JPS63121429U - - Google Patents
Info
- Publication number
- JPS63121429U JPS63121429U JP1294087U JP1294087U JPS63121429U JP S63121429 U JPS63121429 U JP S63121429U JP 1294087 U JP1294087 U JP 1294087U JP 1294087 U JP1294087 U JP 1294087U JP S63121429 U JPS63121429 U JP S63121429U
- Authority
- JP
- Japan
- Prior art keywords
- heater
- blower
- vertical furnace
- cooling device
- exhaust valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000002791 soaking Methods 0.000 claims description 2
- 238000007664 blowing Methods 0.000 claims 1
- 238000001816 cooling Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Furnace Details (AREA)
Description
第１図は本考案装置の一実施例を取付けた時の
ヒータ部の簡略縦断正面図、第２図は本考案実施
例を使用した時のヒータ内部における空気の流れ
を示す図、第３図ａ，ｂはそれぞれ本考案におけ
る空気導入ノズルの空気の流れを示す図及び空気
導入ノズルの斜視図、第４図は送風用ブロア動作
と排熱用バルブ動作のタイムチヤート、第５図は
従来縦型炉のヒータ部の一例を示す簡略縦断正面
図である。
１……ヒータ、２……均熱管、７……送風用ブ
ロア、８……排熱用バルブ。
Fig. 1 is a simplified longitudinal sectional front view of the heater section when an embodiment of the device of the present invention is installed, Fig. 2 is a diagram showing the air flow inside the heater when the embodiment of the invention is used, and Fig. 3 a and b are a diagram showing the air flow of the air introduction nozzle in the present invention and a perspective view of the air introduction nozzle, respectively, Fig. 4 is a time chart of the operation of the air blower and the exhaust heat valve, and Fig. 5 is the conventional vertical FIG. 2 is a simplified longitudinal sectional front view showing an example of a heater section of a mold furnace. 1... Heater, 2... Soaking tube, 7... Blower, 8... Valve for exhaust heat.
Claims (1)
２の間に空気を送り込む送風用ブロア７を設け、
ヒータ１の上部に送風用ブロア７と連動する排熱
用バルブ８を設けてなる縦型炉の強制冷却装置。 In the heater part of the vertical furnace, a blower 7 for blowing air between the heater 1 and the soaking tube 2 is provided,
This is a forced cooling device for a vertical furnace, in which a heat exhaust valve 8 that is connected to a blower 7 is provided above a heater 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1294087U JPS63121429U (en) | 1987-01-30 | 1987-01-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1294087U JPS63121429U (en) | 1987-01-30 | 1987-01-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63121429U true JPS63121429U (en) | 1988-08-05 |
Family
ID=30801538
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1294087U Pending JPS63121429U (en) | 1987-01-30 | 1987-01-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63121429U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03224217A (en) * | 1988-06-16 | 1991-10-03 | Tokyo Electron Sagami Ltd | Heat-treating device |
| JP2008303448A (en) * | 2007-06-11 | 2008-12-18 | Daido Steel Co Ltd | Cooling system for vertical-furnace |
| CN108305844A (en) * | 2017-01-12 | 2018-07-20 | 东京毅力科创株式会社 | Annealing device and temprature control method |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5678997A (en) * | 1979-11-30 | 1981-06-29 | Akio Tani | Wiping cloth exchange type eraser |
| JPS5833083A (en) * | 1981-08-24 | 1983-02-26 | 株式会社日立製作所 | Heat treatment furnace |
| JPS5850236U (en) * | 1981-09-28 | 1983-04-05 | 株式会社ニシワキ | Flexible shaft damage prevention device |
| JPS61241916A (en) * | 1985-04-18 | 1986-10-28 | Deisuko Saiyaa Japan:Kk | Semiconductor heat treatment apparatus |
-
1987
- 1987-01-30 JP JP1294087U patent/JPS63121429U/ja active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5678997A (en) * | 1979-11-30 | 1981-06-29 | Akio Tani | Wiping cloth exchange type eraser |
| JPS5833083A (en) * | 1981-08-24 | 1983-02-26 | 株式会社日立製作所 | Heat treatment furnace |
| JPS5850236U (en) * | 1981-09-28 | 1983-04-05 | 株式会社ニシワキ | Flexible shaft damage prevention device |
| JPS61241916A (en) * | 1985-04-18 | 1986-10-28 | Deisuko Saiyaa Japan:Kk | Semiconductor heat treatment apparatus |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03224217A (en) * | 1988-06-16 | 1991-10-03 | Tokyo Electron Sagami Ltd | Heat-treating device |
| JP2008303448A (en) * | 2007-06-11 | 2008-12-18 | Daido Steel Co Ltd | Cooling system for vertical-furnace |
| CN108305844A (en) * | 2017-01-12 | 2018-07-20 | 东京毅力科创株式会社 | Annealing device and temprature control method |
| CN108305844B (en) * | 2017-01-12 | 2023-02-28 | 东京毅力科创株式会社 | Heat treatment apparatus and temperature control method |
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