JPS63121434U - - Google Patents
Info
- Publication number
- JPS63121434U JPS63121434U JP1987013535U JP1353587U JPS63121434U JP S63121434 U JPS63121434 U JP S63121434U JP 1987013535 U JP1987013535 U JP 1987013535U JP 1353587 U JP1353587 U JP 1353587U JP S63121434 U JPS63121434 U JP S63121434U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- notch
- holding part
- rotary coating
- rotates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987013535U JPH0331073Y2 (enExample) | 1987-01-30 | 1987-01-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987013535U JPH0331073Y2 (enExample) | 1987-01-30 | 1987-01-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63121434U true JPS63121434U (enExample) | 1988-08-05 |
| JPH0331073Y2 JPH0331073Y2 (enExample) | 1991-07-01 |
Family
ID=30802683
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987013535U Expired JPH0331073Y2 (enExample) | 1987-01-30 | 1987-01-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0331073Y2 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007305614A (ja) * | 2006-05-08 | 2007-11-22 | Tokyo Electron Ltd | 基板の反り測定装置及び基板処理システム |
-
1987
- 1987-01-30 JP JP1987013535U patent/JPH0331073Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007305614A (ja) * | 2006-05-08 | 2007-11-22 | Tokyo Electron Ltd | 基板の反り測定装置及び基板処理システム |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0331073Y2 (enExample) | 1991-07-01 |