JPS63121434U - - Google Patents
Info
- Publication number
- JPS63121434U JPS63121434U JP1353587U JP1353587U JPS63121434U JP S63121434 U JPS63121434 U JP S63121434U JP 1353587 U JP1353587 U JP 1353587U JP 1353587 U JP1353587 U JP 1353587U JP S63121434 U JPS63121434 U JP S63121434U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- notch
- holding part
- rotary coating
- rotates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 10
- 239000011248 coating agent Substances 0.000 claims 3
- 238000000576 coating method Methods 0.000 claims 3
- 238000004528 spin coating Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1353587U JPH0331073Y2 (pt) | 1987-01-30 | 1987-01-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1353587U JPH0331073Y2 (pt) | 1987-01-30 | 1987-01-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63121434U true JPS63121434U (pt) | 1988-08-05 |
| JPH0331073Y2 JPH0331073Y2 (pt) | 1991-07-01 |
Family
ID=30802683
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1353587U Expired JPH0331073Y2 (pt) | 1987-01-30 | 1987-01-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0331073Y2 (pt) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007305614A (ja) * | 2006-05-08 | 2007-11-22 | Tokyo Electron Ltd | 基板の反り測定装置及び基板処理システム |
-
1987
- 1987-01-30 JP JP1353587U patent/JPH0331073Y2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007305614A (ja) * | 2006-05-08 | 2007-11-22 | Tokyo Electron Ltd | 基板の反り測定装置及び基板処理システム |
| JP4642692B2 (ja) * | 2006-05-08 | 2011-03-02 | 東京エレクトロン株式会社 | 基板処理システム |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0331073Y2 (pt) | 1991-07-01 |
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