JPS6312025U - - Google Patents
Info
- Publication number
- JPS6312025U JPS6312025U JP10085486U JP10085486U JPS6312025U JP S6312025 U JPS6312025 U JP S6312025U JP 10085486 U JP10085486 U JP 10085486U JP 10085486 U JP10085486 U JP 10085486U JP S6312025 U JPS6312025 U JP S6312025U
- Authority
- JP
- Japan
- Prior art keywords
- glass tube
- quartz glass
- induction coil
- frequency induction
- plasma
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 6
- 230000006698 induction Effects 0.000 claims description 5
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000007789 sealing Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 3
Landscapes
- Gas Burners (AREA)
- Glass Melting And Manufacturing (AREA)
- Manufacture, Treatment Of Glass Fibers (AREA)
Description
第１図は本考案のプラズマトーチの実施例の概
要断面図、第２図は第１図のプラズマトーチを用
いてエツチングされたコアロツドの断面における
ＯＨ基濃度の分布図、第３図は従来のプラズマト
ーチの概要断面図、第４図は従来のプラズマトー
チを用いてエツチングされたコアロツドの断面に
おけるＯＨ基濃度の分布図である。
１，２，３……石英ガラス管、４……高周波誘
導コイル、６……プラズマ火炎、７……フード用
石英ガラス管。
Figure 1 is a schematic sectional view of an embodiment of the plasma torch of the present invention, Figure 2 is a distribution diagram of OH group concentration in a cross section of a core rod etched using the plasma torch of Figure 1, and Figure 3 is a diagram of the OH group concentration distribution in a cross section of a core rod etched using the plasma torch of the present invention. FIG. 4, a schematic cross-sectional view of a plasma torch, is a distribution diagram of OH group concentration in a cross-section of a core rod etched using a conventional plasma torch. 1, 2, 3...Quartz glass tube, 4...High frequency induction coil, 6...Plasma flame, 7...Quartz glass tube for hood.
Claims (1)
いる石英ガラス管内にプラズマ発生用ガスを供給
してプラズマを発生させるプラズマトーチにおい
て、上記の高周波誘導コイルの外側にプラズマ火
炎を包囲するように同心状にフード用石英ガラス
管が付設され、該フード用石英ガラス管と高周波
誘導コイル内側の前記石英ガラス管との間の空隙
が加熱点のシール用乾燥ガスの通路を形成してな
ることを特徴とするプラズマトーチ。 In a plasma torch, which generates plasma by supplying plasma generation gas into a quartz glass tube with a high-frequency induction coil arranged concentrically on the outside, a high-frequency induction coil is arranged concentrically around the outside of the high-frequency induction coil to surround the plasma flame. A quartz glass tube for a hood is attached to the hood, and a gap between the quartz glass tube for the hood and the quartz glass tube inside the high-frequency induction coil forms a passage for dry gas for sealing the heating point. Plasma torch.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10085486U JPH06420Y2 (en) | 1986-07-02 | 1986-07-02 | Plasma torch |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10085486U JPH06420Y2 (en) | 1986-07-02 | 1986-07-02 | Plasma torch |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6312025U true JPS6312025U (en) | 1988-01-26 |
| JPH06420Y2 JPH06420Y2 (en) | 1994-01-05 |
Family
ID=30971059
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10085486U Expired - Lifetime JPH06420Y2 (en) | 1986-07-02 | 1986-07-02 | Plasma torch |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH06420Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10651704B2 (en) | 2016-04-15 | 2020-05-12 | Minebea Mitsumi Inc. | Rotating device |
-
1986
- 1986-07-02 JP JP10085486U patent/JPH06420Y2/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10651704B2 (en) | 2016-04-15 | 2020-05-12 | Minebea Mitsumi Inc. | Rotating device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH06420Y2 (en) | 1994-01-05 |