JPH0532995B2 - - Google Patents

Info

Publication number
JPH0532995B2
JPH0532995B2 JP58130717A JP13071783A JPH0532995B2 JP H0532995 B2 JPH0532995 B2 JP H0532995B2 JP 58130717 A JP58130717 A JP 58130717A JP 13071783 A JP13071783 A JP 13071783A JP H0532995 B2 JPH0532995 B2 JP H0532995B2
Authority
JP
Japan
Prior art keywords
elastic body
piezoelectric element
electrode
polarization
stator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58130717A
Other languages
Japanese (ja)
Other versions
JPS6022481A (en
Inventor
Toshio Sashita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shinsei Industries Co Ltd
Original Assignee
Shinsei Industries Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinsei Industries Co Ltd filed Critical Shinsei Industries Co Ltd
Priority to JP58130717A priority Critical patent/JPS6022481A/en
Publication of JPS6022481A publication Critical patent/JPS6022481A/en
Publication of JPH0532995B2 publication Critical patent/JPH0532995B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/16Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using travelling waves, i.e. Rayleigh surface waves
    • H02N2/163Motors with ring stator

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Description

【発明の詳細な説明】 (産業上の利用分野) この発明は、各種分野で駆動装置として有用な
超音波モータに関するものである。
DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to an ultrasonic motor useful as a drive device in various fields.

(従来の技術とその課題) 従来より、駆動源として電磁力を応用した各種
のモータ装置が様々な用途に広く使われている。
しかしながら、これらの従来のモータ装置の場合
には、その大きさ、重量及び回転力などは用いら
れる材料によつてその一定の制限があり、小型
化、軽量化等が難しいという面があつた。
(Prior art and its problems) Various motor devices that apply electromagnetic force as a drive source have been widely used for various purposes.
However, in the case of these conventional motor devices, there are certain limitations on the size, weight, rotational force, etc. depending on the materials used, and it is difficult to reduce the size and weight of the motor devices.

それと言うのも、使用する材料の磁気的特性等
によつて制約されるからである。
This is because it is limited by the magnetic properties of the materials used.

一方、これらの従来のモータ装置に代替する装
置として、本出願人によつて、超音波振動を利用
したモータ装置、すなわち超音波振動子である弾
性体の表面において圧電素子によつて励振される
振動波をこれに加圧接触する動体の一方向運動に
変換する駆動装置が提案されている。
On the other hand, as an alternative to these conventional motor devices, the applicant has proposed a motor device that uses ultrasonic vibration, that is, a motor device that is excited by a piezoelectric element on the surface of an elastic body that is an ultrasonic vibrator. A drive device has been proposed that converts a vibration wave into unidirectional motion of a moving object that presses into contact with the vibration wave.

超音波の持つ強力な振動エネルギーを回転又は
直進運動に変換することによつて、小型にして軽
量なモータ装置を実現したものである。
By converting the powerful vibrational energy of ultrasonic waves into rotational or linear motion, a small and lightweight motor device is realized.

この超音波モータ装置は優れた特徴を持つもの
として注目されているが、具体的にはさらに改善
すべき課題が残されてもいた。
Although this ultrasonic motor device has attracted attention as having excellent features, there are still concrete issues that need to be improved.

すなわち、一般に圧電素子は、その圧電効果を
もたせるために、最初に高い直流電圧を印加し、
分極処理を施さなければならないことは周知であ
る。
In other words, generally, in order to produce the piezoelectric effect, a piezoelectric element is first applied with a high DC voltage.
It is well known that polarization treatment must be performed.

特に、この出願の発明者が提案してきた超音波
モータにおいては、固定子に屈曲波を生じさせる
ために、圧電素子に対してその厚さ方向に半波長
おきに互いに逆方向の分極処理をしなければなら
ない。
In particular, in the ultrasonic motor proposed by the inventor of this application, in order to generate bending waves in the stator, the piezoelectric element is polarized in opposite directions every half wavelength in the thickness direction. There must be.

換言すれば、半波長おきに相互に逆方向に分極
させるためには、電極をそれぞれ一体化すること
なく、個々に分断しなければならない。そこで、
超音波モータに用いる圧電素子は多数の分極用電
極を有し、分断された各分極を一体化して圧電素
子を半波長おきに互いに逆方向の伸縮をさせ、そ
れによつて屈曲波の発生を得ている。
In other words, in order to polarize the electrodes in opposite directions at every half wavelength, the electrodes must be separated into individual parts without being integrated. Therefore,
The piezoelectric element used in an ultrasonic motor has a large number of polarization electrodes, and by integrating the divided polarizations, the piezoelectric element is expanded and contracted in opposite directions every half wavelength, thereby generating bending waves. ing.

このため、分極処理後、それらの電極間をハン
ダ付け、または、導電塗料の塗布、または渡り線
等で導通させる必要があつた。
Therefore, after the polarization process, it was necessary to connect these electrodes by soldering, applying conductive paint, or connecting wires.

しかしながら、これらの従来の導通手段では、
その作業がめんどうで、かつ信頼性も低いという
問題があつた。
However, with these conventional conduction means,
The problem was that the work was tedious and unreliable.

(課題を解決するための手段) そこで、この発明は、上記の課題を解決するも
のとして、固定子と動体とを有する超音波モータ
であつて、固定子は、弾性体と、圧電素子と、分
極用電極とを有し、分極用電極は圧電素子と弾性
体との間に介在されたものである超音波モータを
提供する。
(Means for Solving the Problems) Therefore, the present invention solves the above problems by providing an ultrasonic motor having a stator and a moving body, wherein the stator includes an elastic body, a piezoelectric element, The present invention provides an ultrasonic motor having a polarizing electrode, the polarizing electrode being interposed between the piezoelectric element and the elastic body.

(作 用) より具体的には、たとえばこの発明は、固定子
の弾性体に金属等の導電材を使用し、圧電素子の
分極用電極面と弾性体面とを相互に加圧接着等に
より電極間導通させて一つの電極として形成し、
ハンダ付け、導電塗料、渡り線等による導通作業
の不要化と信頼性の向上を図る。
(Function) More specifically, for example, the present invention uses a conductive material such as metal for the elastic body of the stator, and connects the polarization electrode surface of the piezoelectric element and the elastic body surface to each other by pressure bonding or the like. conduction between them to form one electrode,
The aim is to eliminate the need for continuity work such as soldering, conductive paint, and crossover wires, and to improve reliability.

(実施例) 添付した図面の第1図はリング状固定子の断面
図を示しており、圧電素子2の上面には外部電極
4があり、下面には分極用電極3がある。この分
極用電極3は金属弾性体1に固定支持されている
が、このことは、加圧接着による機械的固定支持
と同時に、分極用電極3と弾性体1とを電気的に
導通させる機能をも併せ有している。
(Example) FIG. 1 of the attached drawings shows a cross-sectional view of a ring-shaped stator, in which an external electrode 4 is provided on the upper surface of the piezoelectric element 2, and a polarization electrode 3 is provided on the lower surface. This polarization electrode 3 is fixedly supported by the metal elastic body 1, which has the function of providing electrical continuity between the polarization electrode 3 and the elastic body 1 at the same time as being mechanically fixed and supported by pressure bonding. It also has

そして、弾性体1、圧電素子2および分極用電
極3とによつて固定子を構成し、分極用電極3
は、圧電素子2と弾性体1との間に介在されてい
る。
The elastic body 1, the piezoelectric element 2, and the polarization electrode 3 constitute a stator, and the polarization electrode 3
is interposed between the piezoelectric element 2 and the elastic body 1.

弾性体1には、図示してはいないが、動体が当
接されて、圧電素子2によつて励振された弾性体
1の進行波が、この動体を駆動する。
Although not shown, a moving body comes into contact with the elastic body 1, and the traveling wave of the elastic body 1 excited by the piezoelectric element 2 drives the moving body.

第2図もまたリング状固定子の断面図を示して
いる。この例の場合には、外部電極4および分極
用電極3を有している圧電素子2が弾性体1の溝
にはめ込まれ、さらに、弾性体1の上面1aでか
しめられ、固定支持されると同時に分極用電極3
と弾性体1とが電気的に導通されている。
FIG. 2 also shows a cross-sectional view of the ring-shaped stator. In this example, a piezoelectric element 2 having an external electrode 4 and a polarization electrode 3 is fitted into a groove of an elastic body 1, and is further caulked with the upper surface 1a of the elastic body 1 to be fixedly supported. At the same time, polarization electrode 3
and the elastic body 1 are electrically connected.

第3図は円筒状固定子の断面図を示し、外部電
極4および分極用電極3を有している圧電素子2
が円筒状の弾性体1の内周部に圧入または接着に
より固定支持され、同時に分極用電極3と弾性体
1とが電気的に導通されている。
FIG. 3 shows a cross-sectional view of a cylindrical stator, in which a piezoelectric element 2 having an external electrode 4 and a polarization electrode 3 is shown.
is fixedly supported on the inner circumference of the cylindrical elastic body 1 by press-fitting or adhesive, and at the same time, the polarization electrode 3 and the elastic body 1 are electrically connected.

(発明の効果) この発明は、以上説明したように、分極処理を
した分極用電極面と弾性体面とを相互に接触させ
て固定支持するため、従来のような導通作業工程
という大きなコスト負担を避けることができ、同
時に信頼性を大巾に向上させることができる。
(Effects of the Invention) As explained above, the present invention fixes and supports the polarized electrode surface and the elastic body surface, which have been polarized, in contact with each other, thereby eliminating the large cost burden of the conventional conduction process. This can be avoided and, at the same time, reliability can be greatly improved.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は圧電素子をリング状弾性体に加圧接着
させた例を示した断面図、第2図は、圧電素子を
リング状弾性体にかしめにより固定支持した例を
示した断面図、および第3図は、圧電素子を円筒
状弾性体に圧入または接着により固定支持した例
を示した断面図である。 1……弾性体、1a……弾性体上面、2……圧
電素子、3……分極用電極、4……外部電極。
FIG. 1 is a cross-sectional view showing an example in which a piezoelectric element is bonded to a ring-shaped elastic body under pressure, FIG. 2 is a cross-sectional view showing an example in which a piezoelectric element is fixedly supported on a ring-shaped elastic body by caulking, FIG. 3 is a sectional view showing an example in which a piezoelectric element is fixedly supported by press-fitting or adhesion into a cylindrical elastic body. DESCRIPTION OF SYMBOLS 1... Elastic body, 1a... Upper surface of elastic body, 2... Piezoelectric element, 3... Polarization electrode, 4... External electrode.

Claims (1)

【特許請求の範囲】[Claims] 1 固定子と動体とを有する超音波モータであつ
て、固定子は、弾性体1と、圧電素子2と、分極
用電極3とを有し、分極用電極3は圧電素子2と
弾性体1との間に介在されたものである超音波モ
ータ。
1 An ultrasonic motor having a stator and a moving body, wherein the stator has an elastic body 1, a piezoelectric element 2, and a polarization electrode 3, and the polarization electrode 3 has a piezoelectric element 2 and an elastic body 1. An ultrasonic motor that is interposed between the
JP58130717A 1983-07-18 1983-07-18 Stator of surface wave motor Granted JPS6022481A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58130717A JPS6022481A (en) 1983-07-18 1983-07-18 Stator of surface wave motor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58130717A JPS6022481A (en) 1983-07-18 1983-07-18 Stator of surface wave motor

Publications (2)

Publication Number Publication Date
JPS6022481A JPS6022481A (en) 1985-02-04
JPH0532995B2 true JPH0532995B2 (en) 1993-05-18

Family

ID=15040937

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58130717A Granted JPS6022481A (en) 1983-07-18 1983-07-18 Stator of surface wave motor

Country Status (1)

Country Link
JP (1) JPS6022481A (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6426376A (en) * 1987-07-20 1989-01-27 Aisin Seiki Ultrasonic motor
JPH0787709B2 (en) * 1987-11-06 1995-09-20 日本電気株式会社 Ultrasonic motor and its driving method
JPH01126179A (en) * 1987-11-06 1989-05-18 Nec Corp Ultrasonic motor
CN106452166A (en) * 2016-09-07 2017-02-22 四川源鑫瑞科微执行器有限公司 Toggle mechanism and toggle type piezoelectric actuator using same

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59107309A (en) * 1982-12-13 1984-06-21 Canon Inc Lens driving device using oscillatory wave motor

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59107309A (en) * 1982-12-13 1984-06-21 Canon Inc Lens driving device using oscillatory wave motor

Also Published As

Publication number Publication date
JPS6022481A (en) 1985-02-04

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