JPS63121763A - Instrument for measuring characteristics of avalanche photodiode - Google Patents
Instrument for measuring characteristics of avalanche photodiodeInfo
- Publication number
- JPS63121763A JPS63121763A JP26820886A JP26820886A JPS63121763A JP S63121763 A JPS63121763 A JP S63121763A JP 26820886 A JP26820886 A JP 26820886A JP 26820886 A JP26820886 A JP 26820886A JP S63121763 A JPS63121763 A JP S63121763A
- Authority
- JP
- Japan
- Prior art keywords
- avalanche photodiode
- measured
- voltage
- light source
- current
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000015556 catabolic process Effects 0.000 claims abstract description 15
- 238000005259 measurement Methods 0.000 claims description 7
- 230000003287 optical effect Effects 0.000 abstract description 7
- 230000003321 amplification Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000003199 nucleic acid amplification method Methods 0.000 description 2
- 101100027969 Caenorhabditis elegans old-1 gene Proteins 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
- G01R31/2607—Circuits therefor
- G01R31/2632—Circuits therefor for testing diodes
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、アバランシエ・ホトダイオードの特性測定に
関し、特に降伏電圧の温度係数の測定装置に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to measuring the characteristics of an avalanche photodiode, and more particularly to a device for measuring the temperature coefficient of breakdown voltage.
アバランシエ・ホトダイオードは降伏電圧近傍にバイア
ス電圧を印加し、PN接合におけるキャリアのなだれ効
果を利用するため、温度によシ変化する降伏電圧の温度
係数は重要なパラメータである。Since an avalanche photodiode applies a bias voltage near the breakdown voltage and utilizes the carrier avalanche effect in the PN junction, the temperature coefficient of the breakdown voltage, which changes with temperature, is an important parameter.
従来、この種の測定は、第3図のように被測定用アバラ
ンシエ・ホトダイオード金温度を変えることのできる恒
温槽17に入れ直流電源14電圧計15、電流計16よ
シ降伏電圧の測定回路より構成する測定装置を使用して
いた。この装置では恒温槽内の温度を変え、例えばT1
(’C)、T2 (℃)の温度における降伏電圧V(B
R)R1、V(nu)msを測定し、このとき降伏電圧
の温度係数βは(1)式のように求めた。Conventionally, this type of measurement has been carried out by placing the avalanche photodiode to be measured in a constant temperature bath 17 where the gold temperature can be changed, and using a DC power supply 14, a voltmeter 15, an ammeter 16, and a breakdown voltage measurement circuit as shown in Fig. 3. A measuring device was used. This device changes the temperature inside the thermostat, for example T1.
('C), breakdown voltage V(B
R) R1 and V(nu)ms were measured, and at this time, the temperature coefficient β of the breakdown voltage was determined as shown in equation (1).
上述した従来の測定装置は、2点以上の温度で降伏電圧
を測定しなければならないため、恒温槽内の温度を変え
る必要がある。このため、測定作業においては、測定時
間が長くなるという欠点がある。Since the conventional measuring device described above must measure the breakdown voltage at two or more temperatures, it is necessary to change the temperature within the thermostatic oven. Therefore, in the measurement work, there is a drawback that the measurement time becomes long.
この目的を達成するために、本発明の測定装置は、出力
の可変できる光源と、被測定用アバランシエ・ホトダイ
オードのバイアス電源とその動作電流および動作電圧を
演出する装置を有している。To achieve this objective, the measuring device of the present invention includes a light source with variable output, a bias power source for the avalanche photodiode to be measured, and a device for controlling its operating current and operating voltage.
本発明による装置の動作原理を第1図の一実施例で詳細
に説明する。The operating principle of the device according to the invention will be explained in detail with reference to an embodiment in FIG.
第1図は、本発明の一実施例全売す。 FIG. 1 shows an embodiment of the present invention.
1は、被測定用アバランシェ−ホトダイオードで、2は
そのバイアス用直fit源である。アバランシエ・ホト
ダイオード1の端子間電圧と電流は、それぞれ電圧計3
、電流計4で測定できる。5は光源で、その出力はPi
とP2に可変できるものとする。ここで、PI<P2と
する。1 is an avalanche photodiode to be measured, and 2 is a bias direct fit source thereof. The voltage and current across the terminals of avalanche photodiode 1 are measured using voltmeter 3, respectively.
, can be measured with ammeter 4. 5 is a light source whose output is Pi
and P2. Here, it is assumed that PI<P2.
いま、光源5の光出力がPl とし、被測定用アバラン
シエ・ホトダイオードのバイアス電圧が増倍領域である
VRlに設定されているものとする。Assume now that the optical output of the light source 5 is Pl, and the bias voltage of the avalanche photodiode to be measured is set to VRl, which is the multiplication region.
このときの増倍率をMlとする。なお、増倍率M1は次
のようにして測定できる。The multiplication factor at this time is Ml. Note that the multiplication factor M1 can be measured as follows.
バイアス電圧VRIにおける暗電流と光源による光が入
射したときの電流t−電流計4で計シ、それぞれIdl
、Ipt とする。次に非増倍領域になるようにバイ
アス電圧を変え■ROとする。このときの暗電流と光が
入射したときの電流全同様に電流計4で計り、それぞれ
Ido、Ipoとする。増倍率M1は(2)式で求めら
れる。Dark current at bias voltage VRI and current t when light from the light source is incident - measured by ammeter 4, respectively Idl
, Ipt. Next, change the bias voltage so that it is in the non-multiplying region, and set it to RO. The dark current at this time and the current when light is incident are all measured using an ammeter 4, and are designated as Ido and Ipo, respectively. The multiplication factor M1 is determined by equation (2).
増倍率M1終了後光源5の光出力をP2とし、上記と同
様にバイアス電圧VRIにおける増倍率M2を求める。After the multiplication factor M1 is completed, the optical output of the light source 5 is set as P2, and the multiplication factor M2 at the bias voltage VRI is determined in the same manner as above.
すなわちM2は(3)式のようになる。That is, M2 becomes as shown in equation (3).
ここでIp2とId2はそれぞれ、光源による光が入射
したとき被測定用アバランシエ・ホトダイオードに流れ
る電流と、バイアス電圧VRI における暗電流であ
る。Here, Ip2 and Id2 are the current flowing through the avalanche photodiode to be measured when light from the light source is incident, and the dark current at the bias voltage VRI, respectively.
以上の条件下では一般にPl<P2よj)、Ipt<I
P!であるため、MlとM2 の関係は次のようになる
。Ipl<Ipz より被測定用アバランシエ・ホト
ダイオードの内部温度は光源5の光出力がP2の場合の
方が太さい。このため、内部温度が同じであれば増幅率
にFiはとんど差が見られないが上記条件下では内温温
度に差が発生するため、降伏電圧も高くな多動作ポイン
トが移動する。すなわちMlO方がM2より大きい値を
示す。Under the above conditions, generally Pl<P2 j), Ipt<I
P! Therefore, the relationship between Ml and M2 is as follows. From Ipl<Ipz, the internal temperature of the avalanche photodiode to be measured is greater when the optical output of the light source 5 is P2. Therefore, if the internal temperature is the same, there is almost no difference in the amplification factor Fi, but under the above conditions, a difference occurs in the internal temperature, so the multi-operation point where the breakdown voltage is high shifts. That is, MlO shows a larger value than M2.
降伏電圧の変動ΔV(BR)Rは(4)式にて表示でき
る。The breakdown voltage variation ΔV(BR)R can be expressed by equation (4).
Δ■(旧1)R=β−ΔT・V(BR)R・・・(4J
ここで、βは降伏電圧の温度係数、
ΔTは内部上昇温度、
V(an)u は降伏電圧である。Δ■ (old 1) R = β - ΔT・V (BR) R... (4J
Here, β is the temperature coefficient of breakdown voltage, ΔT is internal temperature rise, and V(an)u is breakdown voltage.
したがって、温度上昇分だけバイアス電圧を変化させる
ことによシ、光源の光出力をPlとP2に変えたときの
増倍率を等しくすることができる。Therefore, by changing the bias voltage by the amount of temperature rise, it is possible to equalize the multiplication factors when the optical output of the light source is changed to Pl and P2.
すなわち、増倍率Ml測定後光源の光出力P2における
増倍率がMlになるようにバイアス電圧全調整すること
により降伏電圧の温度特性が求められる。(5)式にそ
の関係を示す。That is, after measuring the multiplication factor Ml, the temperature characteristics of the breakdown voltage are determined by fully adjusting the bias voltage so that the multiplication factor at the optical output P2 of the light source becomes Ml. The relationship is shown in equation (5).
ただし、ΔVn = VB2− VRIVntキ光源光
出力pgにおけるバイアス電圧
J T =Rth −VB2− (Ipz−Ipt)’
pm2=バイアス電圧■R2において光源の出力P2に
おける電流
ととでpth は被測定用アバランシェホトダイオー
ドの熱抵抗であらかじめ測定しておくものとする。However, ΔVn = VB2- VRIVntki Bias voltage at light source light output pg J T = Rth -VB2- (Ipz-Ipt)'
pm2=bias voltage (2) At R2, the current at the output P2 of the light source and pth shall be measured in advance using the thermal resistance of the avalanche photodiode to be measured.
第2図り本発明の実施例2である。被測定用アバ2ンシ
エホトダイオード6に直流電源7よシバイアスを印加す
る。このアバランシェホトダイオードに流れる電流と電
圧はそれぞれ電流計9と電圧計8で測定する。光源10
の出力は出力P!とP2が繰り返し時間とともに変化す
る。この繰り6一
返し周波数はアバ2ンシエホトダイオードの熱定数よシ
充分長いものとする。この光源によシ、アバランシェホ
トダイオードに流れる電流も入射光とともに変化しこの
電流はオシロスコープ11で測定する。なお抵抗12は
電流検出力用抵抗である。測定方法は実施例1と同じで
ある。この実施例では、光源の出力が変化しているため
、光源の光出力を切換える必要がない利点がある。The second diagram is a second embodiment of the present invention. A bias voltage is applied from the DC power supply 7 to the avalanche photodiode 6 to be measured. The current and voltage flowing through this avalanche photodiode are measured by an ammeter 9 and a voltmeter 8, respectively. light source 10
The output of is the output P! and P2 change with repetition time. It is assumed that this repetition frequency is sufficiently longer than the thermal constant of the aberration photodiode. Due to this light source, the current flowing through the avalanche photodiode also changes with the incident light, and this current is measured with an oscilloscope 11. Note that the resistor 12 is a resistor for current detection force. The measurement method is the same as in Example 1. In this embodiment, since the output of the light source is changed, there is an advantage that there is no need to switch the light output of the light source.
以上説明したように本発明は、被測定用アバランシェホ
トダイオードへの入射光量の変化によシ増幅率とバイア
ス電圧との関係を利用し、測定が短時間で可能となる効
果がある。As described above, the present invention has the advantage that measurement can be performed in a short time by utilizing the relationship between the amplification factor and the bias voltage by changing the amount of light incident on the avalanche photodiode to be measured.
第1図は本発明の一実施例を、第2図は実施例2を示す
。第3図は従来の測定装置を示す。
1.6.13・・・・・・アバランシェホトダイオード
、2.7.14・・団・直流電源、3,8,15°°川
°電圧計、4,9.16・・・・・・電流計、5.10
・・・・・・光源、11・・・・・・オシロスコープ、
12・・・・・・抵抗、17・・・・・・恒温槽。FIG. 1 shows one embodiment of the present invention, and FIG. 2 shows a second embodiment. FIG. 3 shows a conventional measuring device. 1.6.13... Avalanche photodiode, 2.7.14... DC power supply, 3, 8, 15°° voltmeter, 4, 9.16... Current Total, 5.10
... light source, 11 ... oscilloscope,
12...Resistance, 17...Thermostat.
Claims (1)
電源と該アバランシエ・ホトダイオードに入射させ、し
かも出力の可変できる光源および動作状態を測定するた
めの電圧、電流測定装置を有し、前記アバランシエ・ホ
トダイオードの降伏電圧温度係数の測定を可能としたア
バランシエ・ホトダイオードの特性測定装置。It has a bias DC power supply for the avalanche photodiode to be measured, a light source that is incident on the avalanche photodiode and whose output can be varied, and a voltage and current measuring device for measuring the operating state, and the breakdown voltage temperature of the avalanche photodiode. An avalanche photodiode characteristic measurement device that enables the measurement of coefficients.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP26820886A JPS63121763A (en) | 1986-11-10 | 1986-11-10 | Instrument for measuring characteristics of avalanche photodiode |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP26820886A JPS63121763A (en) | 1986-11-10 | 1986-11-10 | Instrument for measuring characteristics of avalanche photodiode |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63121763A true JPS63121763A (en) | 1988-05-25 |
Family
ID=17455422
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP26820886A Pending JPS63121763A (en) | 1986-11-10 | 1986-11-10 | Instrument for measuring characteristics of avalanche photodiode |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63121763A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103389451A (en) * | 2013-07-24 | 2013-11-13 | 广东瑞谷光纤通信有限公司 | Testing method and testing device of avalanche photodiode |
CN104199502A (en) * | 2014-09-03 | 2014-12-10 | 重庆航伟光电科技有限公司 | Bias voltage method of Si-APD |
CN104198909A (en) * | 2014-09-15 | 2014-12-10 | 华东光电集成器件研究所 | Mesa avalanche diode core area measuring method |
CN108333495A (en) * | 2018-03-01 | 2018-07-27 | 国家电投集团西安太阳能电力有限公司 | A kind of bypass diode working state detecting method of photovoltaic component terminal box |
CN112578253A (en) * | 2020-11-23 | 2021-03-30 | 深圳市迅特通信技术股份有限公司 | Multi-channel chip aging system and method |
-
1986
- 1986-11-10 JP JP26820886A patent/JPS63121763A/en active Pending
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103389451A (en) * | 2013-07-24 | 2013-11-13 | 广东瑞谷光纤通信有限公司 | Testing method and testing device of avalanche photodiode |
CN104199502A (en) * | 2014-09-03 | 2014-12-10 | 重庆航伟光电科技有限公司 | Bias voltage method of Si-APD |
CN104199502B (en) * | 2014-09-03 | 2016-08-31 | 重庆航伟光电科技有限公司 | A kind of bias method of Si-APD |
CN104198909A (en) * | 2014-09-15 | 2014-12-10 | 华东光电集成器件研究所 | Mesa avalanche diode core area measuring method |
CN108333495A (en) * | 2018-03-01 | 2018-07-27 | 国家电投集团西安太阳能电力有限公司 | A kind of bypass diode working state detecting method of photovoltaic component terminal box |
CN108333495B (en) * | 2018-03-01 | 2020-11-03 | 国家电投集团西安太阳能电力有限公司 | Method for detecting working state of bypass diode of photovoltaic module junction box |
CN112578253A (en) * | 2020-11-23 | 2021-03-30 | 深圳市迅特通信技术股份有限公司 | Multi-channel chip aging system and method |
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