediazides characterised by the non-macromolecular additives
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
Abstract
Description
【発明の詳細な説明】
[産業上の利用分野]
この発明は透明支持体上に感光性樹脂層を設けてなる画
像形成材料に関する。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] This invention relates to an image forming material comprising a photosensitive resin layer provided on a transparent support.
〔従来の技術]
この種の画像形成材料は、画像を形成するべき基板、た
とえばガラス板やプラスチックフィルムなどからなる絶
縁ベースにアルミニウム膜やITO膜(酸化インジウム
−酸化スズ複合膜)などの導電体層を形成してなる基板
の上記導電体層の表面に、感光性樹脂層が内側となるよ
うに加熱圧着して積層し、この積層後所定の原画を介し
て透明支持体側からパターン露光したのち、透明支持体
のみを剥離した上で非露光部分の感光性樹脂層を現像液
で除去して現像することにより、基板上に露光により硬
化した感光性樹脂が画像として形成される。[Prior Art] This type of image forming material is a substrate on which an image is to be formed, such as an insulating base made of a glass plate or a plastic film, and a conductive material such as an aluminum film or an ITO film (indium oxide-tin oxide composite film). The photosensitive resin layer is heat-pressed and laminated on the surface of the conductive layer of the substrate on which the layer is formed, with the photosensitive resin layer on the inside, and after this lamination, pattern exposure is performed from the transparent support side through a predetermined original image. After peeling off only the transparent support, the unexposed portions of the photosensitive resin layer are removed with a developer and developed, thereby forming an image of the photosensitive resin cured by exposure on the substrate.
この現像後、上記非露光部分の除去によって露出した導
電体層をエツチング液にてエツチング除去するか、ある
いはこの層上に適宜のメッキ液を用いてメッキ層を形成
するなどの回路形成処理を行うことにより、絶縁ベース
上にパターン化導電体層またはパターン化メッキ層が形
成されてなる回路基板が得られる。ここで、前記露光に
より硬化した感光性樹脂層、つまり硬化画像は、上記の
回路形成処理工程においてマスク材としての機能を果た
し、この処理工程後は前記現像液よりも強力な試剤で除
去される。After this development, a circuit forming process is performed, such as etching away the conductive layer exposed by removing the non-exposed areas with an etching solution, or forming a plating layer on this layer using an appropriate plating solution. As a result, a circuit board is obtained in which a patterned conductive layer or a patterned plating layer is formed on an insulating base. Here, the photosensitive resin layer cured by the exposure, that is, the cured image, functions as a mask material in the circuit formation processing step, and is removed with a reagent stronger than the developer after this processing step. .
従来、このような目的で用いられる画像形成材料として
は、これより形成される硬化画像が基板(の導電体層)
との接着性にすぐれ、特にエツチング液やメッキ液など
の薬品に抗してマスク材としての機能を充分に果たしう
るようなすぐれた耐薬品性を備えたものであることが望
まれ、この観点から感光性樹脂層の材料構成につき種々
の提案がなされてきた。この提案のほとんどは感光性樹
脂の種類に関するものであるが、その他任意の感光性樹
脂中に特定の添加剤を加えて前記接着性の改善を図ろう
としたものも知られている。Conventionally, as an image forming material used for such purposes, a cured image formed from this material is used as a substrate (conductor layer).
From this point of view, it is desirable that the mask material has excellent adhesion with other materials, and has excellent chemical resistance, particularly against chemicals such as etching solutions and plating solutions, so that it can fully function as a mask material. Since then, various proposals have been made regarding the material structure of the photosensitive resin layer. Most of these proposals relate to the type of photosensitive resin, but there are also known proposals in which specific additives are added to any photosensitive resin to improve the adhesiveness.
たとえば、特開昭59−152439号公報などに、上
記添加剤としてトリアジン誘導体を用いて、これと基板
の導電体層を構成する金属との間でメルカプチド型錯体
を形成させることによって、硬化画像と基板との接着性
を改善し、耐薬品性の向上を図ることが提案されている
。For example, in Japanese Patent Application Laid-Open No. 59-152439, a triazine derivative is used as the additive, and a mercaptide complex is formed between the triazine derivative and the metal constituting the conductive layer of the substrate, thereby creating a cured image. It has been proposed to improve the adhesion to the substrate and improve the chemical resistance.
しかるに、この発明者らの実験検討によれば、上記提案
の如き従来公知の画像形成材料は、画像を形成するべき
基板における導電体層の表面粗さが2〜5μ程度と大き
くされたものではこれと硬化画像との接着性をある程度
満足して比較的良好な耐薬品性を示すが、液晶表示装置
やエレクトロクロミック表示装置などのような精密な回
路形成が要求される導電体層の表面粗さが1pn以下と
なるような基板に対しては上記接着性が不足し、エツチ
ングやメッキなどの回路形成処理工程中に硬化画像にふ
くれや剥がれを生じてマスク材としての機能を充分に発
揮できなくなる場合があることが判った。However, according to experimental studies conducted by the inventors, conventionally known image forming materials such as those proposed above do not have a conductive layer on a substrate on which an image is to be formed, and the surface roughness of the conductive layer is as large as about 2 to 5 μm. Although it satisfies adhesion with the cured image to some extent and exhibits relatively good chemical resistance, it is difficult to prevent surface roughness of conductive layers that require precise circuit formation such as in liquid crystal display devices and electrochromic display devices. For substrates with a thickness of 1 pn or less, the adhesiveness described above is insufficient, and the cured image may bulge or peel during circuit forming processes such as etching and plating, making it impossible to fully perform its function as a mask material. It turns out that it may disappear.
したがって、この発明は、上記問題点を解消すること、
つまり硬化画像の耐薬品性にすぐれて導電体層の表面粗
さが1p以下となるような基板に対しても精密な回路形
成を行える画像形成材料を提供することを目的としてい
る。Therefore, the present invention aims to solve the above problems;
In other words, the object of the present invention is to provide an image forming material that provides a cured image with excellent chemical resistance and allows precise circuit formation even on a substrate whose conductive layer has a surface roughness of 1 p or less.
この発明者らは、上記目的を達成するために鋭意検討し
た結果、各種の感光性樹脂中に従来用いられたことのな
い特定の化合物を含ませるように”したときには、導電
体層の表面粗さがIP以下となるような基板に対しても
これと硬化画像との接着性にすぐれてマスク材としての
機能を充分に発揮できる、したがって精密な回路形成が
可能となる画像形成材料が得られるものであることを知
り、この発明を完成するに至った。As a result of intensive studies to achieve the above object, the inventors discovered that when various photosensitive resins contain a specific compound that has never been used before, the surface roughness of the conductive layer can be improved. An image-forming material is obtained that has excellent adhesion between the cured image and the substrate and can sufficiently function as a mask material even for a substrate whose surface temperature is less than IP, thereby making it possible to form precise circuits. After discovering that this was the case, he completed this invention.
すなわち、この発明は、透明支持体上に、つぎの式(I
);
(式中%R1はメチル基またはエチル基、R2は水素、
メチル基またはエチル基である)で表わされる化合物を
含む感光性樹脂層を設けてなる画像形成材料に係るもの
である。That is, this invention provides the following formula (I) on a transparent support.
); (In the formula, %R1 is a methyl group or an ethyl group, R2 is hydrogen,
The invention relates to an image forming material provided with a photosensitive resin layer containing a compound represented by a methyl group or an ethyl group.
〔発明の構成・作用」
この発明において使用する前記式(I)で表わされる化
合物は、共存するラジカルと反応して発色するトリフェ
ニルメタン系染料の一種であり、上記ラジカルとの反応
性がフェニル基に導入された特定の置換基に起因して非
常に大きいことから、感光性樹脂層を露光により硬化さ
せる際に発生するラジカルと容易に反応して中間体を生
成する。この発明では、このような化合物を用いること
により硬化画像と基板の導電体層との接着性が大きく改
良されるものであるが、この理由はおそらく上記中間体
の生成に基づくものであると推定される。[Structure and operation of the invention] The compound represented by the formula (I) used in this invention is a type of triphenylmethane dye that develops color by reacting with coexisting radicals, and its reactivity with the radicals is phenyl. Because it is very large due to the specific substituent introduced into the group, it easily reacts with radicals generated when the photosensitive resin layer is cured by exposure to produce an intermediate. In this invention, by using such a compound, the adhesion between the cured image and the conductive layer of the substrate is greatly improved, and it is presumed that the reason for this is probably based on the formation of the above-mentioned intermediate. be done.
しかし、その詳細については必ずしも明らかとはいえな
い。However, the details are not necessarily clear.
このような化合物の具体例としては、4・4′・4”・
N−ジエチルベンゼンアミン)、4・4・4″−メチリ
ディン−トリス(N−N−ジメチル−3−メチルベンゼ
ンアミン)、4・4′・4″−メチリディン−トリス(
N−N−ジエチル−3−メチルベンゼンアミン)、4・
4′・4“−メチリディン−トリス(N−N−ジメチル
−3−エチルベンゼンアミン)、4・4′・イ′−メチ
リディン−トリス(N−N−ジエチル−3−エチルベン
ゼンアミン)などがある。Specific examples of such compounds include 4, 4', 4",
N-diethylbenzenamine), 4,4,4''-methylidine-tris (N-N-dimethyl-3-methylbenzenamine), 4,4',4''-methylidine-tris (
N-N-diethyl-3-methylbenzenamine), 4.
Examples include 4',4''-methylidine-tris (N-N-dimethyl-3-ethylbenzenamine), 4,4',i'-methylidine-tris (N-N-diethyl-3-ethylbenzenamine), and the like.
この発明において上記の化合物を含ませるべき感光性樹
脂層の種類は限定されず、従来公知のものを広く適用で
きる。これらの中でも特に一般的なものとしては、露光
により重合硬化するタイプのものがあり、その代表例は
皮膜形成性高分子物質とエチレン性不飽和重合性化合物
と光重合開始剤とが必須成分として含まれてなるもので
ある。In the present invention, the type of photosensitive resin layer that should contain the above-mentioned compound is not limited, and conventionally known ones can be widely applied. Among these, the most common type is one that polymerizes and hardens upon exposure to light, and a typical example is one that contains a film-forming polymeric substance, an ethylenically unsaturated polymerizable compound, and a photopolymerization initiator as essential components. It is included.
以下、この重合硬化タイプのものを例にとり、その材料
構成などに関しさらに詳しく説明する。Hereinafter, this polymerization-curing type will be taken as an example, and its material structure will be explained in more detail.
上記の皮膜形成性高分子物質としては、非露光部分の感
光性樹脂層を除去して所望の硬化画像を形成するための
現像液としてアルカリ性水溶液を用いる場合は、特にス
チレン−マレイン酸半エステル共重合体をこれ単独で用
いるか、あるいはポリメチルメタクリレートの部分加水
分解物、共重合ポリアミド、ポリビニルアルコール、ポ
リクロロプレン、スチレン−ブタジェン共重合コムなど
の他のポリマーとこれら他のポリマーが高分子物質全体
の50重量%以下となる割合で併用するのが望ましい。When using an alkaline aqueous solution as a developer for removing the photosensitive resin layer in non-exposed areas and forming a desired cured image, the above-mentioned film-forming polymeric substances include styrene-maleic acid half ester, etc. The polymer can be used alone or together with other polymers such as partial hydrolysates of polymethyl methacrylate, copolyamides, polyvinyl alcohol, polychloroprene, styrene-butadiene copolymer combs, etc. It is desirable to use them together in a proportion of 50% by weight or less.
上記のスチレン−マレイン酸半エステル共重合体を構成
するマレイン酸半エステルとは、無水マレイン酸にイン
プロピルアルコール、ブチルセロソルブなどの炭素数が
通常3〜6程度のアルコール類を反応させて、分子内に
遊離のカルボキシル基が1個残存する半エステルとした
ものである。The maleic acid half ester constituting the above styrene-maleic acid half ester copolymer is produced by reacting maleic anhydride with an alcohol having usually 3 to 6 carbon atoms such as inpropyl alcohol or butyl cellosolve. It is a half ester in which one free carboxyl group remains.
この半エステルとスチレンとの共重合割合は、共重合体
中上記半エステルが40〜80重量%程度を占める割合
であるのが望ましい。The copolymerization ratio of this half ester and styrene is preferably such that the half ester accounts for about 40 to 80% by weight in the copolymer.
このようなスチレン−マレイン酸半エステル共重合体の
分子量としては、重量平均分子量が5万〜13万の範囲
にあるのが好適である。分子量が低くなりすぎると、皮
膜形成性が悪くなるほか、露光硬化部分の現像液(アル
カリ性水溶液)やエツチング液などに対する耐性に劣る
ため、現像性の低下や耐薬品性の低下をきたしやすい。The weight average molecular weight of such a styrene-maleic acid half ester copolymer is preferably in the range of 50,000 to 130,000. If the molecular weight becomes too low, not only will film forming properties deteriorate, but the exposed and hardened portions will be less resistant to developing solutions (alkaline aqueous solutions) and etching solutions, so developing properties and chemical resistance will tend to decline.
また、分子量が高くなりすぎると、非露光部分を現像液
で除去する際の除去性に劣るため、やはり現像性のイ氏
下をきたしやすい。Furthermore, if the molecular weight becomes too high, the removability of the non-exposed portions with a developer will be poor, resulting in poor developability.
一方、硬化画像の形成をアルカリ性水溶液以外の現像液
を用いて行うことも可能であり、この場合それに応じた
適宜の皮膜形成性高分子物質を使用することができる。On the other hand, it is also possible to form a cured image using a developer other than an alkaline aqueous solution, and in this case, an appropriate film-forming polymeric substance can be used accordingly.
このような高分子物質の代表的な例としては、塩素化ポ
リエチレン、塩素化ポリプロピレンの如き塩素化ポリオ
レフィン、ポリメチルメタクリレート、ポリメチルアク
リレート、ポリ塩化ビニル、ポリ塩化ビニリデン、ポリ
ビニルブチラール、ポリビニルアセテート、塩化ヒ=ル
ー酢酸ビニル共重合体、ポリイソプレン、塩化ゴム、ポ
リクロロプレン、ポリクロルスルホン化エチレン、塩化
ビニリデン−アクリロニトリル共重合体、ポリクロルス
ルホン化プロピレン、飽和ポリエステルなどが挙げられ
る。Typical examples of such polymeric substances include chlorinated polyolefins such as chlorinated polyethylene and chlorinated polypropylene, polymethyl methacrylate, polymethyl acrylate, polyvinyl chloride, polyvinylidene chloride, polyvinyl butyral, polyvinyl acetate, and chlorinated polyolefins such as chlorinated polyethylene and chlorinated polypropylene. Examples include H=-vinyl acetate copolymer, polyisoprene, chlorinated rubber, polychloroprene, polychlorosulfonated ethylene, vinylidene chloride-acrylonitrile copolymer, polychlorosulfonated propylene, and saturated polyester.
このような皮膜形成性高分子物質と併用するエチレン性
不飽和重合性化合物としては、エチレン性不飽和結合を
1個有する化合物と2個以上有する化合物とが包含され
、現像液として何を用いるかにより前記皮膜形成性高分
子物質との組み合わせを考慮して適宜のものを使用する
。Ethylenically unsaturated polymerizable compounds to be used in combination with such film-forming polymeric substances include compounds having one ethylenically unsaturated bond and compounds having two or more.What is used as a developer? An appropriate one is used in consideration of the combination with the film-forming polymeric substance.
エチレン性不飽和結合を1個有する化合物としては、た
とえばアクリル酸ないしアクリル酸エステル類、メタク
リル酸ないしメタクリル酸エステル類、アクリルアミド
類、メタクリルアミド類、アリル化合物類、ビニルエー
テル類、ビニルエステル類、N−ビニル化合物、スチレ
ン類、クロトン酸エステル類などがある。Examples of compounds having one ethylenically unsaturated bond include acrylic acid or acrylic esters, methacrylic acid or methacrylic esters, acrylamides, methacrylamides, allyl compounds, vinyl ethers, vinyl esters, N- These include vinyl compounds, styrenes, and crotonic acid esters.
ここで、アクリル酸エステル類の具体例としては、アク
リル酸プロピル、アクリル酸ブチル、アクリル酸アミル
、アクリル酸エチルヘキシル、アクリル酸オクチルなど
のアクリル酸アルキルエステルがあり、またメタクリル
酸エステル類の具体例としては、メタクリル酸メチル、
メタクリル酸エチル、メタクリル酸プロピル、メタクリ
ル酸イソプロピルなどのメタクリル酸アルキルエステル
が挙げられる。Specific examples of acrylic esters include alkyl acrylates such as propyl acrylate, butyl acrylate, amyl acrylate, ethylhexyl acrylate, and octyl acrylate, and specific examples of methacrylic esters include is methyl methacrylate,
Examples include alkyl methacrylates such as ethyl methacrylate, propyl methacrylate, and isopropyl methacrylate.
アクリルアミド類としては、アクリルアミドのほか、N
−メチルアクリルアミド、N−エチルアクリルアミド、
N−ブチルアクリルアミド、N−イソプロピルアクリル
アミド、N−t−ブチルアクリルアミド、N−エチルヘ
キシルアクリルアミドなどのN−アルキルアクリルアミ
ドなどがある。In addition to acrylamide, N
-methylacrylamide, N-ethylacrylamide,
Examples include N-alkylacrylamides such as N-butylacrylamide, N-isopropylacrylamide, Nt-butylacrylamide, and N-ethylhexylacrylamide.
メタクリルアミド類としては、メタクリルアミドのほか
、N−メチルメタクリルアミド、N−エチルメタクリル
アミド、N−イソプロピルメタクリルアミド、N−t−
ブチルメタクリルアミド、N−エチルヘキシルメタクリ
ルアミドなどのN−アルキルメタクリルアミドなどが挙
げられる。In addition to methacrylamide, methacrylamides include N-methylmethacrylamide, N-ethylmethacrylamide, N-isopropylmethacrylamide, N-t-
Examples include N-alkyl methacrylamide such as butyl methacrylamide and N-ethylhexyl methacrylamide.
アリル化合物類としては、酢酸アリル、カプロン酸アリ
ル、カプリル酸アリル、ラウリン酸アリル、パルミチン
酸アリルなどのアリルエステルがあり、またビニルエー
テル類としては、ヘキシルビニルエーテル、オクチルビ
ニルエーテル、デシルビニルエーテル、エチルヘキシル
ビニルエーテルなどのアルキルビニルエーテルが挙げら
れる。Allyl compounds include allyl esters such as allyl acetate, allyl caproate, allyl caprylate, allyl laurate, and allyl palmitate. Vinyl ethers include hexyl vinyl ether, octyl vinyl ether, decyl vinyl ether, and ethylhexyl vinyl ether. Examples include alkyl vinyl ethers.
また、ビニルエステル類としては、ビニルブチレート、
ビニルイソブチレート、ビニルトリメチルアセテート、
ビニルジエチルアセテート、ビニルバレレート、ビニル
カプロエートなどが挙ケラれ、スチレン類としては、ス
チレンのほか、メチルスチレン、クロルメチル化スチレ
ン、アルコキシスチレン、ハロゲン化スチレン、安息香
酸スチレンなどがある。さらにクロトン酸エステル類と
しては、クロトン酸メチル、クロトン酸エチル、クロト
ン酸ブチル、クロトン酸ヘキシル、クロトン酸イソプロ
ピルなどが挙げられる。In addition, vinyl esters include vinyl butyrate,
vinyl isobutyrate, vinyl trimethyl acetate,
Vinyl diethyl acetate, vinyl valerate, vinyl caproate, etc. are listed, and the styrenes include, in addition to styrene, methylstyrene, chloromethylated styrene, alkoxystyrene, halogenated styrene, and styrene benzoate. Furthermore, examples of crotonate esters include methyl crotonate, ethyl crotonate, butyl crotonate, hexyl crotonate, isopropyl crotonate, and the like.
エチレン性不飽和結合を2個以上有する化合物は、前記
エチレン性不飽和結合を1個有する化合物よりもより好
ましく使用される。これに属するものとしては、多価ア
ルコールとアクリル酸ないしメタクリル酸とのエステル
類があり、ジ(メタ)アクリレートないしそれ以上のポ
リ(メタ)アクリレートが用いられる。上記多価アルコ
ールとしては、ポリエチレングリコール、ポリエチレン
グリコールへポリブチレンオキシド、(β−ヒドロキシ
エトキシ)ベンゼン、グリセリン、ジグリセリン、ネオ
ペンチルクリコール、トリメチロールプロパン、トリメ
チロールプロパン、ペンタエリスリトール、ジペンタエ
リスリトール、ソルビタン、ソルビトール、1・4−ブ
タンジオール、1・2・4−ブタントリオール、2−ブ
テンート4−ジオール、2−ブチル−2−エチル−プロ
パンジオール、2−ブテンート4−ジオール、1・3−
プロパンジオール、トリエタノールアミン、デカリンジ
オール、3−クロルート2−プロパンジオールなどがあ
る。A compound having two or more ethylenically unsaturated bonds is more preferably used than a compound having one ethylenically unsaturated bond. Those belonging to this category include esters of polyhydric alcohols and acrylic acid or methacrylic acid, and di(meth)acrylates or higher poly(meth)acrylates are used. The polyhydric alcohols include polyethylene glycol, polybutylene oxide to polyethylene glycol, (β-hydroxyethoxy)benzene, glycerin, diglycerin, neopentyl glycol, trimethylolpropane, trimethylolpropane, pentaerythritol, dipentaerythritol, Sorbitan, sorbitol, 1,4-butanediol, 1,2,4-butanetriol, 2-butenoto-4-diol, 2-butyl-2-ethyl-propanediol, 2-butenoto-4-diol, 1,3-
Examples include propanediol, triethanolamine, decalindiol, and 3-chloroto-2-propanediol.
上記以外のポリエチレン性不飽和重合性化合物トシテ、
アクリル酸ないしメタクリル酸、多価アルコールおよび
多塩基性酸から合成されるようなポリエステルアクリレ
ート類ないしポリエステルメタクリレート類や、ビスフ
ェノールにエチレンオキサイドやプロピレンオキサイド
を付加反応させたのちにアクリル酸ないしメタクリル酸
をエステル化反応させることにより得られるジ(メタ)
アクリレート類なども使用できる。Polyethylenically unsaturated polymerizable compounds other than those listed above,
Polyester acrylates or polyester methacrylates synthesized from acrylic acid or methacrylic acid, polyhydric alcohols, and polybasic acids, or esters of acrylic acid or methacrylic acid after addition reaction of ethylene oxide or propylene oxide to bisphenol. Di(meth) obtained by reaction
Acrylates can also be used.
上述したような各種のエチレン性不飽和重合性化合物は
、前記の皮膜形成性高分子物質100重量部に対して通
常10〜300重量部、好ましくは50〜200重量部
の割合で使用するのがよい。The various ethylenically unsaturated polymerizable compounds mentioned above are usually used in an amount of 10 to 300 parts by weight, preferably 50 to 200 parts by weight, per 100 parts by weight of the film-forming polymeric substance. good.
この使用量が過少でもまた過多でも現像性や耐薬品性に
すぐれる感光性樹脂層の形成が難しくなるため、好まし
くない。If the amount used is too small or too large, it becomes difficult to form a photosensitive resin layer with excellent developability and chemical resistance, which is not preferable.
つぎに、光重合開始剤としては、カルボニル化合物、有
機硫黄化合物、過酸化物、レドックス系化合物、アゾお
よびジアゾ化合物、ハロゲン化合物、チオキサントン系
化合物などがある。これらの中でも特に好適なものは、
下記の式(II) ;凸
(式中、R3は水素、メチル基、エチル基、イソプロピ
ル基または塩素、R4は水素、メチル基またはエチル基
である)
で表わされるチオキサントン系化合物である。Next, examples of photopolymerization initiators include carbonyl compounds, organic sulfur compounds, peroxides, redox compounds, azo and diazo compounds, halogen compounds, and thioxanthone compounds. Among these, particularly suitable ones are:
It is a thioxanthone compound represented by the following formula (II); convex (wherein R3 is hydrogen, methyl group, ethyl group, isopropyl group, or chlorine, and R4 is hydrogen, methyl group, or ethyl group).
上記のチオキサントン系化合物のうち最も好適な例とし
ては、上記式(II)中のR3,R4が共に水素である
チオキサントン、共にメチル基である2・4−ジメチル
チオキサントン、共にエチル基である2・4−ジエチル
チオキサントン、R3が塩素でR4が水素である2−ク
ロルチオキサントン、R3がインプロピル基でR4が水
素である2−イソプロピルチオキサントンなどが挙げら
れる。これらのチオキサントン系化合物はこれより発生
するラジカルが前記式(I)で表わされる化合物と反応
しやすく、この反応により生成する中間体が硬化画像と
基板の導電体層との接着力の向上に大きく寄与して耐薬
品性を著しく高めるという働きを有している。なお、こ
のようなチオキサントン系化合物とともにP−ジメチル
アミノ安息香酸イソアミルエステル、P−ジメチルアミ
ノ安息香酸エチルヱステルなどを併用してもよい。Among the above thioxanthone compounds, the most preferred examples include thioxanthone in which R3 and R4 in the above formula (II) are both hydrogen, 2,4-dimethylthioxanthone in which both are methyl groups, and 2,4-dimethylthioxanthone in which both are ethyl groups. Examples thereof include 4-diethylthioxanthone, 2-chlorothioxanthone in which R3 is chlorine and R4 is hydrogen, and 2-isopropylthioxanthone in which R3 is an inpropyl group and R4 is hydrogen. The radicals generated by these thioxanthone compounds easily react with the compound represented by the formula (I) above, and the intermediate produced by this reaction greatly improves the adhesive strength between the cured image and the conductive layer of the substrate. It has the function of significantly increasing chemical resistance. In addition, P-dimethylaminobenzoic acid isoamyl ester, P-dimethylaminobenzoic acid ethyl ester, etc. may be used together with such a thioxanthone compound.
チオキサントン系化合物以外の光重合開始剤として使用
しうる前記カルボニル化合物などの具体例につき挙げれ
ば、まずカルボニル化合物としてハ、ベンゾイン、ベン
ゾインメチルエーテル、ベンゾインイソプロピルエーテ
ル、ベンゾインブチルエーテル、ベンジルジメチルケタ
ール、ベンゾフェノン、アントラキノン、2−メチルア
ントラキノン、2−t−ブチルアントラキノン、9・1
〇−フェナントレンキノン、ジアセチル、ベンジルなど
がある。また、有機硫黄化合物としては、ジブチルジス
ルフィド、ジオクチルジスルフィド、ジベンジルジスル
フィド、ジフェニルジスルフィド、ジベンゾイルジスル
フィド、ジアセチルジスルフィドなどがある。Specific examples of the carbonyl compounds that can be used as photopolymerization initiators other than thioxanthone compounds include: C, benzoin, benzoin methyl ether, benzoin isopropyl ether, benzoin butyl ether, benzyl dimethyl ketal, benzophenone, and anthraquinone. , 2-methylanthraquinone, 2-t-butylanthraquinone, 9.1
〇-Phenanthrenequinone, diacetyl, benzyl, etc. Examples of organic sulfur compounds include dibutyl disulfide, dioctyl disulfide, dibenzyl disulfide, diphenyl disulfide, dibenzoyl disulfide, and diacetyl disulfide.
過酸化物としては、過酸化水素、ジ−t−ブチルペルオ
キシド、過酸化ベンゾイル、メチルエチルケトンペルオ
キシドなどが挙げられる。さらに、レドックス系化合物
は、過酸化物と還元剤との組合せからなるものであり、
第一鉄イオンと過酸化水素、第一鉄イオンと過硫酸イオ
ン、第二鉄イオンと過酸化物などがある。Examples of peroxides include hydrogen peroxide, di-t-butyl peroxide, benzoyl peroxide, and methyl ethyl ketone peroxide. Furthermore, the redox compound consists of a combination of a peroxide and a reducing agent,
These include ferrous ions and hydrogen peroxide, ferrous ions and persulfate ions, and ferric ions and peroxide.
アゾおよびジアゾ化合物としては、α・α′−アゾビス
イソブチロニトリル、2−アゾビス−2−メチルブチロ
ニトリル、1−アゾビス−シクロヘキサンカルボニトリ
ル、p−アミノジフェニルアミンのジアゾニウム塩など
がある。ハロゲン化合物としては、クロルメチルナフチ
ルクロリド、フェナシルクロリド、クロルアセトン、β
−ナフタレンスルホニルクロリド、キシレンスルホニル
クロリドなどを挙げることができる。Examples of azo and diazo compounds include .alpha..alpha.'-azobisisobutyronitrile, 2-azobis-2-methylbutyronitrile, 1-azobis-cyclohexanecarbonitrile, and diazonium salts of p-aminodiphenylamine. Halogen compounds include chloromethylnaphthyl chloride, phenacyl chloride, chloroacetone, β
-Naphthalenesulfonyl chloride, xylenesulfonyl chloride, etc. can be mentioned.
これらの光重合開始剤は、その一種を用いてもよいし二
種以上を混合して用いてもよい。使用量は、エチレン性
不飽和重合性化合物100重量部に対して通常0.5〜
20重量部、好適には5〜10重量部の範囲とすればよ
い。過少では感光性樹脂層の露光硬化性に劣り、また所
定量を超えて用いてもそれ以上の硬化性の向上は認めら
れないため経済的に不利である。These photopolymerization initiators may be used alone or in combination of two or more. The amount used is usually 0.5 to 100 parts by weight of the ethylenically unsaturated polymerizable compound.
The amount may be 20 parts by weight, preferably in the range of 5 to 10 parts by weight. If the amount is too small, the exposure curability of the photosensitive resin layer will be poor, and if it is used in excess of a predetermined amount, no further improvement in curability will be observed, which is economically disadvantageous.
露光により重合硬化するタイプの感光性樹脂層は、以上
の皮膜形成性高分子物質とエチレン性不飽和重合性化合
物と光重合開始剤とを必須成分とし、これに前記の式(
I)で表わされる化合物を含ませた光重合性組成物から
なるものであるが、この組成物中の上記式(I)で表わ
される化合物の含有量としては上記光重合開始剤100
重量部に対して10〜500重量部、好適には50〜3
00重量部となるようにするのがよく、組成物全体中に
占める割合としては通常0.1〜10重量%程度である
のが好適である。A photosensitive resin layer of the type that polymerizes and hardens upon exposure to light has the above-mentioned film-forming polymeric substance, ethylenically unsaturated polymerizable compound, and photopolymerization initiator as essential components, and the above-mentioned formula (
It consists of a photopolymerizable composition containing the compound represented by formula (I), and the content of the compound represented by formula (I) in this composition is 100% of the above photopolymerization initiator.
10 to 500 parts by weight, preferably 50 to 3 parts by weight
00 parts by weight, and the proportion in the entire composition is usually about 0.1 to 10% by weight.
なお、上記の光重合性組成物中には必要に応じて熱重合
禁止剤や着色剤を配合するようにしてもよく、さらに望
むなら可塑剤、接着促進剤などの各種添加剤を配合する
ことも可能である。Note that the above photopolymerizable composition may contain a thermal polymerization inhibitor and a coloring agent as necessary, and if desired, various additives such as a plasticizer and an adhesion promoter may be blended. is also possible.
熱重合禁止剤としては、パラメトキシフェノール、ヒド
ロキノン、アルキル基またはアリール基置換ヒドロキノ
ン、t−ブチルカテコール、ピロガロール、塩化第一銅
、フェノチアジン、フロラニール、ナフチルアミン、β
−ナフトール、2・6−ジーt−ブチル−p−クレゾー
ル、ピリジン、ニトロベンゼン、ジニトロベンゼン、p
−トルイジン、メチレンブルー、酢酸銅の如き有機酸銅
などがある。これらの熱重合禁止剤はエチレン性不飽和
重合性化合物100重量部に対して通常0.001〜5
重量部の範囲で用いられる。Thermal polymerization inhibitors include paramethoxyphenol, hydroquinone, alkyl- or aryl-substituted hydroquinone, t-butylcatechol, pyrogallol, cuprous chloride, phenothiazine, floranil, naphthylamine, β
- Naphthol, 2,6-di-t-butyl-p-cresol, pyridine, nitrobenzene, dinitrobenzene, p
- Examples include organic copper acids such as toluidine, methylene blue, and copper acetate. These thermal polymerization inhibitors are usually used in an amount of 0.001 to 5 parts by weight per 100 parts by weight of the ethylenically unsaturated polymerizable compound.
Used in parts by weight.
着色剤としては、たとえばカーボンブラック、酸化鉄、
フタロシアニン系顔料、アゾ系顔料などの顔料や、メチ
レンブルー、クリスタルバイオレット、ローダミンB1
アクシン、オーラミン、アゾ系染料、アントラキノン系
染料などの染料があるが、光重合開始剤の吸収波長の光
を吸収しないものが好ましい。着色剤の添加量は、皮膜
形成性高分子物質およびエチレン性不飽和重合性化合物
の合計量100重量部に対して通常0.01〜5重量部
の範囲で用いられる。Examples of colorants include carbon black, iron oxide,
Pigments such as phthalocyanine pigments and azo pigments, methylene blue, crystal violet, and rhodamine B1
There are dyes such as axin, auramine, azo dyes, and anthraquinone dyes, but those that do not absorb light at the absorption wavelength of the photopolymerization initiator are preferred. The amount of the colorant added is usually in the range of 0.01 to 5 parts by weight based on 100 parts by weight of the total amount of the film-forming polymeric substance and the ethylenically unsaturated polymerizable compound.
この発明においては、このような光重合性組成物を通常
溶媒に均一に溶解し、これを透明支持体上にキャスティ
ングしたのち、乾燥することにより、一般に5〜100
F、特に好適には10〜50P程度の厚みの感光性樹脂
層を形成して、画像形成材料とする。In the present invention, such a photopolymerizable composition is uniformly dissolved in a normal solvent, cast on a transparent support, and then dried to obtain a polymerization ratio of 5 to 100%.
F, particularly preferably a photosensitive resin layer having a thickness of about 10 to 50 P is formed to prepare an image forming material.
上記の溶媒としては、光重合性組成物を溶解しうるもの
であれば特に限定されず、一種であっても二種以上の混
合溶媒であってもよい。具体例としては、アセトン、メ
チルエチルケトン、メチルイソブチルケトン、メチルセ
ロソルブ、エチルセロソルフ、酢酸エチル、酢酸ブチル
、ジクロルメタン、クロロホルム、メタノール、エタノ
ールなどが挙げられる。The above-mentioned solvent is not particularly limited as long as it can dissolve the photopolymerizable composition, and may be one type or a mixed solvent of two or more types. Specific examples include acetone, methyl ethyl ketone, methyl isobutyl ketone, methyl cellosolve, ethyl cellosolve, ethyl acetate, butyl acetate, dichloromethane, chloroform, methanol, ethanol, and the like.
一方、上記の透明支持体としては、この上に均一厚みの
感光性樹脂層を形成しうるように、表面平滑性にすぐれ
たものであることが望まれ、また露光後現像するにあた
って上記層から容易に剥離しうるように、その材質を選
択しまた表面処理を施していないものを使用することが
望まれる。さらに、露光によって感光性樹脂層を良好に
光重合できるように、光の透過性にすぐれていること、
たとえば波長範囲290〜500nmにおいて光の透過
率が30%以上、特に好適には65%以上となるもので
あることが要求される。On the other hand, the above-mentioned transparent support is desired to have excellent surface smoothness so that a photosensitive resin layer of uniform thickness can be formed thereon, and it is also desirable that the above-mentioned transparent support have excellent surface smoothness in order to form a uniformly thick photosensitive resin layer thereon. It is desirable that the material is selected so that it can be easily peeled off, and that the material is not surface-treated. Furthermore, it must have excellent light transparency so that the photosensitive resin layer can be well photopolymerized by exposure to light.
For example, it is required that the light transmittance is 30% or more, particularly preferably 65% or more in the wavelength range of 290 to 500 nm.
このような要求特性を満足する透明支持体には、種々の
ものがあるが、その代表的な例を挙げれば、たとえば厚
みが5〜IQQ廊、特に10〜30/=m程度のポリエ
チレンテレフタレートフィルム、ポリエチレンフィルム
、ポリプロピレンフィルムなどがあり、これらの中でも
ポリエチレンテレフタレートフィルムが最も好ましい。There are various kinds of transparent supports that satisfy these required characteristics, but a typical example is a polyethylene terephthalate film with a thickness of 5 to IQQ, especially about 10 to 30 m. , polyethylene film, polypropylene film, etc. Among these, polyethylene terephthalate film is the most preferred.
この発明の画像形成材料はロール状に巻回し、あるいは
層状に重ね合わせて保存することができるが、その際材
料相互の粘着を防止するために、感光性樹脂層を形成し
てなる透明支持体の背面にシリコーン樹脂などの離型剤
で離型処理を施すか、あるいは離型効果のある保護フィ
ルム、たとえばポリエチレンフィルム、ポリプロピレン
フィルム、ポリテトラフルオロエチレンフィルムなどを
感光性樹脂層上に貼り合わせておくのがよい。上記の保
護フィルムは感光性樹脂層の経時的な劣化を防止するの
にも役立つものである。The image-forming material of the present invention can be stored by winding it into a roll or stacking it in layers. In this case, in order to prevent the materials from adhering to each other, a transparent support formed with a photosensitive resin layer is used. Either apply mold release treatment to the back surface of the photosensitive resin layer using a mold release agent such as silicone resin, or attach a protective film with a mold release effect, such as polyethylene film, polypropylene film, or polytetrafluoroethylene film, to the photosensitive resin layer. It is better to leave it there. The above-mentioned protective film is also useful for preventing deterioration of the photosensitive resin layer over time.
この発明の画像形成材料を用いて所定パター、ンの画像
を形成するには、従来公知の方法に準じて行えばよい。An image of a predetermined pattern can be formed using the image forming material of the present invention in accordance with a conventionally known method.
すなわち、まず、画像を形成するべき基板、たとえばガ
ラス板やプラスチックフィルムなどからなる絶縁ベース
にITO膜やアルミニウム膜などの導電体層を形成して
なる基板の上記導電体層の表面に、画像形成材料を、保
護フィルムを有するときはこれを剥離したのち、感光性
樹脂層側が内側となるように通常90〜130°Cの条
件で加熱圧着して積層する。That is, first, an image is formed on the surface of the conductive layer of a substrate on which an image is to be formed, for example, a conductive layer such as an ITO film or an aluminum film is formed on an insulating base made of a glass plate or a plastic film. If the materials have a protective film, this is peeled off, and then the materials are laminated by heat and pressure bonding, usually at a temperature of 90 to 130°C, so that the photosensitive resin layer side faces inside.
ついで、この積層体の透明支持体側から原画を通して活
性光線をパターン露光する。活性光線としては、200
〜700 nm、 好適には250〜500nmの紫
外線ないし可視光線があり、これらに好適な光源として
は、低圧、高圧、超高圧の水銀ランプ、キセノンランプ
、カーボンアーク燈、ハロゲンランプ、殺菌燈などがあ
る。Next, the laminate is exposed to actinic light in a pattern through the original image from the side of the transparent support. As active rays, 200
-700 nm, preferably 250-500 nm, and suitable light sources include low-pressure, high-pressure, and ultra-high pressure mercury lamps, xenon lamps, carbon arc lamps, halogen lamps, germicidal lamps, etc. be.
上記露光後透明支持体を剥離除去したのち、適宜の現像
液を用いて既知の方法、たとえばスプレー法、揺動浸漬
法、ブラッシング法、スクラッピング法などの方法によ
り、非露光部分のみを選択的に除去することによって現
像する。これによって基板上に露光により硬化した感光
性樹脂層が鮮明な画像として形成される。After the above-mentioned exposed transparent support is peeled and removed, only the non-exposed areas are selectively removed using a known method such as spray method, rocking dipping method, brushing method, or scraping method using an appropriate developer. Develop by removing. As a result, the photosensitive resin layer cured by exposure is formed on the substrate as a clear image.
上記の現像液としては、感光性樹脂層の材料構成に応じ
てアルカリ性水溶液かあるいは有機溶剤を主とした液が
用いられる。このうち、特に好ましいものはアルカリ性
水溶液であり、皮膜形成性高分子物質が前記したスチレ
ン−マレイン酸半エステル共重合体などである場合の上
記アルカリ性水溶液につきさらに詳しく述べれば以下の
とおりである。As the above developer, an alkaline aqueous solution or a solution mainly containing an organic solvent is used depending on the material composition of the photosensitive resin layer. Among these, an alkaline aqueous solution is particularly preferred, and the alkaline aqueous solution when the film-forming polymeric substance is the above-mentioned styrene-maleic acid half ester copolymer will be described in more detail below.
アルカリ成分としては、リチウム、ナトリウムまたはカ
リウムの水酸化物からなる水酸化アルカリ、リチウム、
ナトリウムまたはカリウムの炭酸塩や重炭酸塩の如き炭
酸アルカリ、リン酸カリウムやリン酸ナトリウムなどの
アルカリ金属リン酸塩、ピロリン酸ナトリウムやピロリ
ン酸カリウムなどのアルカリ金属ピロリン酸塩などが用
いられ、これらの中でも特に炭酸ナトリウムが好適であ
る。Alkali components include alkali hydroxides consisting of hydroxides of lithium, sodium or potassium, lithium,
Alkali carbonates such as sodium or potassium carbonates and bicarbonates, alkali metal phosphates such as potassium phosphate and sodium phosphate, and alkali metal pyrophosphates such as sodium pyrophosphate and potassium pyrophosphate are used. Among these, sodium carbonate is particularly preferred.
アルカリ成分の濃度は、水溶液中05〜3重量%程度で
あり、これより高くなると露光1部分までもが一部除去
されるおそれがあるため現像性が悪くなる。現像時の温
度は、感光性樹脂層の各構成成分の種類に応じて適宜調
節されるが、一般には20〜30°C程度である。なお
、上記の現像液には、必要に応じて界面活性剤、消泡剤
、現像を促進させるための少量の有機溶剤を含ませても
よい。The concentration of the alkali component in the aqueous solution is approximately 0.5 to 3% by weight, and if it is higher than this, there is a risk that even the first exposed portion may be partially removed, resulting in poor developability. The temperature during development is appropriately adjusted depending on the type of each component of the photosensitive resin layer, but is generally about 20 to 30°C. In addition, the above-mentioned developer may contain a surfactant, an antifoaming agent, and a small amount of an organic solvent for accelerating development, if necessary.
このようにして画像を形成したのち、硬化画像をマスク
材として露出した導電体層をエツチング液にてエツチン
グ除去する回路形成処理を行う。After forming the image in this manner, a circuit forming process is performed in which the exposed conductor layer is etched away using an etching solution using the cured image as a mask material.
この処理は、たとえばエツチング液として塩酸:水:硝
酸の容積比が1:1:0.08となる塩酸−硝酸混合水
溶液を用いて、この液中に前記画像形成された基板を3
0〜120秒間揺動浸漬する方法などによって行える。In this process, for example, a mixed aqueous solution of hydrochloric acid and nitric acid having a volume ratio of hydrochloric acid:water:nitric acid of 1:1:0.08 is used as an etching solution, and the substrate on which the image has been formed is placed in this solution for 30 minutes.
This can be done by a method of rocking immersion for 0 to 120 seconds.
また、エツチング液としてりん酸:硝酸:酢酸:水の容
積比が20:10.5ニアとなる混合水溶液を用いて上
記同様に処理してもよい。なお、上記エツチング処理の
代わりに、既知のメッキ液を用いて露出した導電体層上
にメッキ層を形成することもある。Alternatively, the same process as above may be performed using a mixed aqueous solution having a volume ratio of phosphoric acid: nitric acid: acetic acid: water of about 20:10.5 as an etching solution. Note that instead of the above etching process, a plating layer may be formed on the exposed conductive layer using a known plating solution.
このような種々の回路形成処理工程において、硬化画像
はエツチング液やメッキ液などの薬品に対して充分な耐
性を示し、マスク材としての機能をいかんなく発揮する
。特に、この機能は、画像を形成するべき基板における
導電体層の表面粗さには関係なく、つまりこの表面粗さ
が1μ以下通常0.(11μまでであっても、発揮され
る。In these various circuit forming processing steps, the cured image exhibits sufficient resistance to chemicals such as etching solutions and plating solutions, and fully functions as a mask material. In particular, this function is independent of the surface roughness of the conductor layer on the substrate on which the image is to be formed, i.e., this surface roughness is typically 0.1 μm or less. (Even if it is up to 11μ, it is exhibited.
この回路形成処理後、硬化画像を前記現像液よりも強力
な試剤、たとえば現像液が前記したアルカリ性水溶液で
ある場合はこれよりも強アルカリであるアルカリ性水溶
液(たとえば2〜7重量%程度の水酸化ナトリウム水溶
液など)によって除去することにより、絶縁ベース上に
パターン化導電体層またはパターン化メッキ層が精密に
形成されてなる回路基板が得られる。After this circuit forming process, the cured image is processed using a reagent stronger than the developer, for example, when the developer is the above-mentioned alkaline aqueous solution, an alkaline aqueous solution that is stronger than this (for example, about 2 to 7% by weight of hydroxide) is used. By removing the patterned conductor layer or patterned plating layer on the insulating base, a circuit board can be obtained in which a patterned conductor layer or a patterned plating layer is precisely formed on the insulating base.
以上のように、この発明においては、透明支持体上に設
ける感光性樹脂層中に前記式CI)で表わされる特定の
化合物を含ませるようにしたことにより、画像を形成す
るべき基板における導電体層の表面粗さが1μ以下とな
るような場合でもこれと硬化画像との接着性が改善され
、エツチングなどの回路形成処理工程中に硬化画像にふ
くれや剥がれなどの現像をきたすことのない画像形成材
料を得ることができる。したがって、この画像形成材料
は、液晶表示装置やエレクトロクロミック表示装置など
の精密な回路形成が要求される用途などに対しても有利
に応用することができる。As described above, in the present invention, the specific compound represented by the formula CI) is included in the photosensitive resin layer provided on the transparent support. Even when the surface roughness of the layer is 1μ or less, the adhesion between the layer and the cured image is improved, and the cured image does not develop such as blistering or peeling during circuit forming processing steps such as etching. A forming material can be obtained. Therefore, this image forming material can be advantageously applied to applications that require precise circuit formation, such as liquid crystal display devices and electrochromic display devices.
[実施例]
以下に、この発明の実施例を記載してより具体的に説明
する。なお、以下において部とあるは重量部を意味する
ものである。[Examples] Below, examples of the present invention will be described in more detail. In addition, in the following, parts mean parts by weight.
実施例1
2・4−ジエチルチオキサントン 8部p
−ジメチルアミノ安息香酸イソアミルエステル 3
部ビクトリアピュアーブルー 0.08
部ハイドロキノン 0.04部上記の
組成物を酢酸エチルに均一に溶解混合して、固型分濃度
が40重量%となる光重合性組成物溶液を調製した。こ
の溶液を、透明支持体としての25μ厚の透明なポリエ
チレンテレフタレートフィルム上にアプリケータにより
塗布し、80°Cで5分間加熱乾燥を行って約25/’
l厚の感光性樹脂層を形成し、この発明の画像形成材料
とした。Example 1 2,4-diethylthioxanthone 8 parts p
-Dimethylaminobenzoic acid isoamyl ester 3
Victoria Pure Blue 0.08
0.04 parts Hydroquinone The above composition was uniformly dissolved and mixed in ethyl acetate to prepare a photopolymerizable composition solution having a solid content concentration of 40% by weight. This solution was applied with an applicator onto a 25μ thick transparent polyethylene terephthalate film as a transparent support, and heated and dried at 80°C for 5 minutes to give an approx.
A photosensitive resin layer having a thickness of 1 was formed to obtain an image forming material of the present invention.
つぎに、この画像形成材料を、絶縁ベースとしての厚み
125pnの透明なポリエチレンテレフタレートフィル
ム上に導電体層として厚み20OAの酸化インジウム−
酸化スズ複合膜を形成してなる500Ω/C♂タイプの
透明導電性フィルムからなる基板の上記導電体層の表面
に、感光性樹脂層側が内側となるように90’Cの条件
下で加熱圧着して積層した。Next, this image forming material was applied as a conductive layer on a transparent polyethylene terephthalate film having a thickness of 125 pn as an insulating base.
A substrate made of a 500 Ω/C♂ type transparent conductive film formed with a tin oxide composite film was heat-pressed onto the surface of the conductive layer at 90'C with the photosensitive resin layer facing inside. and laminated.
この積層体の透明支持体の表面に陰画原稿を密着させ、
この原稿を通して3KWの超高圧水銀燈により光源から
60cmの距離で20秒間露光した。A negative original is brought into close contact with the surface of the transparent support of this laminate,
This original was exposed to light for 20 seconds at a distance of 60 cm from the light source using a 3 KW ultra-high pressure mercury lamp.
その後、透明支持体を剥離したのち、1重量%の炭酸ナ
トリウム(N a 2 C03)水溶液中に25°C下
で3分間揺動浸漬して現像することにより、線幅75μ
までの解像度を有する鮮明な画像が得られた。Thereafter, the transparent support was peeled off, and developed by immersion in a 1% by weight sodium carbonate (N a 2 C03) aqueous solution with shaking for 3 minutes at 25°C, resulting in a line width of 75 μm.
Clear images with a resolution of up to
ついで、この硬化画像を有する基板を、りん酸:硝酸:
酢酸:水の容積比が20:1:0.5ニアの混合水溶液
からなるエツチング液に30秒間浸漬し、硬化画像をマ
スク材として露出する導電体層をエツチング除去した。The substrate with this cured image is then treated with phosphoric acid: nitric acid:
It was immersed for 30 seconds in an etching solution consisting of a mixed aqueous solution with a volume ratio of acetic acid:water of 20:1:0.5, and the exposed conductor layer was etched away using the cured image as a mask material.
その後、10分間水洗したのち、100℃の熱風乾燥機
にて加熱乾燥した。このエツチング処理および水洗処理
中、硬化画像は剥がれることなく非常に良好な耐性を示
した。After that, it was washed with water for 10 minutes, and then heated and dried in a hot air dryer at 100°C. During this etching and water washing process, the cured image did not peel off and showed very good resistance.
最後に、3重量%の水酸化ナトリウム水溶液にて処理し
て硬化画像を除去し、さらに水洗乾燥することにより、
絶縁ベース上にパターン化導電体層を有する回路板を得
た。このときの硬化画像の除去性は良好で、上記水溶液
によって簡単にかつ完全に除去できた。Finally, the cured image is removed by treatment with a 3% by weight aqueous sodium hydroxide solution, and further washed with water and dried.
A circuit board was obtained having a patterned conductor layer on an insulating base. The removability of the cured image at this time was good and could be easily and completely removed using the aqueous solution.
比較例1
感光性樹脂層を形成するための組成物中に4・4′・4
“−メチリディン−トリス(N−N−ジエチル−3−メ
チルベンゼンアミン)2部を配合しなかった以外は、実
施例1と同様にして画像形成材料を得、これを用いて実
施例1と同様にして現像および回路形成を試みた。その
結果、現像については実施例1とほとんど変わらなかっ
たが、エツチング処理後水洗する際に硬化画像が剥がれ
てしまった。Comparative Example 1 4, 4', 4 in the composition for forming a photosensitive resin layer
An image-forming material was obtained in the same manner as in Example 1, except that 2 parts of "-methylidine-tris (N-N-diethyl-3-methylbenzenamine) was not blended, and this was used in the same manner as in Example 1. As a result, development was almost the same as in Example 1, but the cured image peeled off when washed with water after etching.
実施例2
感光性樹脂層を形成するための組成物における2・4−
ジエチルチオキサントン8部および4・4・4“−メチ
リディン−トリス(N−N−ジエチル−3−メチルベン
ゼンアミン)2部の代わりに、2・2−ジメトキシ−2
−フェニルアセトフェノン(光重合開始剤)4部および
4・4′・4″−メチリディン−トリス(N−N−ジメ
チルベンゼンアミン)5部を用いた以外は、実施例1と
同様にして画像形成材料を得、これを用いて実施例1と
同様にして現像および回路形成を試みた。その結果、現
像段階では線幅125Pまでの解像度を有する鮮明な画
像を形成でき、また回路形成のためのエツチング処理や
その後の水洗処理中、硬化画像は剥がれることなく良好
な耐性を示し、最終的に絶縁ベース上に鮮明なパターン
化導電体層を有する回路板を得ることができた。Example 2 2.4- in the composition for forming a photosensitive resin layer
2,2-dimethoxy-2 instead of 8 parts of diethylthioxanthone and 2 parts of 4,4,4"-methylidine-tris(N-N-diethyl-3-methylbenzenamine)
The image forming material was prepared in the same manner as in Example 1, except that 4 parts of -phenylacetophenone (photopolymerization initiator) and 5 parts of 4,4',4''-methylidine-tris (N-N-dimethylbenzenamine) were used. Using this, development and circuit formation were attempted in the same manner as in Example 1.As a result, a clear image with a resolution of up to 125P line width could be formed in the development stage, and etching for circuit formation was possible. During processing and subsequent water washing, the cured image showed good resistance without peeling, and finally a circuit board with a sharply patterned conductive layer on an insulating base could be obtained.
比較例2
感光性樹脂層を形成するための組成物中に4・4・4″
−メチリディン−トリス(N−N−ジメチルベンゼンア
ミン)5部を配合しなかった以外は、実施例2と同様に
して画像形成材料を得、これを用いて実施例1と同様に
して現像および回路形成を試みた。その結果、現像につ
いては実施例2とほとんど変わらなかったが、回路形成
のためのエツチング処理中に硬化画像が剥がれてしまっ
た。Comparative Example 2 4.4.4'' in the composition for forming the photosensitive resin layer
An image forming material was obtained in the same manner as in Example 2, except that 5 parts of -methylidine-tris (N-N-dimethylbenzenamine) was not blended, and using this image-forming material was developed and processed in the same manner as in Example 1. I tried to form it. As a result, the development was almost the same as in Example 2, but the cured image peeled off during the etching process for circuit formation.
実施例3
2−インプロピルチオキサントン 10部ビ
クトリアピュアーブルー 〇、OS部ハ
イドロキノン 0.04部感光性
樹脂層を形成するための組成物として上記の組成物を用
いるようにした以外は、実施例1と同様にして画像形成
材料を得、これを用いて実施例1と同様にして現像およ
び回路形成を試みた。Example 3 2-inpropylthioxanthone 10 parts Victoria Pure Blue ○, OS part Hydroquinone 0.04 parts Example 1 except that the above composition was used as the composition for forming the photosensitive resin layer. An image forming material was obtained in the same manner, and using this material, development and circuit formation were attempted in the same manner as in Example 1.
その結果、現像段階では線幅100μまでの解像度を有
する鮮明な画像を形成でき、また回路形成のためのエツ
チング処理やその後の水洗処理中、硬化画像は剥がれる
ことなく良好な耐性を示し、最終的に絶縁ベース上に鮮
明なパターン化導電体層を有する回路板を得ることがで
きた。As a result, it is possible to form a clear image with a resolution of up to 100 μm in line width in the development stage, and the cured image shows good resistance without peeling during the etching process for circuit formation and the subsequent water washing process, and the final It was possible to obtain a circuit board with a sharply patterned conductive layer on an insulating base.
比較例3
感光性樹脂層を形成するための組成物中に4・4′・4
“−メチリディン−トリス(N−N−ジメチル−3−エ
チルベンゼンアミン)5部を配合しなかった以外は、実
施例3と同様にして画像形成材料を得、これを用いて実
施例1と同様にして現像および回路形成を試みた。その
結果、現像については実施例3とほとんど変わらなかっ
たが、回路形成のためのエツチング処理中に硬化画像が
流出し剥がれてしまった。Comparative Example 3 4, 4', 4 in the composition for forming a photosensitive resin layer
An image forming material was obtained in the same manner as in Example 3, except that 5 parts of "-methylidine-tris(N-N-dimethyl-3-ethylbenzenamine) was not blended, and the same procedure as in Example 1 was carried out using this material. As a result, the development was almost the same as in Example 3, but the cured image leaked out and peeled off during the etching process for forming the circuit.
Claims (3)
素、メチル基またはエチル基である) で表わされる化合物を含む感光性樹脂層を設けてなる画
像形成材料。(1) On a transparent support, the following formula (I); ▲There are mathematical formulas, chemical formulas, tables, etc.▼...(I) (In the formula, R_1 is a methyl group or ethyl group, R_2 is hydrogen or a methyl group. or an ethyl group).
ともに皮膜形成性高分子物質とエチレン性不飽和重合性
化合物と光重合開始剤とを必須成分として含むものであ
り、かつ光重合開始剤がつぎの式(II);▲数式、化学
式、表等があります▼・・・(III) (式中、R_3は水素、メチル基、エチル基、イソプロ
ピル基または塩素、R_4は水素、メチル基またはエチ
ル基である) で表わされる化合物を含む特許請求の範囲第(1)項記
載の画像形成材料。(2) The photosensitive resin layer contains the compound represented by formula (I), a film-forming polymeric substance, an ethylenically unsaturated polymerizable compound, and a photopolymerization initiator as essential components, and is capable of initiating photopolymerization. The agent is the following formula (II); ▲ There are mathematical formulas, chemical formulas, tables, etc. ▼... (III) (In the formula, R_3 is hydrogen, methyl group, ethyl group, isopropyl group, or chlorine, R_4 is hydrogen, methyl group or an ethyl group) The image forming material according to claim (1).
エステル共重合体を含む特許請求の範囲第(2)項記載
の画像形成材料。(3) The image forming material according to claim (2), wherein the film-forming polymeric substance comprises a styrene-maleic acid half ester copolymer.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP26929186A JPS63123038A (en) | 1986-11-12 | 1986-11-12 | Image forming material |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP26929186A JPS63123038A (en) | 1986-11-12 | 1986-11-12 | Image forming material |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63123038A true JPS63123038A (en) | 1988-05-26 |
Family
ID=17470301
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP26929186A Pending JPS63123038A (en) | 1986-11-12 | 1986-11-12 | Image forming material |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63123038A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01108543A (en) * | 1987-10-22 | 1989-04-25 | Fuji Photo Film Co Ltd | Positive type photoresist composition |
JPH08248634A (en) * | 1995-02-10 | 1996-09-27 | Morton Thiokol Inc | New polymer and composition for formation of optical image containing it |
WO2005100472A1 (en) * | 2004-03-31 | 2005-10-27 | Nichiban Company Limited | Photo-radical-curable resin composition containing epoxy resin |
-
1986
- 1986-11-12 JP JP26929186A patent/JPS63123038A/en active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01108543A (en) * | 1987-10-22 | 1989-04-25 | Fuji Photo Film Co Ltd | Positive type photoresist composition |
JPH08248634A (en) * | 1995-02-10 | 1996-09-27 | Morton Thiokol Inc | New polymer and composition for formation of optical image containing it |
WO2005100472A1 (en) * | 2004-03-31 | 2005-10-27 | Nichiban Company Limited | Photo-radical-curable resin composition containing epoxy resin |
JPWO2005100472A1 (en) * | 2004-03-31 | 2008-03-06 | ニチバン株式会社 | Photo-radical curable resin composition containing epoxy resin |
JP4681542B2 (en) * | 2004-03-31 | 2011-05-11 | ニチバン株式会社 | Photo-radical curable resin composition containing epoxy resin |
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