JPS63121435U - - Google Patents
Info
- Publication number
- JPS63121435U JPS63121435U JP1150387U JP1150387U JPS63121435U JP S63121435 U JPS63121435 U JP S63121435U JP 1150387 U JP1150387 U JP 1150387U JP 1150387 U JP1150387 U JP 1150387U JP S63121435 U JPS63121435 U JP S63121435U
- Authority
- JP
- Japan
- Prior art keywords
- stop valve
- liquid
- closed
- storage section
- filter part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007788 liquid Substances 0.000 claims description 5
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Nozzles (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987011503U JPH0356040Y2 (en, 2012) | 1987-01-30 | 1987-01-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987011503U JPH0356040Y2 (en, 2012) | 1987-01-30 | 1987-01-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63121435U true JPS63121435U (en, 2012) | 1988-08-05 |
| JPH0356040Y2 JPH0356040Y2 (en, 2012) | 1991-12-16 |
Family
ID=30798779
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987011503U Expired JPH0356040Y2 (en, 2012) | 1987-01-30 | 1987-01-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0356040Y2 (en, 2012) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08131909A (ja) * | 1994-11-04 | 1996-05-28 | Dainippon Screen Mfg Co Ltd | 基板処理装置用処理液供給装置 |
| JP2018066010A (ja) * | 2017-11-24 | 2018-04-26 | 三菱ケミカル株式会社 | 半導体リソグラフィー用重合体の製造方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60158734U (ja) * | 1984-03-29 | 1985-10-22 | 大日本スクリ−ン製造株式会社 | 基板表面処理液供給装置 |
| JPS61198723A (ja) * | 1985-02-28 | 1986-09-03 | Toshiba Corp | レジスト塗布装置 |
-
1987
- 1987-01-30 JP JP1987011503U patent/JPH0356040Y2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60158734U (ja) * | 1984-03-29 | 1985-10-22 | 大日本スクリ−ン製造株式会社 | 基板表面処理液供給装置 |
| JPS61198723A (ja) * | 1985-02-28 | 1986-09-03 | Toshiba Corp | レジスト塗布装置 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08131909A (ja) * | 1994-11-04 | 1996-05-28 | Dainippon Screen Mfg Co Ltd | 基板処理装置用処理液供給装置 |
| JP2018066010A (ja) * | 2017-11-24 | 2018-04-26 | 三菱ケミカル株式会社 | 半導体リソグラフィー用重合体の製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0356040Y2 (en, 2012) | 1991-12-16 |