JPS63110578U - - Google Patents
Info
- Publication number
- JPS63110578U JPS63110578U JP40887U JP40887U JPS63110578U JP S63110578 U JPS63110578 U JP S63110578U JP 40887 U JP40887 U JP 40887U JP 40887 U JP40887 U JP 40887U JP S63110578 U JPS63110578 U JP S63110578U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- solution
- semiconductor
- substrate
- liquid phase
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 11
- 239000004065 semiconductor Substances 0.000 claims description 8
- 230000001681 protective effect Effects 0.000 claims description 5
- 239000007791 liquid phase Substances 0.000 claims description 3
- 230000014759 maintenance of location Effects 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP40887U JPH0538062Y2 (un) | 1987-01-06 | 1987-01-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP40887U JPH0538062Y2 (un) | 1987-01-06 | 1987-01-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63110578U true JPS63110578U (un) | 1988-07-15 |
| JPH0538062Y2 JPH0538062Y2 (un) | 1993-09-27 |
Family
ID=30777355
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP40887U Expired - Lifetime JPH0538062Y2 (un) | 1987-01-06 | 1987-01-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0538062Y2 (un) |
-
1987
- 1987-01-06 JP JP40887U patent/JPH0538062Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0538062Y2 (un) | 1993-09-27 |
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