JPS63121429U - - Google Patents

Info

Publication number
JPS63121429U
JPS63121429U JP1294087U JP1294087U JPS63121429U JP S63121429 U JPS63121429 U JP S63121429U JP 1294087 U JP1294087 U JP 1294087U JP 1294087 U JP1294087 U JP 1294087U JP S63121429 U JPS63121429 U JP S63121429U
Authority
JP
Japan
Prior art keywords
heater
blower
vertical furnace
cooling device
exhaust valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1294087U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1294087U priority Critical patent/JPS63121429U/ja
Publication of JPS63121429U publication Critical patent/JPS63121429U/ja
Pending legal-status Critical Current

Links

JP1294087U 1987-01-30 1987-01-30 Pending JPS63121429U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1294087U JPS63121429U (ko) 1987-01-30 1987-01-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1294087U JPS63121429U (ko) 1987-01-30 1987-01-30

Publications (1)

Publication Number Publication Date
JPS63121429U true JPS63121429U (ko) 1988-08-05

Family

ID=30801538

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1294087U Pending JPS63121429U (ko) 1987-01-30 1987-01-30

Country Status (1)

Country Link
JP (1) JPS63121429U (ko)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03224217A (ja) * 1988-06-16 1991-10-03 Tokyo Electron Sagami Ltd 熱処理装置及び熱処理方法
JP2008303448A (ja) * 2007-06-11 2008-12-18 Daido Steel Co Ltd 竪型炉の冷却システム
CN108305844A (zh) * 2017-01-12 2018-07-20 东京毅力科创株式会社 热处理装置和温度控制方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5678997A (en) * 1979-11-30 1981-06-29 Akio Tani Wiping cloth exchange type eraser
JPS5833083A (ja) * 1981-08-24 1983-02-26 株式会社日立製作所 熱処理炉
JPS5850236U (ja) * 1981-09-28 1983-04-05 株式会社ニシワキ フレキシブルシヤフトの破損防止装置
JPS61241916A (ja) * 1985-04-18 1986-10-28 Deisuko Saiyaa Japan:Kk 半導体熱処理装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5678997A (en) * 1979-11-30 1981-06-29 Akio Tani Wiping cloth exchange type eraser
JPS5833083A (ja) * 1981-08-24 1983-02-26 株式会社日立製作所 熱処理炉
JPS5850236U (ja) * 1981-09-28 1983-04-05 株式会社ニシワキ フレキシブルシヤフトの破損防止装置
JPS61241916A (ja) * 1985-04-18 1986-10-28 Deisuko Saiyaa Japan:Kk 半導体熱処理装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03224217A (ja) * 1988-06-16 1991-10-03 Tokyo Electron Sagami Ltd 熱処理装置及び熱処理方法
JP2008303448A (ja) * 2007-06-11 2008-12-18 Daido Steel Co Ltd 竪型炉の冷却システム
CN108305844A (zh) * 2017-01-12 2018-07-20 东京毅力科创株式会社 热处理装置和温度控制方法
CN108305844B (zh) * 2017-01-12 2023-02-28 东京毅力科创株式会社 热处理装置和温度控制方法

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