JPS63110621A - Capacitor for hybrid integrated circuit - Google Patents
Capacitor for hybrid integrated circuitInfo
- Publication number
- JPS63110621A JPS63110621A JP61256118A JP25611886A JPS63110621A JP S63110621 A JPS63110621 A JP S63110621A JP 61256118 A JP61256118 A JP 61256118A JP 25611886 A JP25611886 A JP 25611886A JP S63110621 A JPS63110621 A JP S63110621A
- Authority
- JP
- Japan
- Prior art keywords
- capacitor
- integrated circuit
- hybrid integrated
- capacitance
- capacitors
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000003990 capacitor Substances 0.000 title claims description 26
- 239000000463 material Substances 0.000 claims description 2
- 239000002131 composite material Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000002048 anodisation reaction Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/13—Energy storage using capacitors
Landscapes
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
１産業上の利用分野〕
本発明は混成集積回路用コンデンサに関し、その容量値
及び容量温度係数の調整方法に関する。DETAILED DESCRIPTION OF THE INVENTION 1. Field of Industrial Application The present invention relates to a capacitor for a hybrid integrated circuit, and relates to a method for adjusting the capacitance value and temperature coefficient of capacitance thereof.
（従来の技術およびその問題点〕
従来の混成集積回路用コンデンサ（以下コンデンサと記
す）は、第２図に示すように絶縁性基板１１の上に形成
したＴ、等の金属膜１２を所定の形状にパターン化した
後、その一部を陽極化成等の方法により誘電体層１３と
し、その上にコンデンサの上部電極１４ａと下部電極１
４ｂを形成したｔ８遣を有している。第２図０′））、
（ｃ）はそれぞれ第２図（ａ）のＢＢ′、ＣＣ’断面図
を示している。Ｘ、矢印５はコンデンサの容！正値を調
Ｊすするためにレーザー等による誘電体層１３および危
属膜１２の切断位置３示している。上述の如＜１；Ｃ末
のコンデンサは容量値の調整は可能であるが、容：Ｉｔ
温度係数（以下、Ｔ ＣＣと記ず）については誘電体層
の物理的特性によって一義的に決まり、所望の＝「ｃ
ｃをｔ′、）るにはコンデンサ材料を選択しなければな
らないという欠点がある。(Prior art and its problems) A conventional capacitor for a hybrid integrated circuit (hereinafter referred to as a capacitor) has a metal film 12 such as a T formed on an insulating substrate 11 in a predetermined position, as shown in FIG. After patterning into a shape, a part of it is made into a dielectric layer 13 by a method such as anodization, and an upper electrode 14a and a lower electrode 1 of the capacitor are formed on top of the dielectric layer 13.
It has a t8 pitch which formed 4b. Figure 2 0')),
(c) shows sectional views BB' and CC' of FIG. 2(a), respectively. X, arrow 5 is the capacity of the capacitor! In order to adjust the positive value, the cutting position 3 of the dielectric layer 13 and the dangerous film 12 by a laser or the like is shown. As mentioned above, it is possible to adjust the capacitance value of capacitors with <1;C end, but the capacitance value is
The temperature coefficient (hereinafter referred to as TCC) is uniquely determined by the physical properties of the dielectric layer, and is determined by the desired = "c".
The disadvantage is that the capacitor material must be selected in order to reduce c to t'.
１問題点を解決するための手段〕
本発明のコンデンサは、Ｔ （： （”の違う誘電体層
からなる二つのコンデンサを並列に組合せた構造を存し
、各々のコンデンサの容量１１／ｉをレーザー光等によ
り調′整することによって所望の合成容量値と”「（”
（：を実現することを特徴とする。[Means for Solving Problem 1] The capacitor of the present invention has a structure in which two capacitors made of dielectric layers with different T(: ") are combined in parallel, and the capacitance of each capacitor is By adjusting with laser light etc., the desired composite capacitance value and “(”
(It is characterized by realizing the following.
１実施例１
次に、本発明について図面を参ＩＴｑｊ シて説明する
。第１図は本発明によるコンデンサの一実施例を示す平
面図である。第１図において、３．：ｔ、３ｂはそれぞ
れＷなった値のＴＣＣを持つ誘電体層てあり、矢印５ａ
、５ｂはコンデンサＡ、Ｒの容量値を調整するため切断
位置と示している。1 Embodiment 1 Next, the present invention will be explained with reference to the drawings. FIG. 1 is a plan view showing an embodiment of a capacitor according to the present invention. In FIG. 1, 3. :t and 3b are dielectric layers each having a TCC value of W, and arrow 5a
, 5b are shown as cutting positions for adjusting the capacitance values of capacitors A and R.
いま、コンデンサＡ、Ｂとこれらの合成コンデンサのＴ
ＣＣ及び抵抗調整時（常温）の容量値をα８．αｂ、
α０及びＣ−、ｂ、ＣとするとｂＴ（”（ニ）だけ温度
変化があった場合のコンデンサＡ、Ｂによる容量値及び
これらの合成容量値を”： ａＴ＋ ＣｂＴ、ＣＴとす
れば、ＣＴは次の様に表わすことができる。Now, T of capacitors A, B and their composite capacitor
The capacitance value when adjusting CC and resistance (at room temperature) is α8. αb,
If α0 and C-, b, and C, then bT ("The capacitance value of capacitors A and B and their combined capacitance value when there is a temperature change by (d)": aT+ CbT, CT, then CT is It can be expressed as follows.
（１、・ （：８□ ＋（二ゎ、 ・ＣＩＩＸ（１＋
α３ × ｂＴ ）＋ＣｂＸ （ｆｉ（ｚｂＸΔ′Ｆ
）
ここで、α１．０はき成コンデンサのＴＣＣ及び容−は
であるから、
Ｃａ （Ｉ Ｒ十Ｃｂ （Ｚ ｂ
（ビ ＝ （〕 ３ −［Ｃｈ
となる。(1,・(:8□+(2ゎ,・CIIX(1+
α3 × bT )+CbX (fi(zbXΔ′F
) Here, since the TCC and capacity of the α1.0 dielectric capacitor are, Ca (I R + Cb (Z b (Bi = () 3 - [Ch).
」−式のα３．αゎは既知の値であるから第１図のコン
デンサＡ、Ｂの容Ｑ ＣＢ 、 Ｃｂを調整することに
より所望のＴ ＣＣ及び容に値を得ることが可能である
。” - α3 of the equation. Since αゎ is a known value, it is possible to obtain the desired T CC and capacitance values by adjusting the capacitances Q CB and Cb of the capacitors A and B shown in FIG.
１発明の効果〕
以上述べたように本発明によれば、並列に接続された各
コンデンサの容量値を調整することにより、所望の容量
および’ｌ” ＣＣを有するコンデンサを得ることがで
きる。1. Effects of the Invention] As described above, according to the present invention, a capacitor having a desired capacitance and 'l' CC can be obtained by adjusting the capacitance value of each capacitor connected in parallel.
第１図は本発明によるコンデンサの一実施例を示す平面
図、第２図（ａ）、（ｂ）、（ｃ）はそれぞれ従来のコ
ンデンサを示す平面図、ＢＢ′断面図、ＣＣ′断面図で
ある。
３ａ、３ｂ、１３−−−誘電体層、４ａ、１４ａ・−上
部’ｔＫ極、４ｂ、１＝ｉｂ・・・下部電極、１１・−
・絶縁性基板、１２・・・金属膜、５ａ、５ｂ、１５・
・・切断位置。
代理人 弁理士 内 原 音（
箔（回FIG. 1 is a plan view showing an embodiment of a capacitor according to the present invention, and FIGS. 2(a), (b), and (c) are plan views, BB' sectional views, and CC' sectional views showing conventional capacitors, respectively. It is. 3a, 3b, 13--dielectric layer, 4a, 14a--upper 'tK pole, 4b, 1=ib...lower electrode, 11--
- Insulating substrate, 12... Metal film, 5a, 5b, 15.
... Cutting position. Agent: Patent Attorney Oto Uchihara (Haku)
Claims (1)
コンデンサを並列に組合せた構造を有し、個々のコンデ
ンサの容量値を調整することを特徴とする混成集積回路
用コンデンサ。A capacitor for a hybrid integrated circuit, which has a structure in which two capacitors made of capacitor materials with different temperature coefficients of capacitance are combined in parallel, and is characterized in that the capacitance value of each capacitor is adjusted.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61256118A JPS63110621A (en) | 1986-10-27 | 1986-10-27 | Capacitor for hybrid integrated circuit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61256118A JPS63110621A (en) | 1986-10-27 | 1986-10-27 | Capacitor for hybrid integrated circuit |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63110621A true JPS63110621A (en) | 1988-05-16 |
Family
ID=17288146
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61256118A Pending JPS63110621A (en) | 1986-10-27 | 1986-10-27 | Capacitor for hybrid integrated circuit |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63110621A (en) |
-
1986
- 1986-10-27 JP JP61256118A patent/JPS63110621A/en active Pending
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