JPS63110030U - - Google Patents

Info

Publication number
JPS63110030U
JPS63110030U JP164987U JP164987U JPS63110030U JP S63110030 U JPS63110030 U JP S63110030U JP 164987 U JP164987 U JP 164987U JP 164987 U JP164987 U JP 164987U JP S63110030 U JPS63110030 U JP S63110030U
Authority
JP
Japan
Prior art keywords
gas
filter
semiconductor material
casing body
port
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP164987U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP164987U priority Critical patent/JPS63110030U/ja
Publication of JPS63110030U publication Critical patent/JPS63110030U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Centrifugal Separators (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)
  • Drying Of Solid Materials (AREA)
JP164987U 1987-01-09 1987-01-09 Pending JPS63110030U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP164987U JPS63110030U (enrdf_load_stackoverflow) 1987-01-09 1987-01-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP164987U JPS63110030U (enrdf_load_stackoverflow) 1987-01-09 1987-01-09

Publications (1)

Publication Number Publication Date
JPS63110030U true JPS63110030U (enrdf_load_stackoverflow) 1988-07-15

Family

ID=30779757

Family Applications (1)

Application Number Title Priority Date Filing Date
JP164987U Pending JPS63110030U (enrdf_load_stackoverflow) 1987-01-09 1987-01-09

Country Status (1)

Country Link
JP (1) JPS63110030U (enrdf_load_stackoverflow)

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