JPS6311560U - - Google Patents

Info

Publication number
JPS6311560U
JPS6311560U JP10642586U JP10642586U JPS6311560U JP S6311560 U JPS6311560 U JP S6311560U JP 10642586 U JP10642586 U JP 10642586U JP 10642586 U JP10642586 U JP 10642586U JP S6311560 U JPS6311560 U JP S6311560U
Authority
JP
Japan
Prior art keywords
chamber
substrate
film forming
ion beam
plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10642586U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10642586U priority Critical patent/JPS6311560U/ja
Publication of JPS6311560U publication Critical patent/JPS6311560U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Vapour Deposition (AREA)
JP10642586U 1986-07-10 1986-07-10 Pending JPS6311560U (US20100223739A1-20100909-C00005.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10642586U JPS6311560U (US20100223739A1-20100909-C00005.png) 1986-07-10 1986-07-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10642586U JPS6311560U (US20100223739A1-20100909-C00005.png) 1986-07-10 1986-07-10

Publications (1)

Publication Number Publication Date
JPS6311560U true JPS6311560U (US20100223739A1-20100909-C00005.png) 1988-01-26

Family

ID=30981771

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10642586U Pending JPS6311560U (US20100223739A1-20100909-C00005.png) 1986-07-10 1986-07-10

Country Status (1)

Country Link
JP (1) JPS6311560U (US20100223739A1-20100909-C00005.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100295617B1 (ko) * 1998-12-23 2001-10-26 홍상복 고진공마그네트론스퍼터링방법

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100295617B1 (ko) * 1998-12-23 2001-10-26 홍상복 고진공마그네트론스퍼터링방법

Similar Documents

Publication Publication Date Title
JPH0568545B2 (US20100223739A1-20100909-C00005.png)
JPS6311560U (US20100223739A1-20100909-C00005.png)
JPS5246300A (en) Ionic source
JPS5689835A (en) Vapor phase growth apparatus
JPH0379153U (US20100223739A1-20100909-C00005.png)
JPS55104328A (en) Macromolecular material having clear conducting film and production thereof
JPS637158U (US20100223739A1-20100909-C00005.png)
JPS59121747A (ja) イオンミリング方法
JPS641221A (en) Manufacture of polarizable electrode
JPH0115120Y2 (US20100223739A1-20100909-C00005.png)
JPS6328243U (US20100223739A1-20100909-C00005.png)
JPS6251736U (US20100223739A1-20100909-C00005.png)
JPS61176763U (US20100223739A1-20100909-C00005.png)
JPH01165627U (US20100223739A1-20100909-C00005.png)
JPS6111226Y2 (US20100223739A1-20100909-C00005.png)
JPS62157968U (US20100223739A1-20100909-C00005.png)
JPS6251648U (US20100223739A1-20100909-C00005.png)
JPH01158640U (US20100223739A1-20100909-C00005.png)
JPS61206257U (US20100223739A1-20100909-C00005.png)
JPS6328242U (US20100223739A1-20100909-C00005.png)
JPH01176925U (US20100223739A1-20100909-C00005.png)
JPS62101860U (US20100223739A1-20100909-C00005.png)
JPS6231857U (US20100223739A1-20100909-C00005.png)
JPS62193659U (US20100223739A1-20100909-C00005.png)
GB1507087A (en) Extractor ion source