JPS63121429U - - Google Patents
Info
- Publication number
- JPS63121429U JPS63121429U JP1294087U JP1294087U JPS63121429U JP S63121429 U JPS63121429 U JP S63121429U JP 1294087 U JP1294087 U JP 1294087U JP 1294087 U JP1294087 U JP 1294087U JP S63121429 U JPS63121429 U JP S63121429U
- Authority
- JP
- Japan
- Prior art keywords
- heater
- blower
- vertical furnace
- cooling device
- exhaust valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000002791 soaking Methods 0.000 claims description 2
- 238000007664 blowing Methods 0.000 claims 1
- 238000001816 cooling Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Furnace Details (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1294087U JPS63121429U (ru) | 1987-01-30 | 1987-01-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1294087U JPS63121429U (ru) | 1987-01-30 | 1987-01-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63121429U true JPS63121429U (ru) | 1988-08-05 |
Family
ID=30801538
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1294087U Pending JPS63121429U (ru) | 1987-01-30 | 1987-01-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63121429U (ru) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03224217A (ja) * | 1988-06-16 | 1991-10-03 | Tokyo Electron Sagami Ltd | 熱処理装置及び熱処理方法 |
| JP2008303448A (ja) * | 2007-06-11 | 2008-12-18 | Daido Steel Co Ltd | 竪型炉の冷却システム |
| CN108305844A (zh) * | 2017-01-12 | 2018-07-20 | 东京毅力科创株式会社 | 热处理装置和温度控制方法 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5678997A (en) * | 1979-11-30 | 1981-06-29 | Akio Tani | Wiping cloth exchange type eraser |
| JPS5833083A (ja) * | 1981-08-24 | 1983-02-26 | 株式会社日立製作所 | 熱処理炉 |
| JPS5850236U (ja) * | 1981-09-28 | 1983-04-05 | 株式会社ニシワキ | フレキシブルシヤフトの破損防止装置 |
| JPS61241916A (ja) * | 1985-04-18 | 1986-10-28 | Deisuko Saiyaa Japan:Kk | 半導体熱処理装置 |
-
1987
- 1987-01-30 JP JP1294087U patent/JPS63121429U/ja active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5678997A (en) * | 1979-11-30 | 1981-06-29 | Akio Tani | Wiping cloth exchange type eraser |
| JPS5833083A (ja) * | 1981-08-24 | 1983-02-26 | 株式会社日立製作所 | 熱処理炉 |
| JPS5850236U (ja) * | 1981-09-28 | 1983-04-05 | 株式会社ニシワキ | フレキシブルシヤフトの破損防止装置 |
| JPS61241916A (ja) * | 1985-04-18 | 1986-10-28 | Deisuko Saiyaa Japan:Kk | 半導体熱処理装置 |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03224217A (ja) * | 1988-06-16 | 1991-10-03 | Tokyo Electron Sagami Ltd | 熱処理装置及び熱処理方法 |
| JP2008303448A (ja) * | 2007-06-11 | 2008-12-18 | Daido Steel Co Ltd | 竪型炉の冷却システム |
| CN108305844A (zh) * | 2017-01-12 | 2018-07-20 | 东京毅力科创株式会社 | 热处理装置和温度控制方法 |
| CN108305844B (zh) * | 2017-01-12 | 2023-02-28 | 东京毅力科创株式会社 | 热处理装置和温度控制方法 |