JPS63119243U - - Google Patents
Info
- Publication number
- JPS63119243U JPS63119243U JP998387U JP998387U JPS63119243U JP S63119243 U JPS63119243 U JP S63119243U JP 998387 U JP998387 U JP 998387U JP 998387 U JP998387 U JP 998387U JP S63119243 U JPS63119243 U JP S63119243U
- Authority
- JP
- Japan
- Prior art keywords
- light
- substrate
- processing apparatus
- ultraviolet
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000853 adhesive Substances 0.000 claims description 5
- 230000001070 adhesive effect Effects 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 4
- 239000011261 inert gas Substances 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 230000007246 mechanism Effects 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 230000007723 transport mechanism Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP998387U JPH0325407Y2 (ja�@�@) | 1987-01-28 | 1987-01-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP998387U JPH0325407Y2 (ja�@�@) | 1987-01-28 | 1987-01-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63119243U true JPS63119243U (ja�@�@) | 1988-08-02 |
| JPH0325407Y2 JPH0325407Y2 (ja�@�@) | 1991-06-03 |
Family
ID=30795818
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP998387U Expired JPH0325407Y2 (ja�@�@) | 1987-01-28 | 1987-01-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0325407Y2 (ja�@�@) |
-
1987
- 1987-01-28 JP JP998387U patent/JPH0325407Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0325407Y2 (ja�@�@) | 1991-06-03 |
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