JPH01235820A - Optically measuring instrument - Google Patents
Optically measuring instrumentInfo
- Publication number
- JPH01235820A JPH01235820A JP63062357A JP6235788A JPH01235820A JP H01235820 A JPH01235820 A JP H01235820A JP 63062357 A JP63062357 A JP 63062357A JP 6235788 A JP6235788 A JP 6235788A JP H01235820 A JPH01235820 A JP H01235820A
- Authority
- JP
- Japan
- Prior art keywords
- output
- temp
- cooling
- detecting element
- detection element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001816 cooling Methods 0.000 claims abstract description 22
- 238000001514 detection method Methods 0.000 claims description 24
- 230000003287 optical effect Effects 0.000 claims description 4
- 239000003990 capacitor Substances 0.000 abstract description 3
- 238000006243 chemical reaction Methods 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
Landscapes
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Radiation Pyrometers (AREA)
Abstract
Description
【発明の詳細な説明】
［産業上の利用分野］
この発明は、被測定対象からの放射エネルギーを検出し
て温度等を測定する光学的測定装置に関するものである
。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to an optical measuring device that measures temperature and the like by detecting radiant energy from an object to be measured.
［従来の技術］
従来、放射エネルギーを検出する検出素子の感度を上げ
るために、素子を冷却する方法がとられている。[Prior Art] Conventionally, in order to increase the sensitivity of a detection element that detects radiant energy, a method of cooling the element has been used.
たとえば、第４図で示すように、検出素子１を基台３上
のペルチェ素子等の電子冷却素子２の冷却面に設けて同
一パッケージ内に封入し、さらにサーミスタ等の温度検
出素子４で素子冷却面の温度を測定し、その出力ｅｔｉ
ｆｉ ｐ定値ａＳと一致するよう電子冷却素子２を制御
し、検出素子１の温度を一定としている。For example, as shown in FIG. 4, a detection element 1 is provided on the cooling surface of an electronic cooling element 2 such as a Peltier element on a base 3 and sealed in the same package, and a temperature detection element 4 such as a thermistor is further mounted on the cooling surface of an electronic cooling element 2 such as a Peltier element on a base 3. Measure the temperature of the cooling surface and its output eti
The electronic cooling element 2 is controlled so as to match the fi p fixed value aS, and the temperature of the detection element 1 is kept constant.
［この発明が解決しようとする課題〕
温度検出素子４は、電子冷却素子２の冷却面の検出素子
１の近くに設けるのが望ましいのであるが入射光の影響
を受けて誤差をＪＲさやすい。この除光のための手段を
設けると装置がＷ！雑なものとなる。従って、通常第４
図のように電子冷却素子２の側面に温度検出素子４を設
けるのであるが、検出素子１の温度と温［差があり、特
に同温が変化した場合、追いつかず誤差が大きくなる問
題点がある。[Problems to be Solved by the Invention] Although it is desirable to provide the temperature detection element 4 near the detection element 1 on the cooling surface of the electronic cooling element 2, it is susceptible to errors due to the influence of incident light. Providing a means for removing light will make the device W! It becomes sloppy. Therefore, usually the fourth
As shown in the figure, a temperature detection element 4 is provided on the side of the thermoelectric cooling element 2, but there is a difference between the temperature of the detection element 1 and the temperature, and there is a problem that, especially when the same temperature changes, it cannot catch up and the error increases. be.
この発明の目的は、以上の点に鑑み、素子自身の暗抵抗
の温度特性を利用して、電子冷却素子を制御し、安定な
温度制御を可能とした光学的測定ＭＡ置を提供すること
である。In view of the above points, an object of the present invention is to provide an optical measurement MA device that controls a thermoelectric cooling element by utilizing the temperature characteristics of the dark resistance of the element itself, and enables stable temperature control. be.
［課題を解決するための手段］
この発明は、検出素子自体の出力に基き、制御手段によ
り電子冷却素子を制御し、検出素子温度を一定とした光
学的測定装置である。[Means for Solving the Problems] The present invention is an optical measuring device in which the temperature of the detection element is kept constant by controlling the electronic cooling element by means of a control means based on the output of the detection element itself.
［実施例］
第１図は、この発明の一実施例を示す構成説明図で、第
４図と同一符号は同等の構成要素を示す。[Embodiment] FIG. 1 is a configuration explanatory diagram showing an embodiment of the present invention, and the same reference numerals as in FIG. 4 indicate the same components.
図において、チョッパ６でチョッピングされた断続光は
、ｐｂ ｓ、ｐｂ ｓｅ等の検出素子１に入射し、この
抵抗Ｒ１の検出素子１と抵抗Ｒｂの負荷抵抗１０は、直
列接続され、±ｖｂの電源でハーフブリッジを構成し、
その中点の電圧Ｖａが演算増幅器Ａ１を用いたバッファ
回路７に入力しインピーダンス変換される。バッフ７回
路７の第２図＜ａ＞の直流の出力は、制御手段５で設定
値ｅｓと比較され、検出素子１を冷却する電子冷却素子
２に流れる電流を制御し、検出素子１の出力Ｖａを設定
１ｅｅｓに一致させ、検出素子１の温度を一定とする。In the figure, the intermittent light chopped by the chopper 6 is incident on the detection element 1 such as PB S, PB SE, etc., and the detection element 1 of the resistor R1 and the load resistor 10 of the resistor Rb are connected in series, and the Configure a half-bridge with the power supply,
The voltage Va at the midpoint is input to a buffer circuit 7 using an operational amplifier A1, and the impedance is converted. The DC output of the buffer 7 circuit 7 shown in FIG. Va is made to match the setting of 1ees, and the temperature of the detection element 1 is kept constant.
他方、バッファ回路７の出力は、コンデンサＣで直流分
をカットして第２図（ｂ）の交流分を取り出し、測定手
段８で、この交流分の出力の大きさから、入射光の温度
等を演算、測定する。On the other hand, the DC component of the output of the buffer circuit 7 is cut by a capacitor C to extract the AC component shown in FIG. Calculate and measure.
つまり、第３図Ｂで示すように、検出素子１は、光が来
ない場合も、数ＭΩ程度の暗抵抗をもち、これはＷＩｆ
ｆＴにより変化する。そして、光が来ると、その大きさ
により第３図Ａｔ、Δ２、・・・のように変化する。そ
の変化分は数Ω程度で暗抵抗力と比べ小さいため、この
暗抵抗力の電圧にほぼ対応したバッファ回路７の第２図
（ａ ）の直流分出力により一１制御手段５で電子冷却
素子２を制御し、その変化分は、第２図（ｂ）のように
交流出力として得られるので、これより測定手段８で温
度等を測定する。さらに、チョッパと同期した信号を取
り出し、暗抵抗に比例した直流信号を取り出すことによ
り、入射光分の誤差をなくすことができ高精度化が図れ
る。In other words, as shown in FIG. 3B, the detection element 1 has a dark resistance of several MΩ even when no light comes, and this is WIf
Varies depending on fT. When the light comes, it changes as shown in Fig. 3, At, Δ2, . . . depending on its size. Since the amount of change is about several ohms, which is small compared to the dark resistance force, the control means 5 controls the electronic cooling element by the direct current output of the buffer circuit 7 shown in FIG. 2, and the change thereof is obtained as an alternating current output as shown in FIG. Furthermore, by extracting a signal synchronized with the chopper and extracting a DC signal proportional to the dark resistance, errors caused by the incident light can be eliminated and high accuracy can be achieved.
［発明の効果］
以上述べたように、この発明は、検出素子自身の明抵抗
成分を利用して電子冷却素子を制御し、検出素子の温度
を一定としているので、特別な温度検出素子を設ける必
要がなく、高精度に、安定した検出素子の温度１ｉ１１
６０が可能となる。[Effects of the Invention] As described above, the present invention uses the light resistance component of the detection element itself to control the electronic cooling element and keep the temperature of the detection element constant, so it is not necessary to provide a special temperature detection element. No need for high precision, stable detection element temperature 1i11
60 is possible.
第１図は、この発明の一実施例を示す構成説明図、第２
図、第３図は、動作説明図、第４図は、従来例を示す構
成説明図である。
１・・・検出素子、２・・・電子冷却素子、３・・・基
板、４・・・温度検出素子、５・・・制御手段、６・・
・チョッパ、７・・・バッファ回路、８・・・測定手段
、Ｃ・・・コンデンサ
特許出願人 株式会社 チノ′−FIG. 1 is a configuration explanatory diagram showing one embodiment of the present invention, and FIG.
3 are operation explanatory diagrams, and FIG. 4 is a configuration explanatory diagram showing a conventional example. DESCRIPTION OF SYMBOLS 1... Detection element, 2... Electronic cooling element, 3... Substrate, 4... Temperature detection element, 5... Control means, 6...
・Chopper, 7...Buffer circuit, 8...Measuring means, C...Capacitor Patent applicant Chino' Co., Ltd.
Claims (1)
に電子冷却素子で冷却される検出素子と、この検出素子
の出力と設定値とを比較して両信号が一致するように出
力信号を発生して前記電子冷却素子を制御し検出素子を
一定温度に冷却する制御手段とを備えた光学的測定装置
。 ２、前記検出素子の出力のうち交流分を測定する測定手
段を備えた請求項１記載の光学的測定装置。[Claims] 1. A detection element that detects incident light intermittently by a chopper and is cooled by an electronic cooling element, and compares the output of this detection element with a set value so that both signals match. and control means for generating an output signal to control the electronic cooling element and cooling the detection element to a constant temperature. 2. The optical measuring device according to claim 1, further comprising measuring means for measuring an alternating current component of the output of the detection element.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63062357A JPH01235820A (en) | 1988-03-15 | 1988-03-15 | Optically measuring instrument |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63062357A JPH01235820A (en) | 1988-03-15 | 1988-03-15 | Optically measuring instrument |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01235820A true JPH01235820A (en) | 1989-09-20 |
| JPH0571890B2 JPH0571890B2 (en) | 1993-10-08 |
Family
ID=13197783
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63062357A Granted JPH01235820A (en) | 1988-03-15 | 1988-03-15 | Optically measuring instrument |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01235820A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06201474A (en) * | 1990-12-07 | 1994-07-19 | Ag Processing Technol Inc | Bi-channel radiation detector |
| JP2012255730A (en) * | 2011-06-09 | 2012-12-27 | Azbil Corp | Flame sensor |
-
1988
- 1988-03-15 JP JP63062357A patent/JPH01235820A/en active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06201474A (en) * | 1990-12-07 | 1994-07-19 | Ag Processing Technol Inc | Bi-channel radiation detector |
| JP2012255730A (en) * | 2011-06-09 | 2012-12-27 | Azbil Corp | Flame sensor |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0571890B2 (en) | 1993-10-08 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |