JPS63121440U - - Google Patents

Info

Publication number
JPS63121440U
JPS63121440U JP1321187U JP1321187U JPS63121440U JP S63121440 U JPS63121440 U JP S63121440U JP 1321187 U JP1321187 U JP 1321187U JP 1321187 U JP1321187 U JP 1321187U JP S63121440 U JPS63121440 U JP S63121440U
Authority
JP
Japan
Prior art keywords
chamber
wafer
drying
turntable
bearing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1321187U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1321187U priority Critical patent/JPS63121440U/ja
Publication of JPS63121440U publication Critical patent/JPS63121440U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Solid Materials (AREA)
  • Centrifugal Separators (AREA)
JP1321187U 1987-01-31 1987-01-31 Pending JPS63121440U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1321187U JPS63121440U (enrdf_load_stackoverflow) 1987-01-31 1987-01-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1321187U JPS63121440U (enrdf_load_stackoverflow) 1987-01-31 1987-01-31

Publications (1)

Publication Number Publication Date
JPS63121440U true JPS63121440U (enrdf_load_stackoverflow) 1988-08-05

Family

ID=30802058

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1321187U Pending JPS63121440U (enrdf_load_stackoverflow) 1987-01-31 1987-01-31

Country Status (1)

Country Link
JP (1) JPS63121440U (enrdf_load_stackoverflow)

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