JPS6312143B2 - - Google Patents

Info

Publication number
JPS6312143B2
JPS6312143B2 JP54164728A JP16472879A JPS6312143B2 JP S6312143 B2 JPS6312143 B2 JP S6312143B2 JP 54164728 A JP54164728 A JP 54164728A JP 16472879 A JP16472879 A JP 16472879A JP S6312143 B2 JPS6312143 B2 JP S6312143B2
Authority
JP
Japan
Prior art keywords
etched
etching
ion
discharge
aluminum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54164728A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5687665A (en
Inventor
Haruo Okano
Yasuhiro Horiike
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP16472879A priority Critical patent/JPS5687665A/ja
Publication of JPS5687665A publication Critical patent/JPS5687665A/ja
Publication of JPS6312143B2 publication Critical patent/JPS6312143B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • ing And Chemical Polishing (AREA)
JP16472879A 1979-12-20 1979-12-20 Ion etching method Granted JPS5687665A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16472879A JPS5687665A (en) 1979-12-20 1979-12-20 Ion etching method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16472879A JPS5687665A (en) 1979-12-20 1979-12-20 Ion etching method

Publications (2)

Publication Number Publication Date
JPS5687665A JPS5687665A (en) 1981-07-16
JPS6312143B2 true JPS6312143B2 (enExample) 1988-03-17

Family

ID=15798764

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16472879A Granted JPS5687665A (en) 1979-12-20 1979-12-20 Ion etching method

Country Status (1)

Country Link
JP (1) JPS5687665A (enExample)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5812339B2 (ja) * 1975-08-13 1983-03-08 ニチデンバリアン カブシキガイシヤ イオンエツチングホウホウ
JPS5328530A (en) * 1976-08-30 1978-03-16 Hitachi Ltd Method of etching surfaces of solids

Also Published As

Publication number Publication date
JPS5687665A (en) 1981-07-16

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