JPS63900U - - Google Patents
Info
- Publication number
- JPS63900U JPS63900U JP9330786U JP9330786U JPS63900U JP S63900 U JPS63900 U JP S63900U JP 9330786 U JP9330786 U JP 9330786U JP 9330786 U JP9330786 U JP 9330786U JP S63900 U JPS63900 U JP S63900U
- Authority
- JP
- Japan
- Prior art keywords
- resist film
- substrate
- contact
- peeled
- disposed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 4
- 238000001035 drying Methods 0.000 claims description 2
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9330786U JPS63900U (pt) | 1986-06-20 | 1986-06-20 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9330786U JPS63900U (pt) | 1986-06-20 | 1986-06-20 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63900U true JPS63900U (pt) | 1988-01-06 |
Family
ID=30955787
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9330786U Pending JPS63900U (pt) | 1986-06-20 | 1986-06-20 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63900U (pt) |
-
1986
- 1986-06-20 JP JP9330786U patent/JPS63900U/ja active Pending