JP2585574B2 - Ultrasonic drive using a ring-shaped piezoelectric vibrator - Google Patents
Ultrasonic drive using a ring-shaped piezoelectric vibratorInfo
- Publication number
- JP2585574B2 JP2585574B2 JP62048515A JP4851587A JP2585574B2 JP 2585574 B2 JP2585574 B2 JP 2585574B2 JP 62048515 A JP62048515 A JP 62048515A JP 4851587 A JP4851587 A JP 4851587A JP 2585574 B2 JP2585574 B2 JP 2585574B2
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric element
- ring
- shaped piezoelectric
- driven body
- shaped
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000126 substance Substances 0.000 claims description 7
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 238000003786 synthesis reaction Methods 0.000 claims 1
- 238000006073 displacement reaction Methods 0.000 description 11
- 230000005684 electric field Effects 0.000 description 9
- 238000010586 diagram Methods 0.000 description 5
- 239000000919 ceramic Substances 0.000 description 4
- 230000002093 peripheral effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/206—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using only longitudinal or thickness displacement, e.g. d33 or d31 type devices
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
- H02N2/001—Driving devices, e.g. vibrators
- H02N2/002—Driving devices, e.g. vibrators using only longitudinal or radial modes
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/026—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors by pressing one or more vibrators against the driven body
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/103—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors by pressing one or more vibrators against the rotor
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Description
【発明の詳細な説明】 産業上の利用分野 本発明は、リング状の圧電体振動子によって被駆動体
を駆動するリング状圧電体振動子を使用する超音波駆動
装置に関するものである。Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ultrasonic driving apparatus using a ring-shaped piezoelectric vibrator for driving a driven body by a ring-shaped piezoelectric vibrator.
従来技術 現在提案されている超音波モータは、円環形圧電セラ
ミックの片面に2組の電極を接着し、それぞれの電極群
によって励振される定在波が位置的に90°ずれるように
電極を配置し、さらにこれら2組の電極群に印加する交
流電界が時間的に90°位相差がある2組の発振器をそれ
ぞれ接続している。Conventional technology The currently proposed ultrasonic motor has two sets of electrodes adhered to one side of a ring-shaped piezoelectric ceramic, and the electrodes are arranged so that the standing waves excited by the respective electrode groups are shifted by 90 ° in position. Further, two sets of oscillators having an AC electric field applied to these two sets of electrodes having a 90 ° phase difference in time are connected to each other.
このように構成した従来の超音波モータは、2組の発
振器からそれぞれの電極群に交流電界を印加することに
よって円環形圧電セラミックの周囲の表面に90°位相が
ずれた2つの定在波が発生し、この2の定在波が合成さ
れた進行波が発生する。従って、円環形圧電セラミック
の上に接着された櫛形の振動体の上に円環形の移動体を
載置して接触を強くすると、移動体が進行波によって移
動される。In the conventional ultrasonic motor configured as described above, two standing waves having phases shifted by 90 ° are applied to the surface around the ring-shaped piezoelectric ceramic by applying an AC electric field to each electrode group from two sets of oscillators. Then, a traveling wave in which the two standing waves are combined is generated. Therefore, when the ring-shaped moving body is placed on the comb-shaped vibrating body adhered on the ring-shaped piezoelectric ceramic and the contact is strengthened, the moving body is moved by the traveling wave.
発明が解決しようとする問題点 しかしながら、この従来の超音波モータでは、複数の
電極と、これらの電極に交流電界を印加する2組の発振
器が必要であり、電極の構成が複雑で、また振動体の構
成も複雑であり、コストが高くなるという問題があっ
た。Problems to be Solved by the Invention However, this conventional ultrasonic motor requires a plurality of electrodes and two sets of oscillators for applying an AC electric field to these electrodes, so that the configuration of the electrodes is complicated, The structure of the body is complicated, and there has been a problem that the cost is high.
問題点を解決するための手段 本発明は、上記問題点を解決するために、厚み方向に
分極したリング状圧電素子の両面に電極を装着し、該電
極に発振器から交流電圧を印加することにより、上記圧
電素子の厚み方向の振動と径方向の振動との合成によ
り、上記圧電素子の内径の中心に向う進行波を上記圧電
素子の両面に連続的に発生させ、上記圧電素子の上記電
極の上に振動伝達物質を装着し、該振動伝達物質に被駆
動体を組合わせたことを特徴とする。Means for Solving the Problems The present invention solves the above problems by mounting electrodes on both sides of a ring-shaped piezoelectric element polarized in the thickness direction, and applying an AC voltage from an oscillator to the electrodes. By combining the vibration in the thickness direction and the vibration in the radial direction of the piezoelectric element, a traveling wave toward the center of the inner diameter of the piezoelectric element is continuously generated on both surfaces of the piezoelectric element, and the electrodes of the piezoelectric element It is characterized in that a vibration transmitting substance is mounted thereon, and a driven body is combined with the vibration transmitting substance.
作用 本発明によれば、リング状圧電素子の両面に設けた電
極に交流電圧を印加すると、圧電素子の厚み方向の振動
と径方向の振動との合成により、圧電素子の内径の中心
に向う進行波を圧電素子の両面に連続的に発生すること
ができるので、この連続的進行波を圧電素子の電極の上
に装着した振動伝達物質により取り出し、この振動伝達
物質に被駆動体を組合わせて被駆動体を駆動するもので
ある。According to the present invention, when an AC voltage is applied to the electrodes provided on both sides of the ring-shaped piezoelectric element, the piezoelectric element travels toward the center of the inner diameter of the piezoelectric element by combining the vibration in the thickness direction and the vibration in the radial direction of the piezoelectric element. Since a wave can be continuously generated on both sides of the piezoelectric element, the continuous traveling wave is extracted by a vibration transmitting substance mounted on the electrode of the piezoelectric element, and a driven body is combined with the vibration transmitting substance. This is for driving the driven body.
実施例 本発明の実施例を説明する前に原理を説明する。ま
ず、第1図に示した圧電セラミック等のリング状圧電素
子1を厚み方向に分極し、リング状圧電素子の両面に装
着した電極2、3を介して発振器4より交流電界を印加
すると、第2図に示すように圧電素子1の外周から内周
に向って矢印で示すように表面変位が移動することを発
見した。これは、第3図の圧電素子の断面図で説明する
と、まず厚み方向、即ち矢印Aの方向に圧電素子1が膨
らむ時、点線4で示すように内径は変更せず、外径が径
方向に縮むように膨らむため、この膨みが内径方向へ移
動する表面変位、すなわち矢印Bとなって現われるもの
である。また圧電素子1が一点鎖線5に示すように厚み
方向すなわち矢印Cの方向に縮む場合には、圧電素子1
の内径は殆ど変わらず、厚み方向に縮みながら外径方向
に膨らむため、圧電素子1の内部で矢印Dの方向に変位
が現われるが、この変位は表面には全く現われず、従っ
て内径方向へ移動する表面変位(矢印B)のみが圧電素
子1の両面に発生することになる。なお、上記説明で
は、圧電素子1の厚み方向に交流電界を印加したが、内
周と外周方向に交流電界を印加しても同様に内周方向へ
移動する表面変位が現われる。Embodiment Before describing an embodiment of the present invention, the principle will be described. First, when a ring-shaped piezoelectric element 1 such as a piezoelectric ceramic shown in FIG. 1 is polarized in a thickness direction and an AC electric field is applied from an oscillator 4 through electrodes 2 and 3 mounted on both surfaces of the ring-shaped piezoelectric element, As shown in FIG. 2, it has been found that the surface displacement moves from the outer periphery to the inner periphery of the piezoelectric element 1 as shown by arrows. This will be described with reference to the cross-sectional view of the piezoelectric element shown in FIG. 3. First, when the piezoelectric element 1 expands in the thickness direction, that is, in the direction of arrow A, the inner diameter does not change and the outer diameter changes This bulge appears as a surface displacement moving in the inner diameter direction, that is, an arrow B. When the piezoelectric element 1 contracts in the thickness direction, that is, in the direction of arrow C, as indicated by the one-dot chain line 5, the piezoelectric element 1
The inner diameter of the piezoelectric element 1 hardly changes and expands in the outer diameter direction while shrinking in the thickness direction, so that a displacement appears in the direction of the arrow D inside the piezoelectric element 1, but this displacement does not appear on the surface at all, and therefore moves in the inner diameter direction. Only the surface displacement (arrow B) occurs on both surfaces of the piezoelectric element 1. In the above description, an AC electric field is applied in the thickness direction of the piezoelectric element 1. However, even when an AC electric field is applied in the inner and outer peripheral directions, a surface displacement that moves in the inner peripheral direction also appears.
次に、圧電素子1の内周に向う変位を被駆動体を駆動
する本発明の実施例を説明する。Next, a description will be given of an embodiment of the present invention for driving a driven body with a displacement toward the inner periphery of the piezoelectric element 1.
第4図(a)に示すように、超音波振動子1の一部に
接触子7を接着し、また第4図(b)に示すように被駆
動体8として、回転軸9を両側に突出した円板によって
構成する。そして、第5図に示すように、被駆動体8に
圧電素子1の接触子7を接触させ、圧電素子1に交流電
界をかける。ここで、被駆動体8と圧電素子1の接触子
9の位置関係は、接触子9の変位の移動方向(矢印)と
被駆動体8の回転方向(被駆動体8の中心を通る線に対
して直交した方向)を一致させることである。As shown in FIG. 4 (a), a contact 7 is bonded to a part of the ultrasonic vibrator 1, and as shown in FIG. It is composed of a protruding disk. Then, as shown in FIG. 5, the contact 7 of the piezoelectric element 1 is brought into contact with the driven body 8 to apply an AC electric field to the piezoelectric element 1. Here, the positional relationship between the driven body 8 and the contact 9 of the piezoelectric element 1 is based on the movement direction of the displacement of the contact 9 (arrow) and the rotation direction of the driven body 8 (a line passing through the center of the driven body 8). (A direction orthogonal to the direction).
本実施例はこのように構成することにより、被駆動体
8を駆動することができる。According to this embodiment, the driven body 8 can be driven by such a configuration.
第6図は、上記原理を使用した本発明の1実施例の駆
動装置の構成図で、リング状の圧電素子1がケース10に
支持体11によって固定され、圧電素子1の厚み方向の上
部に金属または他の部材の接触板12が設けられている。
この接触板12は電極2及び3を厚み方向に設けた場合
は、この電極2または3と共通にしてもよい。またリン
グ状の圧電素子1の中心孔1cを通して被駆動体8の回転
軸9がケース10に設けられたベアリング14、15で指示さ
れ、被駆動体8を接触板12に接触させる。この被駆動体
8と接触板12の接触を強くするため、被駆動体8の接触
板12の反対側にベアリング17で指示したローラ16をばね
18で押圧するように構成する。FIG. 6 is a configuration diagram of a driving device according to an embodiment of the present invention using the above principle, in which a ring-shaped piezoelectric element 1 is fixed to a case 10 by a support 11 and is disposed above the piezoelectric element 1 in the thickness direction. A metal or other member contact plate 12 is provided.
When the electrodes 2 and 3 are provided in the thickness direction, the contact plate 12 may be shared with the electrodes 2 or 3. Further, the rotation shaft 9 of the driven body 8 is directed by bearings 14 and 15 provided in the case 10 through the center hole 1c of the ring-shaped piezoelectric element 1 to bring the driven body 8 into contact with the contact plate 12. In order to strengthen the contact between the driven body 8 and the contact plate 12, a roller 16 indicated by a bearing 17 is mounted on the opposite side of the driven body 8 from the contact plate 12 by a spring.
It is configured to press at 18.
このように構成した本実施例の駆動装置では、圧電素
子1に発振器から交流電界が印加されると、前述の原理
により被駆動体8が回転するので、この回転トルクを回
転軸9より取り出すことができる。In the driving device of the present embodiment configured as described above, when an AC electric field is applied to the piezoelectric element 1 from the oscillator, the driven body 8 rotates according to the above-described principle. Can be.
第7図は、本発明の他の実施例の駆動装置の構成図
で、1a、1bは圧電素子、7a、7bは接触板、8は被駆動
体、9は回転軸、10はケース、14、15はベアリング、18
はばねであり、これらの構成は上記実施例とほぼ同じで
あるので説明は省略するが、本実施例では、被駆動体8
を圧電素子1a、1bで挟持し、圧電素子1bをばね18で被駆
動体8の法へ押圧する。FIG. 7 is a configuration diagram of a driving device according to another embodiment of the present invention, wherein 1a and 1b are piezoelectric elements, 7a and 7b are contact plates, 8 is a driven body, 9 is a rotating shaft, 10 is a case, 14 , 15 is a bearing, 18
Are springs, and their configurations are substantially the same as those in the above-described embodiment, and therefore description thereof will be omitted.
Is held between the piezoelectric elements 1a and 1b, and the piezoelectric element 1b is pressed by the spring 18 against the driven member 8.
このように構成した本実施例の駆動装置においては、
圧電素子1a、1bが同じ強さの表面変位を発生する場合
は、前述の実施例の倍の強さで被駆動体8を回転するこ
とができる。In the driving device of the present embodiment configured as described above,
When the piezoelectric elements 1a and 1b generate the same surface displacement, the driven body 8 can be rotated with twice the strength of the above-described embodiment.
第8図は、本発明の他の実施例の駆動装置の構成図
で、圧電素子1の上に被駆動体8として回転体19を接触
させ、圧電素子1の表面変位が発生する本向と反対方向
に回転体19が回転するように回転軸20を軸受21、22で支
持し、ばね23、24で回転体を押圧する。FIG. 8 is a configuration diagram of a driving device according to another embodiment of the present invention, in which a rotating body 19 is brought into contact with a piezoelectric element 1 as a driven body 8, and a surface displacement of the piezoelectric element 1 occurs. The rotating shaft 20 is supported by bearings 21 and 22 so that the rotating body 19 rotates in the opposite direction, and the rotating body is pressed by springs 23 and 24.
このように構成した本実施例においても、回転体19を
回転することができる。Also in the present embodiment configured as described above, the rotating body 19 can be rotated.
第9図は、本発明の他の実施例の駆動装置の構成図
で、圧電素子1の接触子7の上に棒体25をベアリング2
6、27で軸方向に摺動するように支持し、ばね28、29で
押圧する。FIG. 9 is a block diagram of a driving device according to another embodiment of the present invention, in which a rod 25 is mounted on a contact 7 of a piezoelectric element 1 with a bearing 2.
It is slidably supported in the axial direction by 6, 27 and pressed by springs 28, 29.
このように構成した本実施例では、棒体を軸方向に駆
動することができ、リニアモータとして作動される。In the present embodiment configured as described above, the rod can be driven in the axial direction, and is operated as a linear motor.
発明の効果 以上の説明から明らかなように、本発明は、リング状
の圧電素子の厚み方向または径方向に交流電界をかける
ことにより発生する中心方向へ移動する表面変位によっ
て、駆動体を駆動することができ、構成が簡単で、製造
が容易で、コストを安くすることができるばかりでな
く、トルクを大きく取ることができる駆動装置をを提供
することができるという利点がある。Advantageous Effects of the Invention As is apparent from the above description, the present invention drives a driving body by a surface displacement that moves toward a center generated by applying an AC electric field in a thickness direction or a radial direction of a ring-shaped piezoelectric element. In addition, there is an advantage that a drive device that can not only be simple in configuration, easy to manufacture and low in cost but also can take large torque can be provided.
第1図はリング状の圧電素子の断面図、第2図はリング
状の圧電素子の平面図、第3図の本発明の駆動装置の原
理を説明するための図、第4図は本発明の超音波モータ
の回転子の平面図、第5図は本発明の実施例の超音波モ
ータの断面図、第6図は本発明の他の実施例の超音波モ
ータの断面図、第7図〜第9図は本発明の他の実施例の
構成図である。 1……圧電素子、2、3……電極、4……発振器、5…
…回転子、6……翼部、7……ケース、8……支持体、
9……接触板、10……回転軸、11……ベアリング、12…
…ボール、13……板ばね、14……ベアリング、15……ロ
ーラ支持体、16……ローラ、17……ばね。1 is a sectional view of a ring-shaped piezoelectric element, FIG. 2 is a plan view of the ring-shaped piezoelectric element, FIG. 3 is a view for explaining the principle of the driving device of the present invention, and FIG. FIG. 5 is a sectional view of an ultrasonic motor according to an embodiment of the present invention, FIG. 6 is a sectional view of an ultrasonic motor according to another embodiment of the present invention, and FIG. FIG. 9 to FIG. 9 are configuration diagrams of another embodiment of the present invention. 1 ... piezoelectric element, 2, 3 ... electrode, 4 ... oscillator, 5 ...
... rotor, 6 ... wings, 7 ... case, 8 ... support,
9 Contact plate, 10 Rotary shaft, 11 Bearing, 12
... ball, 13 ... leaf spring, 14 ... bearing, 15 ... roller support, 16 ... roller, 17 ... spring.
Claims (2)
面に電極を装着し、該電極に発振器から交流電圧を印加
することにより、上記圧電素子の厚み方向の振動と径方
向の振動との合成により、上記圧電素子の内径の中心に
向う進行波を上記圧電素子の両面に連続的に発生させ、
上記圧電素子の上記電極の上に振動伝達物質を装着し、
該振動伝達物質に被駆動体を組合わせたことを特徴とす
るリング状圧電体振動子を使用する超音波駆動装置。An electrode is mounted on both sides of a ring-shaped piezoelectric element polarized in a thickness direction, and an AC voltage is applied to the electrode from an oscillator, so that a vibration in the thickness direction and a vibration in a radial direction of the piezoelectric element are generated. By synthesis, a traveling wave toward the center of the inner diameter of the piezoelectric element is continuously generated on both surfaces of the piezoelectric element,
A vibration transmitting substance is mounted on the electrode of the piezoelectric element,
An ultrasonic driving device using a ring-shaped piezoelectric vibrator, wherein a driven body is combined with the vibration transmitting material.
とを特徴とする特許請求の範囲第1項記載のリング状圧
電体振動子を使用する超音波駆動装置。2. An ultrasonic driving apparatus using a ring-shaped piezoelectric vibrator according to claim 1, wherein said vibration transmitting substance is a wear-resistant substance.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62048515A JP2585574B2 (en) | 1987-03-02 | 1987-03-02 | Ultrasonic drive using a ring-shaped piezoelectric vibrator |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62048515A JP2585574B2 (en) | 1987-03-02 | 1987-03-02 | Ultrasonic drive using a ring-shaped piezoelectric vibrator |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS63217982A JPS63217982A (en) | 1988-09-12 |
JP2585574B2 true JP2585574B2 (en) | 1997-02-26 |
Family
ID=12805503
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62048515A Expired - Lifetime JP2585574B2 (en) | 1987-03-02 | 1987-03-02 | Ultrasonic drive using a ring-shaped piezoelectric vibrator |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2585574B2 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2978177B2 (en) * | 1989-04-25 | 1999-11-15 | 旭光学工業株式会社 | Surface traveling wave drive actuator |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5996883A (en) * | 1982-11-25 | 1984-06-04 | Canon Inc | Vibration wave motor |
JPS602081A (en) * | 1983-06-16 | 1985-01-08 | Matsushita Electric Ind Co Ltd | Rotary drive actuator |
-
1987
- 1987-03-02 JP JP62048515A patent/JP2585574B2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPS63217982A (en) | 1988-09-12 |
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