JPS63115237U - - Google Patents
Info
- Publication number
- JPS63115237U JPS63115237U JP1987007885U JP788587U JPS63115237U JP S63115237 U JPS63115237 U JP S63115237U JP 1987007885 U JP1987007885 U JP 1987007885U JP 788587 U JP788587 U JP 788587U JP S63115237 U JPS63115237 U JP S63115237U
- Authority
- JP
- Japan
- Prior art keywords
- workpiece
- substrate
- detection
- laser beam
- trimming device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims 4
- 239000000758 substrate Substances 0.000 claims 2
- 238000009966 trimming Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Adjustable Resistors (AREA)
- Lasers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987007885U JPS63115237U (it) | 1987-01-22 | 1987-01-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987007885U JPS63115237U (it) | 1987-01-22 | 1987-01-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63115237U true JPS63115237U (it) | 1988-07-25 |
Family
ID=30791754
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987007885U Pending JPS63115237U (it) | 1987-01-22 | 1987-01-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63115237U (it) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008290117A (ja) * | 2007-05-24 | 2008-12-04 | National Institute Of Advanced Industrial & Technology | レーザ加工装置 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58205689A (ja) * | 1982-05-24 | 1983-11-30 | Hitachi Ltd | レ−ザビ−ムの反射光量検出方法 |
| JPS5987990A (ja) * | 1982-11-10 | 1984-05-21 | Nisshin Steel Co Ltd | レ−ザ加工機 |
| JPS6052083B2 (ja) * | 1981-04-23 | 1985-11-18 | 日本碍子株式会社 | 高純度セラミツク粉末の製造法 |
-
1987
- 1987-01-22 JP JP1987007885U patent/JPS63115237U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6052083B2 (ja) * | 1981-04-23 | 1985-11-18 | 日本碍子株式会社 | 高純度セラミツク粉末の製造法 |
| JPS58205689A (ja) * | 1982-05-24 | 1983-11-30 | Hitachi Ltd | レ−ザビ−ムの反射光量検出方法 |
| JPS5987990A (ja) * | 1982-11-10 | 1984-05-21 | Nisshin Steel Co Ltd | レ−ザ加工機 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008290117A (ja) * | 2007-05-24 | 2008-12-04 | National Institute Of Advanced Industrial & Technology | レーザ加工装置 |