JPH04747U - - Google Patents

Info

Publication number
JPH04747U
JPH04747U JP3959190U JP3959190U JPH04747U JP H04747 U JPH04747 U JP H04747U JP 3959190 U JP3959190 U JP 3959190U JP 3959190 U JP3959190 U JP 3959190U JP H04747 U JPH04747 U JP H04747U
Authority
JP
Japan
Prior art keywords
semiconductor wafer
drying apparatus
support
main body
piping
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3959190U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3959190U priority Critical patent/JPH04747U/ja
Publication of JPH04747U publication Critical patent/JPH04747U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP3959190U 1990-04-13 1990-04-13 Pending JPH04747U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3959190U JPH04747U (enrdf_load_stackoverflow) 1990-04-13 1990-04-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3959190U JPH04747U (enrdf_load_stackoverflow) 1990-04-13 1990-04-13

Publications (1)

Publication Number Publication Date
JPH04747U true JPH04747U (enrdf_load_stackoverflow) 1992-01-07

Family

ID=31548638

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3959190U Pending JPH04747U (enrdf_load_stackoverflow) 1990-04-13 1990-04-13

Country Status (1)

Country Link
JP (1) JPH04747U (enrdf_load_stackoverflow)

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