JPS63114032U - - Google Patents

Info

Publication number
JPS63114032U
JPS63114032U JP513287U JP513287U JPS63114032U JP S63114032 U JPS63114032 U JP S63114032U JP 513287 U JP513287 U JP 513287U JP 513287 U JP513287 U JP 513287U JP S63114032 U JPS63114032 U JP S63114032U
Authority
JP
Japan
Prior art keywords
rail
pair
semiconductor device
guide
members
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP513287U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP513287U priority Critical patent/JPS63114032U/ja
Publication of JPS63114032U publication Critical patent/JPS63114032U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第1図はこの考案の一実施例による半導体装置
の案内レールを示す断面図、第2図は従来の半導
体装置の案内レールを示す断面図である。 図中、4は下部案内レール、5は上部案内レー
ル、6は案内空間、41は下部レール部材、42
は下部取付部材、51は上部レール部材、52は
上部取付部材である。尚、図中同一符号は同一ま
たは相当部分を示す。
FIG. 1 is a sectional view showing a guide rail of a semiconductor device according to an embodiment of the invention, and FIG. 2 is a sectional view showing a guide rail of a conventional semiconductor device. In the figure, 4 is a lower guide rail, 5 is an upper guide rail, 6 is a guide space, 41 is a lower rail member, 42
51 is a lower mounting member, 51 is an upper rail member, and 52 is an upper mounting member. Note that the same reference numerals in the figures indicate the same or corresponding parts.

Claims (1)

【実用新案登録請求の範囲】 (1) 半導体装置を一定姿勢で、かつ恒温状態に
保ちながら案内する上下一対の案内レール装置に
おいて、互に対向する端面に半導体装置の形状に
合せて案内空間を形成する一対のレール部材と、
これら一対のレール部材をそれぞれ着脱自在に保
持し、熱供給を行なう一対の取付部材とを備えた
ことを特徴とする半導体装置の案内レール装置。 (2) レール部材は各々L形に形成され、その一
片をボルトにてそれぞれの取付部材に装着してな
る実用新案登録請求の範囲第1項記載の半導体装
置の案内レール装置。
[Scope of Claim for Utility Model Registration] (1) In a pair of upper and lower guide rail devices that guide a semiconductor device while keeping it in a constant posture and at a constant temperature, a guide space is provided on the opposing end surfaces according to the shape of the semiconductor device. a pair of rail members to form;
A guide rail device for a semiconductor device, comprising a pair of mounting members for detachably holding the pair of rail members and supplying heat. (2) The guide rail device for a semiconductor device according to claim 1, wherein each rail member is formed into an L shape, and one piece of the rail member is attached to each mounting member with a bolt.
JP513287U 1987-01-16 1987-01-16 Pending JPS63114032U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP513287U JPS63114032U (en) 1987-01-16 1987-01-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP513287U JPS63114032U (en) 1987-01-16 1987-01-16

Publications (1)

Publication Number Publication Date
JPS63114032U true JPS63114032U (en) 1988-07-22

Family

ID=30786433

Family Applications (1)

Application Number Title Priority Date Filing Date
JP513287U Pending JPS63114032U (en) 1987-01-16 1987-01-16

Country Status (1)

Country Link
JP (1) JPS63114032U (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59189645A (en) * 1983-04-12 1984-10-27 Tokyo Seimitsu Co Ltd Device for heating transportation of semiconductor element
JPS625108B2 (en) * 1979-05-09 1987-02-03 Yamaha Motor Co Ltd

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS625108B2 (en) * 1979-05-09 1987-02-03 Yamaha Motor Co Ltd
JPS59189645A (en) * 1983-04-12 1984-10-27 Tokyo Seimitsu Co Ltd Device for heating transportation of semiconductor element

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