JPS6375943U - - Google Patents

Info

Publication number
JPS6375943U
JPS6375943U JP17076986U JP17076986U JPS6375943U JP S6375943 U JPS6375943 U JP S6375943U JP 17076986 U JP17076986 U JP 17076986U JP 17076986 U JP17076986 U JP 17076986U JP S6375943 U JPS6375943 U JP S6375943U
Authority
JP
Japan
Prior art keywords
process chamber
rotating shaft
disk
spindle
bearing part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17076986U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17076986U priority Critical patent/JPS6375943U/ja
Publication of JPS6375943U publication Critical patent/JPS6375943U/ja
Pending legal-status Critical Current

Links

JP17076986U 1986-11-06 1986-11-06 Pending JPS6375943U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17076986U JPS6375943U (enrdf_load_stackoverflow) 1986-11-06 1986-11-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17076986U JPS6375943U (enrdf_load_stackoverflow) 1986-11-06 1986-11-06

Publications (1)

Publication Number Publication Date
JPS6375943U true JPS6375943U (enrdf_load_stackoverflow) 1988-05-20

Family

ID=31105791

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17076986U Pending JPS6375943U (enrdf_load_stackoverflow) 1986-11-06 1986-11-06

Country Status (1)

Country Link
JP (1) JPS6375943U (enrdf_load_stackoverflow)

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