JPS63121435U - - Google Patents

Info

Publication number
JPS63121435U
JPS63121435U JP1150387U JP1150387U JPS63121435U JP S63121435 U JPS63121435 U JP S63121435U JP 1150387 U JP1150387 U JP 1150387U JP 1150387 U JP1150387 U JP 1150387U JP S63121435 U JPS63121435 U JP S63121435U
Authority
JP
Japan
Prior art keywords
stop valve
liquid
closed
storage section
filter part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1150387U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0356040Y2 (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987011503U priority Critical patent/JPH0356040Y2/ja
Publication of JPS63121435U publication Critical patent/JPS63121435U/ja
Application granted granted Critical
Publication of JPH0356040Y2 publication Critical patent/JPH0356040Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Nozzles (AREA)
  • Weting (AREA)
JP1987011503U 1987-01-30 1987-01-30 Expired JPH0356040Y2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987011503U JPH0356040Y2 (cs) 1987-01-30 1987-01-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987011503U JPH0356040Y2 (cs) 1987-01-30 1987-01-30

Publications (2)

Publication Number Publication Date
JPS63121435U true JPS63121435U (cs) 1988-08-05
JPH0356040Y2 JPH0356040Y2 (cs) 1991-12-16

Family

ID=30798779

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987011503U Expired JPH0356040Y2 (cs) 1987-01-30 1987-01-30

Country Status (1)

Country Link
JP (1) JPH0356040Y2 (cs)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08131909A (ja) * 1994-11-04 1996-05-28 Dainippon Screen Mfg Co Ltd 基板処理装置用処理液供給装置
JP2018066010A (ja) * 2017-11-24 2018-04-26 三菱ケミカル株式会社 半導体リソグラフィー用重合体の製造方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60158734U (ja) * 1984-03-29 1985-10-22 大日本スクリ−ン製造株式会社 基板表面処理液供給装置
JPS61198723A (ja) * 1985-02-28 1986-09-03 Toshiba Corp レジスト塗布装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60158734U (ja) * 1984-03-29 1985-10-22 大日本スクリ−ン製造株式会社 基板表面処理液供給装置
JPS61198723A (ja) * 1985-02-28 1986-09-03 Toshiba Corp レジスト塗布装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08131909A (ja) * 1994-11-04 1996-05-28 Dainippon Screen Mfg Co Ltd 基板処理装置用処理液供給装置
JP2018066010A (ja) * 2017-11-24 2018-04-26 三菱ケミカル株式会社 半導体リソグラフィー用重合体の製造方法

Also Published As

Publication number Publication date
JPH0356040Y2 (cs) 1991-12-16

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