JPS63110976A - Electrostrictive motor - Google Patents

Electrostrictive motor

Info

Publication number
JPS63110976A
JPS63110976A JP61256385A JP25638586A JPS63110976A JP S63110976 A JPS63110976 A JP S63110976A JP 61256385 A JP61256385 A JP 61256385A JP 25638586 A JP25638586 A JP 25638586A JP S63110976 A JPS63110976 A JP S63110976A
Authority
JP
Japan
Prior art keywords
electrostrictive
electrostrictive element
elements
motor
common electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP61256385A
Other languages
Japanese (ja)
Inventor
Nobuhiro Hayashi
信宏 林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alps Alpine Co Ltd
Original Assignee
Alps Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alps Electric Co Ltd filed Critical Alps Electric Co Ltd
Priority to JP61256385A priority Critical patent/JPS63110976A/en
Publication of JPS63110976A publication Critical patent/JPS63110976A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/16Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using travelling waves, i.e. Rayleigh surface waves
    • H02N2/163Motors with ring stator

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

PURPOSE:To improve efficiency with a low voltage by forming an electrostrictive element for obtaining a driving force into a laminated structure and by applying different drive frequency voltages after interposing a common electrode midway between said elements. CONSTITUTION:An electrostrictive element 31 of electrostrictive motor is composed of two layers of stratified electrostrictive elements 31a, 31b. Also, a common electrode 32 is positioned midway between both stratified elements 31a, 31b and separate electrodes 33 are formed by adhesion on surfaces of said stratified elements so that their positions respectively coincide with each other. Further, both stratified elements 3la, 31b are bonded to an elastic body 12 to form an oscillator 10. Then, after the electrostrictive element 31 has been formed into a laminated structure, a phase of frequency voltage to be applied thereto is made to differ on the upper and lower sides or the intermediate common electrode 32 to enable generating the same expansion and contraction as before in the electrostrictive element 31, for example, at a low drive voltage of 1/2 as compared with the existing one.

Description

【発明の詳細な説明】 「技術分野」 本発明は、電歪モータに関し、特にその電歪素子の改良
に間する。
DETAILED DESCRIPTION OF THE INVENTION TECHNICAL FIELD The present invention relates to an electrostrictive motor, and particularly to improvement of an electrostrictive element thereof.

「従来技術およびその問題点」 電歪素子を利用したモータは、従来各種提案されでいる
が、そのうち超音波振動子の界面に励振される横波と縦
波の合成された進行波によって、直線運動(リニアモー
タ)または回転運動を得るものは、特開昭58−148
682号で最初に提案された。
"Prior art and its problems" Various motors using electrostrictive elements have been proposed in the past, but one of them is that it is possible to achieve linear motion by a traveling wave that is a combination of transverse waves and longitudinal waves excited at the interface of an ultrasonic vibrator. (linear motor) or one that obtains rotational motion is
It was first proposed in issue 682.

まず第2図ないし第5図によりこの電歪モータを説明す
る。この例は電歪モータを回転モータに適用した場合の
構成例を示すもので、固定される振動子1oは、環状ま
たは円板状の電歪素子11と、この電歪素子11上に接
合した環状の弾性体12かうなっている。弾性体12は
例えばAt合金、ステンレス等の金属材料から構成され
、その上面は、電歪素子11による進行波を拡大するた
め、鋸歯状に形成されている。
First, this electrostrictive motor will be explained with reference to FIGS. 2 to 5. This example shows a configuration example in which an electrostrictive motor is applied to a rotary motor. An annular elastic body 12 is formed. The elastic body 12 is made of a metal material such as an At alloy or stainless steel, and its upper surface is formed into a sawtooth shape in order to magnify the traveling wave caused by the electrostrictive element 11.

この振動子1o上には、電歪素子11および弾性体12
と同軸の回転子(移動子)20が位置している。この回
転子20は、その軸21を振動子10の軸受13に挿入
し、その下端面を弾性体12の界面(上端面)14に接
触させている。電歪素子]1に加える周波電圧によって
界面14に生じる進行波により、回転子20を回転させ
る構成である。
On this vibrator 1o, an electrostrictive element 11 and an elastic body 12 are provided.
A rotor (mover) 20 coaxial with is located. This rotor 20 has its shaft 21 inserted into the bearing 13 of the vibrator 10, and its lower end surface is brought into contact with the interface (upper end surface) 14 of the elastic body 12. [Electrostrictive Element] This is a configuration in which the rotor 20 is rotated by a traveling wave generated at the interface 14 by a frequency voltage applied to the electrostrictive element 1.

電歪素子11は、例えば第4図のように、その周方向、
つまり回転子20の回転方向に、+、+、−1−の連続
で分極処理されている。この分極処理は、第5図に示す
ように、電歪素子11の厚ざ方向の表裏いずれか一方に
、共通電極15を付すとともに、他方に、互いに分離さ
れた分離電極16を付し、これらの電極を利用して行な
う。
For example, as shown in FIG. 4, the electrostrictive element 11 has a circumferential direction,
That is, polarization processing is performed in a sequence of +, +, -1- in the rotational direction of the rotor 20. As shown in FIG. 5, this polarization treatment involves attaching a common electrode 15 to either the front or back side of the electrostrictive element 11 in the thickness direction, and attaching separate electrodes 16 separated from each other to the other side. This is done using the following electrodes.

+は周波電圧の十が印加されたとき縮小し、−が印加さ
れたとき伸張する極性、逆に−は+が印加されたとき伸
張し、−が印加されたとき縮小する極性を示している。
+ indicates a polarity in which it contracts when a frequency voltage of 10 is applied and expands when - is applied; conversely, - indicates a polarity in which it expands when + is applied and contracts when - is applied. .

そしてこれらの分極処理電極に、一つおきに、位相の1
80°異なる周波電圧、すなわち例えばsin波とCO
S波を印加すると、電歪素子11に生じる伸縮により、
弾性体12の界面14に進行波が生じ、この進行波によ
り、回転子20が回転する。22.23は便宜的に示す
sin波電源とcos波電源である6分極処理電極に与
えるsin波とCOS波を逆転させると、回転子20の
回転方向が逆転する。
Then, every other polarized electrode is given one of the phases.
80° different frequency voltages, i.e. sine wave and CO
When an S wave is applied, the electrostrictive element 11 expands and contracts,
A traveling wave is generated at the interface 14 of the elastic body 12, and the rotor 20 is rotated by this traveling wave. 22.23 is a sine wave power source and a cosine wave power source shown for convenience, and when the sine wave and the COS wave applied to the six polarized electrodes are reversed, the rotation direction of the rotor 20 is reversed.

以上が特開昭58−148682号で提案されでいる電
歪モータの基本構成である。進行波の生じる理由等の詳
細は同公報に譲るが、このモータは既に寅用化されでい
る。
The above is the basic configuration of the electrostrictive motor proposed in JP-A-58-148682. The details of the reasons for the generation of traveling waves are left in the same publication, but this motor has already been widely used.

他方本出願人は、以上の電歪モータをヒシトに、進行波
によらない電歪モータを開発し、特許出願した。第6図
(A)、CB)はそのための分極処理の例と周波電圧源
25によって周波電圧を与える極、および回転子20の
回転方向の間係を示しでいる。この電歪モータは、電圧
印加極の左右に、該電圧印加極と同−極性と異極性の比
電圧印加機を設けるという、電歪素子11に与える分極
処理の基本原則を満たすことにより、単一位相の周波電
圧で駆動でき、しかも進行波でなく定在波で回転子20
を駆動できるという特徴を有している。
On the other hand, the present applicant has developed an electrostrictive motor that does not rely on traveling waves based on the electrostrictive motor described above, and has filed a patent application. FIGS. 6(A) and 6(CB) show an example of polarization processing for this purpose, the poles to which the frequency voltage is applied by the frequency voltage source 25, and the relationship in the rotational direction of the rotor 20. This electrostrictive motor satisfies the basic principle of polarization processing applied to the electrostrictive element 11, which is to provide specific voltage applying devices on the left and right sides of a voltage application pole with the same polarity and different polarity as the voltage application pole. The rotor 20 can be driven by a single-phase frequency voltage, and the rotor 20 is driven by a standing wave instead of a traveling wave.
It has the characteristic of being able to drive.

したがって同図(A)、(B)のように電圧印加極の左
右の極性を変えると、矢印で示す回転子20の回転方向
が逆転する。このモータの詳細な動作原理は、本発明の
問うところではないので、これ以上の説明は省略する。
Therefore, when the left and right polarities of the voltage application poles are changed as shown in FIGS. 2A and 2B, the direction of rotation of the rotor 20 indicated by the arrows is reversed. Since the detailed operating principle of this motor is not a concern of the present invention, further explanation will be omitted.

ところで以上のような電歪モータにおいて電歪素子11
に与える印加電圧は、電歪素子11の厚ざを一定とする
と、弾性体12の界面14に生じさせるべき波の大きざ
によって定まってしまい、上記従来構造では、印加電圧
を減らして省エネルギを図ることはできなかった。
By the way, in the electrostrictive motor as described above, the electrostrictive element 11
If the thickness of the electrostrictive element 11 is constant, the voltage applied to the electrostrictive element 11 is determined by the size of the wave to be generated at the interface 14 of the elastic body 12. In the conventional structure described above, it is possible to save energy by reducing the applied voltage. I couldn't figure it out.

「発明の目的」 本発明は、電歪素子の伸縮量を印加電圧の大小でなく構
造上拡大して弾性体に伝達できる電歪モータを得ること
、すなわち従来製画より小ざい駆動電圧によって、従来
製画と同等に作動する省エネルギ型の電歪モータを得る
ことを目的とする。
``Object of the Invention'' The present invention is to obtain an electrostrictive motor that can transmit the expansion and contraction of an electrostrictive element to an elastic body by expanding the amount of expansion and contraction of an electrostrictive element to an elastic body, not depending on the magnitude of the applied voltage. The purpose is to obtain an energy-saving electrostrictive motor that operates in the same manner as conventional motors.

「発明の概要J 本発明は、電歪素子を積層構造とするとともに、この積
層構造の電歪素子をその中間部の上下においで一方は伸
張古せ、他方は収縮させれば、低い駆動電圧によって弾
性体に必要な伸に8を生しさせることができるという着
想に基づいて完成されたものである。すなわち本発明は
、以上の電歪モータにおいて、弾性体に接合される電歪
素子をその厚さ方向の複数の層状電歪素子からなる積層
構造となすとともに、その中間部に共通電極を形成し、
この共通電極の上下の層状電歪素子間に、同一周波で位
相が180°異なる所定の周波電圧を印加することを特
徴としている。
"Summary of the Invention J The present invention provides an electrostrictive element having a laminated structure, and if the electrostrictive element of this laminated structure is stretched at the upper and lower middle portions, and the other is contracted, the driving voltage can be lowered. This invention was completed based on the idea that the elastic body can have the required elongation of It has a laminated structure consisting of a plurality of layered electrostrictive elements in the thickness direction, and a common electrode is formed in the middle part,
It is characterized in that predetermined frequency voltages of the same frequency but with a phase difference of 180° are applied between the layered electrostrictive elements above and below the common electrode.

「発明の実施例」 以下図示実施例について本発明を説明する。第1図は本
発明による電歪素子の積層構造の最も単純な実施例で、
電歪素子3]は二層の層状電歪素子31a、31bから
構成されている。そして両層状素子の中間には共通電極
32が位置し、両層状素子31a、31F)の表面には
、それぞれ位置を一致させて、分離電極33が付着形成
されでいる。これらの共通電極32および分離電極33
は、例えば銀ペーストによって構成される。
"Embodiments of the Invention" The present invention will be described below with reference to illustrated embodiments. FIG. 1 shows the simplest embodiment of the laminated structure of the electrostrictive element according to the present invention.
The electrostrictive element 3] is composed of two layered electrostrictive elements 31a and 31b. A common electrode 32 is located between both layered elements, and separation electrodes 33 are attached and formed on the surfaces of both layered elements 31a, 31F) at the same positions. These common electrode 32 and separate electrode 33
is composed of, for example, silver paste.

この層状電歪素子31a、311)には、以上の共通電
極32および分離電極331Fr利用して、所定の分極
処理が施され、これが弾性体12に結合されて振動子1
0となる。
The layered electrostrictive elements 31a, 311) are subjected to a predetermined polarization process using the common electrode 32 and the separated electrode 331Fr, and are coupled to the elastic body 12 to form the vibrator 1.
It becomes 0.

本発明は、このように電歪素子31を積層構造とした上
で、これに加える周波電圧の位相を中間の共通電極32
の上下で異ならせることにより、例えば従来の172の
低駆動電圧で、電歪素子31に従来と同じ伸縮を生じさ
せ、あるいは従来と同し駆動電圧であれば倍の伸縮を庄
じさて、弾性体12の界面に効果的な波を庄じさせよう
とするものである。
In the present invention, the electrostrictive element 31 has a laminated structure, and the phase of the frequency voltage applied to the electrostrictive element 31 is adjusted to the intermediate common electrode 32.
By making the upper and lower portions different, for example, with a conventional low driving voltage of 172, the electrostrictive element 31 can be caused to expand and contract the same as before, or with the same driving voltage as the conventional one, it can be made to expand and contract twice as much as before. The purpose is to generate effective waves at the interface of the body 12.

いま前述の進行波による電歪モータを例に説明すると、
層状電歪素子3]a、31t)の表裏の分離電極16に
は一つおきに、便宜上分けて示すsin波電源22とC
OS波電源23からの周波電圧が与えられる0本発明は
、これらの電源から表裏の分離電極16に至る回路中の
一方に、位相反転回路34.35を挿入し、表裏の同一
位置の層状電歪素子31a、31bに対して加えられる
周波電圧の位相@ +ao”異ならせたのである。つま
り、表の層状電歪素子31aに◆sin波(÷COS波
)が与えられでいるときには、裏の層状電歪素子31t
)には−5in波(−COS波)が与えられる。すると
、電歪素子31は全体としで、表裏の一方で伸び、他方
で縮むこととなるから、弾性素子12の界面14に同一
の進行波を生じさせようとするとき、従来装置の172
の電圧で駆動できることとなる。従来装置と同一の駆動
電圧を与えれば、界面14に生じる進行波は大きいもの
となる。
Let's take the aforementioned traveling wave electrostrictive motor as an example.
Separate electrodes 16 on the front and back sides of the layered electrostrictive element 3]a, 31t) are provided with sine wave power sources 22 and C, which are shown separately for convenience.
In the present invention, a frequency voltage is applied from the OS wave power source 23, a phase inversion circuit 34, 35 is inserted in one of the circuits from these power sources to the separation electrodes 16 on the front and back, and the layered voltage at the same position on the front and back is inserted. The phases of the frequency voltages applied to the strain elements 31a and 31b are made different by ``+ao''.In other words, when a ◆sin wave (÷COS wave) is applied to the layered electrostrictive element 31a on the front side, the phase of the frequency voltage applied to the strain elements 31a and 31b is made different. Layered electrostrictive element 31t
) is given a -5in wave (-COS wave). Then, the electrostrictive element 31 as a whole expands on one side and contracts on the other side, so when trying to generate the same traveling wave at the interface 14 of the elastic element 12, the conventional device's 172
This means that it can be driven with a voltage of . If the same driving voltage as in the conventional device is applied, the traveling wave generated at the interface 14 will be large.

以上は進行波による電歪モータの場合であるが、定在波
による電歪モータの場合も話は同様である。
The above is a case of an electrostrictive motor using a traveling wave, but the story is similar in the case of an electrostrictive motor using a standing wave.

以上の実施例では、共通電極32の上下にそれぞれ一層
の層状電歪素子31a、31bを設けたが、共通電極3
2の上下にそれぞれ複数の積層電歪素子を設C丈、これ
らの積層電歪素子間に駆動電圧を与えでもよい、この実
施例によると、各層状電歪素子の厚さをより薄くできる
ことから、駆動電圧をざらに低くすることができる。勿
論、駆動電圧の位相は、共通電極32の上下で異ならせ
る。
In the above embodiment, the layered electrostrictive elements 31a and 31b were provided above and below the common electrode 32, respectively.
A plurality of laminated electrostrictive elements may be provided above and below C length, respectively, and a driving voltage may be applied between these laminated electrostrictive elements.According to this embodiment, the thickness of each laminated electrostrictive element can be made thinner. , the drive voltage can be lowered considerably. Of course, the phase of the driving voltage is made different between the upper and lower portions of the common electrode 32.

なお本発明(よ、電歪素子3178直線状に展開するり
ニアモータにも勿論適用可能であり、この場合移動子は
、直線移動子となる。
Note that the present invention can of course be applied to a near motor in which the electrostrictive element 3178 is developed in a linear manner, and in this case, the mover is a linear mover.

「発明の効果」 以上のように本発明の電歪モータは、その駆動力を得る
ため・の電歪素子を積層構造とするとともに、その中間
に共通電極を介在させ、この共通電極の上下の層状電歪
素子間に、同一周波で位相が180°異なる所定の周波
電圧を印加するようにしたので、電歪素子の伸縮によっ
て弾性体の界面に生じる波を、より低い駆動電圧で得る
ことができる。あるいは同一の駆動電圧でより大きい波
を得ることができる。よって効率のよい省エネルギ型電
歪モータを得ることかできる。
"Effects of the Invention" As described above, the electrostrictive motor of the present invention has a laminated structure of the electrostrictive elements for obtaining the driving force, and has a common electrode interposed between them, and the upper and lower portions of the common electrode. By applying predetermined frequency voltages of the same frequency but with a phase difference of 180° between the layered electrostrictive elements, waves generated at the interface of the elastic body due to expansion and contraction of the electrostrictive elements can be obtained with a lower driving voltage. can. Alternatively, larger waves can be obtained with the same driving voltage. Therefore, an efficient and energy-saving electrostrictive motor can be obtained.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の電歪モータに用いる電歪素子の積層構
造と電極配貫の例を示す、第5図に対応する断面図、笥
2図は本発明の対象とする電歪モータの機械的構成例を
示す断面図、第3図は第2図のm−m線に沿う断面図、
第4図は電歪素子に対する分極処理と、これに加える周
波電圧の例を示す平面図、第5図は第4図のv−V線に
沿う模式断面図、第6図(A)、(B)は他の電歪モー
タにF3する分極処理と、これに加える周波電圧の例を
示す平面図である。 1o・・・振動子、11・・・電歪素子、12・・・弾
性体、14−・・界面、22.23.25・・・周波電
源、31・・・電歪素子、31a、31b・・・層状電
歪素子、32・・・共通電極、33・・・分離電極、3
4、35・・・位相反転回路。 特許出願人  アルプス電気株式会社 同代理人    三 浦 邦 夫 同   松井 茂 第2図 第3図 第4図 第5図 (A) CB) 第6図 手摩売ネ甫正”I!’(自発) 昭和61年12月 5日 特許庁長官  黒 1)明 雄  殿 1、事件の表示 2)発明の名称 電歪モータ 3、補正をする者 事件との関係  特許出願人 住 所  東京都大田区雪谷大塚町1番7号名 称 (
八09)アルプル電気株式会社代表者片岡勝太部 4、代理人 住 所  〒102東京都千代田区四番町3番地106
、補正の内容 (1)明細書第4頁第4行の「位相の180°」を「位
相の90°」に補正する。 以上
FIG. 1 is a sectional view corresponding to FIG. 5, showing an example of the laminated structure and electrode wiring of the electrostrictive element used in the electrostrictive motor of the present invention, and FIG. A sectional view showing an example of a mechanical configuration, FIG. 3 is a sectional view taken along line m-m in FIG. 2,
FIG. 4 is a plan view showing an example of the polarization process for the electrostrictive element and the frequency voltage applied thereto, FIG. 5 is a schematic cross-sectional view along the v-V line in FIG. 4, and FIGS. B) is a plan view showing an example of the polarization process of F3 to another electrostrictive motor and the frequency voltage applied thereto. 1o... Vibrator, 11... Electrostrictive element, 12... Elastic body, 14-... Interface, 22.23.25... Frequency power supply, 31... Electrostrictive element, 31a, 31b ...Layered electrostrictive element, 32...Common electrode, 33...Separate electrode, 3
4, 35...phase inversion circuit. Patent Applicant Alps Electric Co., Ltd. Agent Kunio Miura Shigeru Matsui Figure 2 Figure 3 Figure 4 Figure 5 (A) CB) Figure 6 Temauri Nehomasa “I!” (Spontaneous) December 5, 1988 Commissioner of the Japan Patent Office Kuro 1) Mr. Akio 1, Indication of the case 2) Name of the invention Electrostrictive motor 3, Person making the amendment Relationship to the case Patent applicant address Yukitani Otsuka, Ota-ku, Tokyo Town No. 1-7 Name (
809) Alpur Electric Co., Ltd. Representative Kataoka Kataoka 4, Agent address: 106-3 Yonban-cho, Chiyoda-ku, Tokyo 102
, Contents of correction (1) "180° phase" on page 4, line 4 of the specification is corrected to "90° phase."that's all

Claims (3)

【特許請求の範囲】[Claims] (1)弾性体に接合した電歪素子を有する振動子と、こ
の振動子の弾性体の界面に接触する移動子とを備え、上
記電歪素子は、その表裏間に所定の周波電圧を印加した
ときの伸縮により上記界面に生じる波を介し、上記移動
子に移動力を与えるように分極処理されている電歪モー
タにおいて、上記電歪素子をその厚さ方向の複数の層状
電歪素子からなる積層構造となすとともに、その中間部
に共通電極を形成し、この共通電極の上下の層状電歪素
子間に、同一周波で位相が180°異なる所定の周波電
圧を印加することを特徴とする電歪モータ。
(1) A vibrator having an electrostrictive element bonded to an elastic body, and a movable element that contacts the interface of the elastic body of the vibrator, and a predetermined frequency voltage is applied between the front and back sides of the electrostrictive element. In an electrostrictive motor that is polarized so as to apply a moving force to the movable element through waves generated at the interface due to expansion and contraction when the electrostrictive element is A common electrode is formed in the middle part of the laminated structure, and a predetermined frequency voltage having the same frequency but having a phase difference of 180° is applied between the layered electrostrictive elements above and below this common electrode. electrostrictive motor.
(2)特許請求の範囲第1項において、電歪素子の分極
処理は環状になされており、移動子は回転子である電歪
モータ。
(2) An electrostrictive motor according to claim 1, wherein the electrostrictive element is polarized in a ring shape, and the mover is a rotor.
(3)特許請求の範囲第1項において、電歪素子の分極
処理は直線状になされており、移動子は直線移動子であ
る電歪モータ。
(3) An electrostrictive motor according to claim 1, wherein the electrostrictive element is polarized linearly, and the moving element is a linear moving element.
JP61256385A 1986-10-28 1986-10-28 Electrostrictive motor Pending JPS63110976A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61256385A JPS63110976A (en) 1986-10-28 1986-10-28 Electrostrictive motor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61256385A JPS63110976A (en) 1986-10-28 1986-10-28 Electrostrictive motor

Publications (1)

Publication Number Publication Date
JPS63110976A true JPS63110976A (en) 1988-05-16

Family

ID=17291940

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61256385A Pending JPS63110976A (en) 1986-10-28 1986-10-28 Electrostrictive motor

Country Status (1)

Country Link
JP (1) JPS63110976A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02151278A (en) * 1988-11-29 1990-06-11 Matsushita Electric Ind Co Ltd Electrode structure of ultrasonic motor
JP2004254406A (en) * 2003-02-19 2004-09-09 Seiko Instruments Inc Ultrasonic motor and electronic apparatus with the same

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02151278A (en) * 1988-11-29 1990-06-11 Matsushita Electric Ind Co Ltd Electrode structure of ultrasonic motor
JP2004254406A (en) * 2003-02-19 2004-09-09 Seiko Instruments Inc Ultrasonic motor and electronic apparatus with the same
JP4714405B2 (en) * 2003-02-19 2011-06-29 セイコーインスツル株式会社 Ultrasonic motor and electronic device with ultrasonic motor

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