JPS63110564U - - Google Patents
Info
- Publication number
- JPS63110564U JPS63110564U JP23287U JP23287U JPS63110564U JP S63110564 U JPS63110564 U JP S63110564U JP 23287 U JP23287 U JP 23287U JP 23287 U JP23287 U JP 23287U JP S63110564 U JPS63110564 U JP S63110564U
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- beam path
- evaporated metal
- electron
- heating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010894 electron beam technology Methods 0.000 claims description 6
- 239000002184 metal Substances 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims 2
- 238000007738 vacuum evaporation Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23287U JPS63110564U (OSRAM) | 1987-01-07 | 1987-01-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23287U JPS63110564U (OSRAM) | 1987-01-07 | 1987-01-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63110564U true JPS63110564U (OSRAM) | 1988-07-15 |
Family
ID=30777017
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP23287U Pending JPS63110564U (OSRAM) | 1987-01-07 | 1987-01-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63110564U (OSRAM) |
-
1987
- 1987-01-07 JP JP23287U patent/JPS63110564U/ja active Pending
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