JPS63110789A - Apparatus for forming circuit - Google Patents

Abstract

(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a circuit forming apparatus that forms a predetermined circuit by discharging a liquid circuit forming material onto an electrical substrate material or the like.

[Conventional technology] Conventionally, there is a device of this type as shown in FIG.

In the figure, reference numeral 1 denotes a moving table on which the substrate material 2 is placed, and it moves at a constant speed in the horizontal direction, that is, in the X and Y directions (indicated by arrows in the figure), by a predetermined drive device according to a predetermined circuit formation pattern. Move with. Reference numeral 3 denotes a nozzle containing a liquid circuit forming material P (hereinafter referred to as paste), with a minute discharge hole 3a formed at the lower end, and a tube 4 connected to the upper surface for supplying compressed air. has been done.

5 has a nozzle holding part 5a, and by rotating the ball screw shaft, vertical force (
It is an elevating body that moves up and down in the Z direction), and a ball nut 8 that is screwed into a ball screw shaft 7 is fixed.

FIG. 7 is a block diagram showing the control system of the conventional circuit-forming bag.

In the figure, 9 is an air pressure source that sends out compressed air at a predetermined pressure, 10 is a solenoid valve interposed between this air pressure source 9 and the nozzle 3, 11 is a table drive device that drives the moving table 1, and 12 13 is a ROM that stores control programs and the like, and 13 is a CPU that controls the operation of the table driving device 2211 and the opening and closing of the solenoid valve 1o.

A conventional circuit forming device is configured as described above.
At the start of circuit formation, the solenoid valve 1o is opened in response to an opening/closing signal output from the CPU 13, compressed air at a predetermined pressure is fed into the nozzle 3 from the air pressure source 9, and the paste P is discharged. At the same time, the moving table 1 moves according to a predetermined circuit pattern, and the paste P is discharged onto the substrate material 2. In addition, in this apparatus, there are mainly pastes P that can be used for conductors, insulators, resistors, etc. All of these are made by diffusing minute metal particles into a highly viscous solution, and after the paste P has been discharged, it is dried and fired at a high temperature of 800°C to 1000°C to provide a specified electric current. characteristics are obtained.

In addition, the substrate material 2 to be used is the usual 96% alumina (A120+
), etc., is used.

[Problems to be Solved by the Invention] By the way, there are various shapes of circuit patterns, and when a nozzle draws a circuit film layer on a substrate.

The table movement speed with respect to the nozzle varies depending on the shape of the circuit pattern. This will be explained using examples shown in FIGS. 8 and 9.

FIG. 8 shows a case where the nozzle draws a straight line in the X direction, and then bends 90 degrees in the Y direction to draw the straight line.

That is, the nozzle draws a straight line A, changes direction by 90 degrees at the 0 point, and draws a straight line B. In this case, the speed of the nozzle relative to the chietzle is constant at the a part or gradually decelerates at the mouth part, reaches zero at the 0 point, and gradually accelerates at the heel part, as shown in Figure 8(b). The second part returns to constant speed. However, since the flow rate of the circuit-forming paint discharged from the nozzle is constant regardless of the moving speed of the nozzle, there is more circuit-forming paint at the mouth, zero point, and bottom than is required to form a circuit of a predetermined width. Since the liquid is discharged, the circuit is formed into a bump-like shape near the bend as shown in FIG.

FIG. 9 shows a case where a straight line is drawn in the X direction of the nozzle, and then the direction of movement is converted by 45 degrees at the 0 point, and another straight line is drawn.

That is, the nozzle moves at a steady speed in the straight part A, and gradually decelerates at the mouth part near the direction change point and reaches the 0 point. After the 45-degree direction change, the straight line section B gradually accelerates at the end near point C, and reaches a constant speed at the second section (FIG. 9(b)).

By the way, in the second part, since the moving table is moving in the X direction and the Y direction, the absolute speed of the nozzle relative to the table reaches 7 times that of the straight part A. However, the flow rate of the circuit forming paint discharged from the nozzle is constant, so the straight part A
Then, whether the prescribed drawing is realized or not, the 0 point becomes a hump-like shape, and the two parts of the straight line part B end up with a predetermined circuit of approximately 0.7 @ drawn (Figure 9 (c)). ), there was also a problem in this case that a circuit having predetermined electrical characteristics could not be obtained. In short, in conventional circuit forming apparatuses, the discharge flow rate does not change even if the speed of the nozzle relative to the table changes, resulting in non-uniform formation of the circuit pattern. The present invention attempts to solve the above-mentioned conventional problems by measuring the spread of circuit-forming paint from the nozzle in accordance with the moving speed of the nozzle in the bent pattern portion and always realizing uniform circuit formation.

[Operation] In the circuit forming apparatus according to the present invention, the flow rate of the circuit forming paint discharged from the nozzle is controlled according to the speed of the nozzle relative to the table, so that uniform circuit formation is always achieved.

[Embodiments of the Invention] Hereinafter, embodiments of the present invention will be described based on FIGS. 1 to 4 fFS. Note that the external perspective view of the first circuit forming device is shown in No. 6.
As shown in the figure, the same or equivalent parts as in the conventional example are given the same reference numerals, and their explanations will be omitted.

FIG. 1 is a block diagram showing the configuration of a control system in this embodiment. As shown in this embodiment, the air pressure source 9
An electro-pneumatic converter 14 is interposed between the CP and the solenoid valve 10,
U13b electro-pneumatic converter controller (D/A converter) 1
By controlling this electro-pneumatic converter 14 via 3a, the pressure of the compressed air sent to the solenoid valve IO is controlled.

12a is the absolute speed of the moving table and its relative ROM. Further, the CPU 13 controls the driving of the table driving device 11, the electromagnetic valve 10, and the nozzle 3. ROM12a,
The CPU 13, CPU 13b, and ' are configured by an air converter 14 as compressed air pressure control means.

Further, the electro-pneumatic converter 14 has a configuration shown in FIG. 2. That is, in the valve housing 15, an orifice 17 and a hollow part 18 are connected from the air inflow boat 16a.
The air flow path leading to the discharge boat 16b via the hollow part 1
A nozzle portion 19 is provided for leaking the air in the air conditioner 8 .

This nozzle! 1i1119 consists of an orifice 19a formed at the tip of the hollow part 18 and a discharge hole 19b provided above the orifice 19a, and by adjusting the opposing gap between the discharge hole 19b and the hollow 20, the leakage flow rate can be adjusted. Compressed air pressure from the discharge boat 16b can be controlled. On the other hand, the bellows 20 is fixed to the lower end of a coil frame 24 that is movable up and down with respect to a yoke 23 having a permanent magnet 21 and a magnetic body 22. And coil frame 2
4, three flapper coils 25 in a cylindrical area facing the magnetic body 22 are fixedly attached to the flapper coil 2.
By alternately applying a DC voltage according to the control signal from the CPU 13b to the flapper coil 2M recoil frame 24 and generating a magnetic force according to the voltage, the bellows 20 is moved upward or downward together with the flapper coil 2M recoil frame 24, The opposing gap between the bellows 20 and the discharge hole 19b can be adjusted. Note that the electro-pneumatic converter controller 13a is an element that D/A converts the digital signal from the cPU 13b into an analog voltage.

Next, the operation of the compressed air pressure control means will be explained with reference to the flowchart shown in FIG.

First, the movement speed data of the movement table in the X direction is input from the CPU 13 to the CPU 13b (step 1).
.

Similarly, data on the moving speed of the moving table in the Y direction is input from the CPU 13 to the CPU 13b (step 2).

Next, the CPU 13b calculates a composite speed in the X and Y directions from each of the above data (step 3), and reads a voltage value corresponding to the composite speed from a table stored in the ROM 12a (step 4).

Then, this voltage data is output to the electro-pneumatic converter 14,
Through the operation of the electro-pneumatic converter 14, compressed air is supplied to the nozzle 3 at a pressure that achieves a discharge flow rate that matches the calculated combined velocity (step 5).

In this way, as shown in Fig. 4, the pressure of the compressed air supplied to the nozzle 3 is adjusted appropriately to the discharge flow rate from the nozzle 3 according to the speed of the moving table relative to the nozzle. It is possible to obtain a given circuit by using

In other words, as shown in (a) and (b) of the same figure, if the speed is constant V, the air pressure that ensures a constant discharge flow rate is maintained, and if it gradually decreases, the air pressure also gradually decreases and the discharge flow rate also decreases. Decrease gradually. Furthermore, as the speed gradually increases, the air pressure also gradually increases, and therefore the discharge flow rate also gradually increases. In this way, as shown in FIG. 3(c), a predetermined proper circuit is always drawn in the pattern portion having the bent portion without being affected by the absolute speed of the moving table relative to the nozzle.

In the above embodiment, the pressure control means includes a CPU circuit and a ROM that are separate from the drive control system for the moving table and the like.
Of course, it is also possible to provide a circuit or use the same circuit in combination as shown in Figure 5, and the timing of pressurizing the electro-pneumatic converter should be advanced to absorb the first-order delay element caused by air. is also possible.

[Effects of the Invention] With the configuration and operation described above, the present invention controls the air pressure for discharging the circuit-forming paint from the nozzle according to the speed of the moving table relative to the nozzle, thereby reducing the flow rate of the circuit-forming paint discharged from the nozzle. Since the speed is controlled appropriately according to the speed, it is possible to form a circuit having a uniform cross-sectional shape at all times.

[Brief explanation of the drawing]

FIG. 1 is a block diagram showing a control system in an embodiment of the present invention, FIG. 2 is a sectional view showing the configuration of an electro-pneumatic converter,
FIG. 3 is a flowchart showing the operation in this embodiment, and FIGS.
c) is a plan view of the circuit, FIG. 5 is a block diagram showing another embodiment of the control system, FIG. 6 is a perspective view of the external appearance of the circuit forming bag, and FIG. 7 is a block diagram of the control system in the conventional example. Figure 8 (
a), (b), (c) and Fig. 9 (a), (b), (
c) is an explanatory diagram showing the moving speed of a moving table and the state of a drawn circuit in a conventional example. 1 ... ... Moving table 2 --- --- Substrate material 3 ... ... Nozzle 9 ... ... Air pressure source

Claims (1)

[Claims] In a circuit forming apparatus that forms a predetermined thick film integrated circuit by discharging circuit forming paint from a nozzle using compressed air onto a substrate placed on a moving table that moves horizontally in accordance with the circuit pattern, the compressed An air pressure control means is provided, and the pressure of the compressed air supplied to the nozzle is controlled in accordance with the absolute movement speed of the moving table in the bending pattern section, thereby making the discharge flow rate of the circuit forming paint from the nozzle variable. Characteristic circuit forming device.