JPS63119243U - - Google Patents

Info

Publication number
JPS63119243U
JPS63119243U JP998387U JP998387U JPS63119243U JP S63119243 U JPS63119243 U JP S63119243U JP 998387 U JP998387 U JP 998387U JP 998387 U JP998387 U JP 998387U JP S63119243 U JPS63119243 U JP S63119243U
Authority
JP
Japan
Prior art keywords
light
substrate
processing apparatus
ultraviolet
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP998387U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0325407Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP998387U priority Critical patent/JPH0325407Y2/ja
Publication of JPS63119243U publication Critical patent/JPS63119243U/ja
Application granted granted Critical
Publication of JPH0325407Y2 publication Critical patent/JPH0325407Y2/ja
Expired legal-status Critical Current

Links

JP998387U 1987-01-28 1987-01-28 Expired JPH0325407Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP998387U JPH0325407Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-01-28 1987-01-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP998387U JPH0325407Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-01-28 1987-01-28

Publications (2)

Publication Number Publication Date
JPS63119243U true JPS63119243U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-08-02
JPH0325407Y2 JPH0325407Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-06-03

Family

ID=30795818

Family Applications (1)

Application Number Title Priority Date Filing Date
JP998387U Expired JPH0325407Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-01-28 1987-01-28

Country Status (1)

Country Link
JP (1) JPH0325407Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Also Published As

Publication number Publication date
JPH0325407Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-06-03

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