JPS63121435U - - Google Patents

Info

Publication number
JPS63121435U
JPS63121435U JP1150387U JP1150387U JPS63121435U JP S63121435 U JPS63121435 U JP S63121435U JP 1150387 U JP1150387 U JP 1150387U JP 1150387 U JP1150387 U JP 1150387U JP S63121435 U JPS63121435 U JP S63121435U
Authority
JP
Japan
Prior art keywords
stop valve
liquid
closed
storage section
filter part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1150387U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0356040Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987011503U priority Critical patent/JPH0356040Y2/ja
Publication of JPS63121435U publication Critical patent/JPS63121435U/ja
Application granted granted Critical
Publication of JPH0356040Y2 publication Critical patent/JPH0356040Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Nozzles (AREA)
  • Weting (AREA)
JP1987011503U 1987-01-30 1987-01-30 Expired JPH0356040Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987011503U JPH0356040Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-01-30 1987-01-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987011503U JPH0356040Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-01-30 1987-01-30

Publications (2)

Publication Number Publication Date
JPS63121435U true JPS63121435U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-08-05
JPH0356040Y2 JPH0356040Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-12-16

Family

ID=30798779

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987011503U Expired JPH0356040Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-01-30 1987-01-30

Country Status (1)

Country Link
JP (1) JPH0356040Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08131909A (ja) * 1994-11-04 1996-05-28 Dainippon Screen Mfg Co Ltd 基板処理装置用処理液供給装置
JP2018066010A (ja) * 2017-11-24 2018-04-26 三菱ケミカル株式会社 半導体リソグラフィー用重合体の製造方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60158734U (ja) * 1984-03-29 1985-10-22 大日本スクリ−ン製造株式会社 基板表面処理液供給装置
JPS61198723A (ja) * 1985-02-28 1986-09-03 Toshiba Corp レジスト塗布装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60158734U (ja) * 1984-03-29 1985-10-22 大日本スクリ−ン製造株式会社 基板表面処理液供給装置
JPS61198723A (ja) * 1985-02-28 1986-09-03 Toshiba Corp レジスト塗布装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08131909A (ja) * 1994-11-04 1996-05-28 Dainippon Screen Mfg Co Ltd 基板処理装置用処理液供給装置
JP2018066010A (ja) * 2017-11-24 2018-04-26 三菱ケミカル株式会社 半導体リソグラフィー用重合体の製造方法

Also Published As

Publication number Publication date
JPH0356040Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-12-16

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